近日，工業和信息化部、發展改革委和財政部發布了《機器人產業發展規劃（2016－2020年）》。
機器人既是先進制造業的關鍵支撐裝備，也是改善人類生活方式的重要切入點。無論是在制造環境下應用的工業機器人，還是在非制造環境下應用的服務機器人，其研發及產業化應用是衡量一個國家科技創新、制造發展水平的重要標志。大力發展機器人產業，對於打造中國制造新優勢，推動工業轉型升級，加快制造強國建設，改善人民生活水平具有重要意義。
為貫徹落實好《中國制造2025》將機器人作為重點發展領域的總體部署，推進我國機器人產業快速健康可持續發展，特制定本規劃，規劃期為2016－2020年。
一、現狀與形勢
自1954年上第一臺機器人誕生以來，工業發達國家已經建立起完善的工業機器人產業體係，核心技術與產品應用，並形成了少數幾個佔據主導地位的機器人企業。特別是國際金融危機後，這些國家紛紛將機器人的發展上升為國家戰略，力求繼續保持優勢。近五年來，工業機器人銷量年均增速超過17%，2014年銷量達到22.9萬臺，同比增長29%，制造業機器人密度（每萬名工人使用工業機器人數量）平均值由5年前的50提高到66，其中工業發達國家機器人密度普遍超過200。與此同時，服務機器人發展迅速，應用範圍日趨廣泛，以手術機器人為代表的醫療康復機器人形成了較大產業規模，空間機器人、倣生機器人和反恐防暴機器人等特種作業機器人實現了應用。
我國機器人研發起步於20世紀70年代，近年來，在一係列政策支持下及市場需求的拉動下，我國機器人產業快速發展。2014年自主品牌工業機器人銷量達到1.7萬臺，較上年增長78%。服務機器人在科學考察、醫療康復、教育娛樂、家庭服務等領域已經研制出一係列代表性產品並實現應用。自2013年起我國成為工業機器人應用市場，2014年銷量達到5.7萬臺，同比增長56%，佔銷量的1/4，機器人密度由5年前的11增加到36。
雖然我國機器人產業已經取得了長足進步，但與工業發達國家相比，還存在較大差距。主要表現在：機器人產業鏈關鍵環節缺失，零部件中減速器、伺服電機和控制器等依賴進口；核心技術創新能力薄弱，產品質量可靠性低；機器人推廣應用難，市場佔有率亟待提高；企業“小、散、弱”問題突出，產業競爭力缺乏；機器人標準、檢測認證等體係亟待健全。
當前，隨著我國勞動力成本快速上漲，人口紅利逐漸消失，生產方式向柔性、智能、轉變，構建以智能制造為根本特徵的新型制造體係迫在眉睫，對工業機器人的需求將呈現大幅增長。與此同時，老齡化社會服務、醫療康復、救災救援、公共、教育娛樂、重大科學研究等領域對服務機器人的需求也呈現出快速發展的趨勢。“十三五”時期是我國機器人產業發展的關鍵時期，應把握國際機器人產業發展趨勢，整合資源，制定對策，抓住機遇，營造良好發展環境，我國機器人產業實現持續健康快速發展。
近日，工業和信息化部、發展改革委和財政部發布了《機器人產業發展規劃（2016－2020年）》。
機器人既是先進制造業的關鍵支撐裝備，也是改善人類生活方式的重要切入點。無論是在制造環境下應用的工業機器人，還是在非制造環境下應用的服務機器人，其研發及產業化應用是衡量一個國家科技創新、制造發展水平的重要標志。大力發展機器人產業，對於打造中國制造新優勢，推動工業轉型升級，加快制造強國建設，改善人民生活水平具有重要意義。
為貫徹落實好《中國制造2025》將機器人作為重點發展領域的總體部署，推進我國機器人產業快速健康可持續發展，特制定本規劃，規劃期為2016－2020年。
MKS 153D-26474, Valve, Throttle, Heatable, FF350, ORNG, Novellus 60-289557-00
VAT 65040-PA52-ALV1 used heated pendulum valve
Asyst 3200-1107-01, PCA, PCB, 395630
Asyst 1107-02-1600000?3 Rev-B, PCA, PCB, Dotter Board, XD0341032, 395631
NEW Bronkhorst / Porter MFC NVL-001F, TEOS 0.2 ml/min, Novellus 22-00654-00
Nais, Matsushita, Lightpix AEIO Vision Sensor Kit, ANE11, ANE12, ANE1030, 395640
6 MKS baratron 750B11TCE2GK, 10 TORR, 0-10 VDC
50 NEW Picolight PL-1LD-00-S40-C?7, 10G, 850nm, TOSA
Brooks Automation 10080-9, AG Associates 4900-0006-089, Prealigner 395644
CyberOptics 104133/A, ASSY, Wafer edge sensor, EX, general, EX-43-01
Novellus 02-283808 gas manifold assy w Brooks 5866RT MFC He 300 SCCM
AMAT 0030-90036 Casting Carrier Contact 200KV
4 STEC MFC SEC-4400M Cl2, HBr, used
Novellus / IPEC 2805-770376, New, Motion control assy w Warner SS2000D6 Slo-Syn
Iwaki Mag-Drive Pump CMD-280 Head (ft) 42, Capacity (GPM) 2.5
Iwaki Mag-Drive Pump CMD-199 1/3 HP, 60Hz, 3440 rpm
5 new AMAT 0190-35164 assy. water flow switch 1.50 GPM Proteus 9100B24P9
MKS 1651D Throttle valve controller 1651D-15445
MKS 1651D Throttle valve controller 1651D-23044
AMAT 0021-10089 Insert Base, 200 MM, EXT, Cathode, Tie
Lot of 5 AMAT 0020-06788 Shield, Lower Cylinder Half, Port
AMAT 0010-00704 Clamp Ring, XTAL, Vespel, 4, Assy
AMAT 0021-36214 Clamp, Vespel, 150MM, LPRVC
Lot of 3, Novellus 0780-738673, Bayside NR23S-010-025, Precision gear head 10:1
AMAT 0200-28434 Titanium Clamp
Parker Porter P2000IDC007 Novellus 27-149452-00 LMFC, 0.5 ml/min, TBM, PI MFC
AMAT 0050-96026 Weldment H2 NH3 B2H6 SIH4 Manifold WNX
PFEIFFER Vacuum TCP 600 balzers PM C01 320, balzers pfeiffer Gmbh, S7015
PFEIFFER Vacuum TCP 600 power supply balzers PM C01 320, Pfeiffer Gmbh
perkin elmer backing plate AlCu target 8 inch, suptter PVD tool
VAT 2 inch gate valve with 2 iso connectors 14038-PE24-AIU1?/0006 A-375238
VAT, KF40 Isolation Valve 24332-KA41-1002?/0777
AMAT 0020-90607 Plate, Valve-HiVac
MKS 653B-21801 Throttle valve, cal-weld, 10-160921-00/2, S8214
Unit 9000 Series UFM-9660 He 6L Lot's of 3
Toray Engineering LC-800 Oxygen Analyzer, High Functionality
5 NEW Power one HCC15-3-A, power supply, +-12V or +-15 VDC
Brooks 5850E, BCL3, 200 SCCM, 5850EC3BG4QB2D, 0190-00074, MFC, VCO Connection
Moeller Main Power circuit breaker IEC/EN 60947 690V 400A
UNIT UFC-1560A, HF, 50 sccm, MFC 1560
New HVA gate valve 21210-0256Z-002
UNIT UFC-1560A, HF, 500 sccm, MFC 1560
UNIT 8165, SiH4, 30 sccm, MFC 8165, 3030-12078W
AMAT 0040-98388 Loadlock Pumping Block
NEW AMAT 0190-18126, AC panel, ETO3, 4 chamber, ultima
AMAT 0190-02977 ASTEX ETO ABX-X355-SP RF generator controller
Power distribution with power fail detector, asyst 12846-002, REV A, XP 0603
MKS 250B throttle valve controller with vacuum general 80-6B pressure display S8
MKS 250B throttle valve controller with vacuum general 80-6B pressure display S1
MKS 250C throttle valve controller with MKS 270A pressure display
MKS 250B-1-DS-P02-8?3 throttle valve controller with MKS 270 pressure display
AMAT 3030-06445, UNIT 8160, N2, 100 SCCM, MFC 8160
UNIT UFC-1661E, SiH4, 750 SCCM, MFC 1661, novellus 22-190306-00
5 New Parker 453009393, gas line valve, monoblock, 3 way, 22-159953-00
Brooks 5850E MFC 5850EC1BF4LB2D CL2 Gas 100 SCCM, 0190-00070, Calibration sheet
NEW A5875 Cap gauge ASP assembly 859-8090-004 A PCB board for Perkin Elmer
IPEC / Planar 0150-109298, Polish head gear motor with paperwork
IPEC / Planar 2850-719087 Waferhead Gearmotor
AMAT 0010-60005, 5 IN Silane Suscpetor (Plate Stock)
MKS GBR1B24CR1, 123714-G1 GBROR Insitu flow verifier
UNIT 8165 Device Net MFC, SiH4 gas, 300CC range, AMAT 3030-03047, UFC-8165
LH research IM803-133-115AZ?, power supply, 100W 5V, 849090.102
7 Novellus 70-055860-00 POD, SMIF, ASYST, KA200-85MT, 200mm
MRC backing plate with WILLIAMS advanced materials AL/CU target
AMAT 0021-17549 Liner Process, PVDF, 300MM IBC, IECP
NEW SIMCO Aerostat guardian 4004675 ionization Air blower with lights
Coherent Mopa Pulse Board Assy 1068389
3 AMAT 0150-94184 F/0, T1, 4450mm, X4F.Tx/X14A. D .Rx
AMAT 0190-02977 ASTEX ETO ABX-X355_SP RF generator controller
Kollmorgan MT1506B1-E2C1 Goldline servo motor, 968601, Novellus
AMAT 0020-85024 Flange chamber sealing
AMAT 0100-90267 PWBA 9210 Wafer Arm Replaces
WAVE BIOTECH BIOREACTOR CO2MIX20, 115/230 VAC
Control Concepts 1014-03 AMAT 0190-35634, SCR Power Controller
CTI Cryogenics 8113058G001 ON-BOARD network, Helix technology
Lot of 15 new Briskheat CENTMOD-F Ethernet Module
JDSU 2214-25MLUP Laser and Power supply 2114-25MLUP
AMAT 0190-13235 Spec DWG, Interlock Juntion Box, 300MM
AMAT 0020-07570 LINER, CATHODE, ALIGNED, OXIDE ETCH
53 Tokyo Electron Mini-Circuits SRA-1 Demodulator
2 STEC Mass Flow Controller SEC-4400MC 50 SCCM
AMAT 0040-09675 Etch Chamber Cathode, Base with RF Rod
9 Furon DV2-144NCD2, P/N 1103307 selinoid valve, 24 VDC, 50/60 Cycles, .275 Amps
6 NEW AMAT4020-01416 filtr AIR/WTR 1000 PSIG vacuseal
10 NEW Keyence FS-V12P Fiber optic sensors.
NEW LAMBODA LFS-43-15 REGULATED POWER SUPPLY
MKS 628B-24626 Baratron, 4T 1/2VCR 15P 100C
UNIT UFC-8160, NF3, SiH4, PH3, lots of 3, used
17 AMAT 3080-01032 timing belt 1/5P X 3/8WD
PB02807 BM18164 DAN 9710094
BM26015/L AB26015/N ASSY, H-STN XORB-100
BM302960000 /D 9923DAN
502622 BM303030200
19801004800874 JZ29A-01 MEIDEN, MU24A30756
FABR 016763 REV A
DSC-002 99A5 PCB BOARD
PTI4 4896
PROM DISK 66700301
15 McDaniel Controls Inc. AB 00724 0-100 PSI Gauge 1/8" NPT
AMAT 3870-04001 Slit Valve Door
Assyst 3000-1121-01 Controller Interface
Dainippon SEPC-0065, TU controller, 2-VC-13234
ABB EH210C-L1 Relay Contactor AMAT 1200-01383, 3P 230A 120VAC COIL 50/60HZ,
AMAT 0200-20055 Endura Pre Clean chamber 8 inch Quartz Chuck with antenna, PC II
Phasetronics P1229 Driver, AMAT 0190-05682, 2 unit
Scientific Technologies MS4300B-2, Minisafe Light Curtain
NEW Millipore WDFG80PTF Filter, PTFE, .2um, PF-80-TI line DSP O/R Type.
AMAT 0090-03225 SERVO MOTOR, SANYO DENKI P50B05020DCS00M BL Super P5
AMAT 0100-00593 PWBA.X Sensor Photo Diode Control PCB
NEW AMAT 0021-14199 Cover, Upper Chamber, 300MM DPS II
MKS 627A01TBC, Baratron, 1 Torr, with Huntington PV-053-H441 Iso Valve
LAM 685-094680-001 LIGHT PEN 0080025890 interface PCB
Novellus / IPEC 2805-770376, Motion control assy w Warner SS2000D6 Slo-Syn
AMAT 0020-27944 clamp ring, 6 inch, 150mm HTHU HOT AL, DAD
NEW AMAT 0020-11482 Clamp Ring
NOVELLUS ISIOC HI-LO Transfer 02-150755-00 REV.A
ISIOC Power supply, 02-125105-00, 27-053659-00 used
MKS BARATRON 122B-11993, 100 TORR, CALIBRATION SHEET.
NEW AMAT 0020-21945 POCKET PLATE 8 INCH PRECLEAN, AL203, S425
National display systems DM-S12/ZN, assy 90X0002, 12 inch touch screen
MKS Baratron 628B-24626, 4 Torr Range, S0010229
LAM 716-020904-015, Ring Edge Focus, Lower wafer clamp, Cleaned
NEW AMAT 0020-21945 POCKET PLATE 8 INCH PRECLEAN, REV A
AMAT 0020-78713 Clamp, Inner
Asyst Technologies 3200-1121 Controller Interface 3000-1121-01 PCB
HEIDENHAIN XY axis controller VRZ 720 B and 2 sensor
Lot of 6 Novellus AC3705, Pacific Scientific E21SCHT-LDN-SS-?02, Bipolar stepper
AMAT 0020-20676 OBS, Preclean Cooldown Cover
NEW AMAT 3620-00186 Clamp for turbo pump ATH1600M
Tencor 198331E, 4 channel motor control PCB board
4 NEW AMAT 0040-45408 VESSEL, IPA BUBBLER WET CLEAN
AMAT 0190-07443 Signal Conditioner for Encoders
Sankyo Denki P50B05020DCS00M?A07, AMAT 0090-03225, Elect Assy, 200W Servo Motor
AMAT 0090-00655 Motor Servo, AC Servomotor BL Super P5 P50B05020DCS00M
NEW ROX Wafer mapping sensors ROX-43 in OEM box
Mitsubishi Melsec FX0N-60MR Programmable controller
Mitsubishi Melsec FX0N-24MR-ES Programmable controller, FX0N-3A
Cyber Optics Semiconductor ROX-43-AIC-14.5
Parker SQ140E503PLFSFF?M Pressure Regulator for gas bottle
AMAT 0660-01819 CARD PC MULTIFUNCTION I/O
Vacuum general MDV-100B Throttle valve, Stepping motor M061-FD-301
AMAT 0150-04153 Cable Assy, Coax, Rf, Gen, DPA
1 box of 2 Opto 22 AD9T 1 box of 25 new analog digital converter module
2 LAM 715-011531-011 LRC Electrode
AMAT 0010-91456ITL Assy, Arm Position Sensors
7 AMAT 3060-90191 BEARING BALL ANGULAR
Brooks 002-5194-01 Automation controller assy with mag 7.3 personality board
8 AMAT 0200-09216, Ring, Pedestal, 6" Metal Etch
STEC SEC4400M, Lot Of 4, MFC 500 sccm, HE (2), SiH4 (1), PH3 (1)
3 UNIT MFC, UFC-1660, N2 200 SCCM, SF6 50 CC, Ar 2 SLM
AMAT 0021-26273 LINER CATHODE 300MM DPSII Tetra
4 NEW MKS baratron 850BRDPCB3GD, 250 Psia, with paper works
2 AMAT 0020-32034, Vespel Clamp Ring
3 Unit 1660 MFC UFC-1660 Cl2 50 sccm, SiH4 200 sccm,He 200 sccm
23 AMAT 3870-01766 Diaphragm Valve Manual, Fujikin
13 AMAT 3870-02407 Veriflo 955MS5196 Manual Diaphragm Valve 45300391
Asyst Technologies 3200-4349-02 Crossing Automation
ASYST 4002-9667-01 Wafer handler end effector robot blade, Thin AEG EE
MKS 146 Vacuum gauge and measuement system with 1 capacitance manometer card
Lot of 8, NT international D70-F-02-LP 955623 new Red lion Controls CUB4LP/CL
3 Unit 1660 MFC, UFC-1660 N2 30 SCCM, SF6 100 SCCM, BCl3 20 SCCM
3 Unit 1660 MFC, UFC-1660 Cl2 200 SCCM, N2 3 SLM, BCl3 100 SCCM
2 AMAT 0150-36727 Cable Assembeley
HEWLETT PACKARD 54504A DIGITIZING OSCILLOSCOPE 400MHz
3 AMAT 0190-01376 dual metering valve assembly,MKS 750B21TCD2GA, 20 torr 10 torr
Bag of 24 Briskheat CENTMOD-F Ethernet Module
MKS throttle valve controller PN 651D-23564 SN 000922780
MKS throttle valve controller PN 651D-23564 SN 001136447
MKS throttle valve PN 651D-23564 SN 017545499
3 NEW Proteus switch 800 series, proteus 0504SA4, 24 VDC, 30 mA
AMAT 0010-10528 C, Pedestal Assembly, 200mm, Notch, IS, NI, Lift 3
3 AMAT 0200-09373 West Coast Quartz Cover Ring Quartz Alum 150mm New
Lam 716-011036-001 Ring filler orifice, Alumina
Cleaned WCU, SOG, Cover LHP CT2985-486379
5 New, ICE MIO-IDC-32-300, 24VDC 32 point input modules
AMAT 0020-10771 FACE PLATE, PERF, SHOWERHEAD 150 mm, CVD, BOC EDWARDS
LAM 715-011986-008 Cap, Lower electrode, 8" Domed .035
3 AVAYA Lucent SD-66984-01 DEF ECS Carrier Single w/ PS one 1217A and two 1217B
NEW AMAT 0010-13806 AC power box assy orienter OCR
NEW ASYST 04600-001 Rotator assy, send side, ergo, Novellus 94-1173
AMAT 0242-00532, 0040-01066, 0040-01097, 0400-01098, 0040-01106, 0140-00368
4 BECO MAN-103307, fluid solenoid valve
2 AMAT 0660-01791 CARD MAIN CENTER ASSY 210-40572-01 (SPARE FOR 0650-01)
RGA AMETEK Dycore M100 P/S, M100FG equipment Monitor
4 AMAT 0020-25256, 101 disc shutter Ti-nitride 8 inch wafer process, looks clean
AMAT 0010-36067 Lamp Module Assy gold centura
AMAT 0010-09978, P5000 CVD Lamp module 200mm, S34794
Perkin Elmer Auto sampler for atomic absoption spectrometer
3 Unit MFC 1660, UFC-1660 Ar 100 SCCM, BCl2 50 SCCM, Cl2 500 SCCM.
AMAT 0010-09335 Lamp Module Assembly, 6 in. TEOS CVD P5000, S25594
6 NEW Ultratech stepper 10-20-03636 Vacuum pad, WTC, Theta chuck
STEC LF-410A-EVD, TEPO 7.0 g/min Liquid Flow Controller
3 Stec MFC SEC-4400M, NH3, 300 SCCM
2 BOC EDWARDS QMB250F Mechanical Booster Blower
6 Tylan MFC, FC-260, H2, 1 SLPM
New AMAT 0150-02632 cable assy. N(M), R/A to N(M), STR RG-21
2 UNIT 8101, UFC-8101, 10 SLM Ar gas, and 10 SLM 2% O2/Ar
2 AMAT 0190-14941 stainless steel flexible hose
lot of 4 Industrial Control Equipment MIO-IDC-32-300 input modules 32 point
NSK EEO408C05-25 Motor Controller
2 Vexta A3761-9215HG 5-Phase Stepping Motor UHG100-2B
3 SBC B9300600AB18710?822 Single board computer W/P4 2.0 Ghz CPU and 1 GB Ram
Berkeley Process controls AC brushless motors ASM121-A-0/A-22?-NB/10, 950689
3 AMAT 0021-18779 Flange, Bottom 300MM Producer
NEW Banner SLSE14-900Q8 Light Curtain Emitter 900mm
ASYST 4003-0283-01 ASSY FRU OPT WAFER MAPPER BTB FWM-1012-0033
NESLAB RTE 111 chiller R134A 134103200101
AMAT 0190-18430 HDPCVD Saphire Lightpipe probe, HDP Ultima Chamber
AMAT 0190-35250 MFC Calibrated IHC Assy 5200 Centura
Box of 20 Opto 22 AD9T Analog digital converter
Vexta PKC 2P435 5 Phase Stepper Motor, Novellus 0150-738041, New in box
BROOKS Mass Flow Controller 5850 O2, N2, HCL, lots of 3
4 UNIT MFC UFC-1100A, AMAT 3030-01065 N2, 20 SCCM Gas Range,
AMAT 0200-09346, Cover Wrap Around Quartz Oxide
AMAT 0021-20116 Blade, 6" Shutter, 6 Finger Hoop, 395406
3 NEW EUROTHERM 808 Temperature controller, 808 RS4 controller, 27-125058-00
Phasetronics P1038-B #4639 AMAT 0190-09160, Lamp Driver, 395546
Phasetronics P1125 #7128 AMAT 0190-09378 Lamp Driver, 395547
SCR 1014-03, AMAT 0190-35634, Heater Driver DCSXZ, 395549
Semiconductor Systems 02-107
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