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ANELVA 844-0866-4 TOOL, TARGET LIFTING
ANELVA 844-0881 SHIELD, CC CORNER
ANELVA 844-0886C BELT, PY3 SKIN "PACK C"
ANELVA 844-0886G BELT, PY3 SKIN "PACK G"
ANELVA 844-0886J BELT, PY3 SKIN "PACK J"
ANELVA 844-0886M BELT, PY3 SKIN "PACK M"
ANELVA 844-0886N O-RING, "N" FOR PY3 BELT
ANELVA 844-0886U BELT, PY3 SKIN "PACK U"
ANELVA 844-0886V BELT, PY3 SKIN "PACK V"
ANELVA 844-0887I RING, VITON "I" FOR BELT
ANELVA 844-0887J RING, VITON SKIN "PACK J FOR B
ANELVA 844-0887K RING, VITON "K" FOR BELT
ANELVA 844-0887L RING, VITON SKIN "PACK L FOR B"
ANELVA 844-1471 T-35 THERMOCOUPLE (3P)
ANELVA 844-1904 VALVE
ANELVA 844-1905 VALVE
ANELVA 844-2574-2 ADAPTOR, PT 3/8"
ANELVA 844-3908A SPACER #E27206
ANELVA 844-5911 6P TERMINAL COVER
ANELVA 844-6455 SHIELD, 20X19 (3)
ANELVA 844-9508-W O-RING
ANELVA 844-9508-X O-RING, SKINPACK, X (6")
ANELVA 844-9680 ORIFACE FITTING JIG
ANELVA 845-1501 FILTER ASSY
ANELVA 845-4184 FUSE, LITTLE FUSE 10 (326010)
ANELVA 849-4077-80 D/A MODULE
ANELVA 852-0424 SHIELD, CHAMBER
ANELVA 853-0698 SHIELD, COVER FERRULLE
ANELVA 853-1547 MG MOTOR DRIVE PCB (ILC1013)
ANELVA 854-0251 TUBE, SHIELD
ANELVA 854-0257 STOPPER, SHUTTER
ANELVA 854-0378B SHIELD, STOPPER
ANELVA 854-0387 STOPPER 1 (6")
ANELVA 854-1048 SHIELD, ALUMINUM COVER
ANELVA 854-1355E O-RING, "E" FOR PY3 BELT
ANELVA 854-1355F O-RING, "F" FOR PY3 BELT
ANELVA 854-1355G BELT, PY3 SKIN "PACK G FOR 5"
ANELVA 854-1355H BELT, PY3 SKIN "PACK H FOR 5"
ANELVA 854-1355I O-RING, "I" FOR PY3 BELT
ANELVA 854-1355J O-RING "J" FOR PY3 BELT
ANELVA 854-1355K O-RING, "K" FOR PY3 BELT
ANELVA 854-1355L BELT, PY3 SKIN "PACK L FOR 5"
ANELVA 854-1355M O-RING "M" FOR PY3 BELT
ANELVA 854-1355N O-RING, "N" FOR PY3 BELT
ANELVA 854-1499 STOPPER SHIELD
ANELVA 854-1500C SHIELD, (2) C AT SHUTTER
ANELVA 854-2373 GASKET, GV 60
ANELVA 854-7060 BEARING, SM8 PLATED
ANELVA 85410 DESSICANT, OIL MIST
ANELVA 863-9216 POWERSUPPLY SWITCH
ANELVA 869-8097-001 CABLE, ASSY, COMPUTER
ANELVA 890-0013 PRECISION ADJ. PRESSURE SWITCH (ROBITECH)
ANELVA 890-0017-06 GAUGE
ANELVA 909-0508 CABLE ASSY
ANELVA 9170-SS513 O RING AS568 #170 (N33039292)
ANELVA 94-8481-00817 DRKV CMA SCREW CAPS
ANELVA 95-11101215 SEAL
ANELVA 95-11204425 O-RING SEP MV (N33001207)
ANELVA 95-11204495 O-RING
ANELVA 95-11204585 GASKET 953-9210
ANELVA 95-11317855-1A MEKA LOCK SA16
ANELVA 95-11508985 BC30CA AC SERVO MOTOR
ANELVA 95-20203 ABSORBER FOR CRC-420
ANELVA 989-0001 CHAIN ASSY SENSOR
ANELVA 989-0047 FLAT CABLE
ANELVA 999-0065 VALVE CHECK TEFLON 1079
ANELVA A-14-37594 HEATER CIRCULAR PY124X24
ANELVA A11-23422 FACING ELECTRODE UPPER PLATE SHIELD
ANELVA A11-25577 AL SHUTTERLESS PUMPING SHIEKD FOR LT-TI/LT-TIN
ANELVA A11-25580 SUS SHUTTERLESS PUMPING SHIELD FOR AL-CU
ANELVA A11-26164 ANELVA TARGET SHIELD FOR TIN KITS
ANELVA A11-26167 ANELVA TARGET SHIELD FOR AL-CU
ANELVA A11-26249-4 RING SHIELD 8" FOR FULL FACE
ANELVA A11-26474 WAFER HOLDER FOR 1060
ANELVA A11-27494 SP LOCK CYLINDER INTER-STOP ANE
ANELVA A11-32475 COVER RING FOR TIN + LT/TIN ANELVA KITS
ANELVA A11-34807 ANELVA COVER RING FOR AL-CU KITS
ANELVA A11-35563 I-4100PW396 COVER H250
ANELVA A11-36138 ANELVA LT-TIN TARGET SHIELD
ANELVA A11-62766-02 EXHAUST CHAMBER SHIELD (UP)
ANELVA A12-00838 HOLDER SHIELD PLATE
ANELVA A12-02158 BELT ASSY CL C
ANELVA A12-03382 SHIELD, COVER (3)
ANELVA A12-04234 SHIELD, RING HOLDER
ANELVA A12-05166 UP/DOWN CYLINDER ASSY
ANELVA A12-05168 UP/DOWN CYLINDER ASSY FOR UPPER ARM AM2
ANELVA A12-18477 INFUSION RING 4*306AGS
ANELVA A12-19168-04 SEP ARM CONT. PCB ASSY
ANELVA A12-23608 WAFER PRESSER FOR 5"
ANELVA A12-23608-5 WAFER PRESSER FOR 6"
ANELVA A12-35545 CHAMBER SHIELD (SUS)
ANELVA A12-35545-3 CHAMBER SHIELD (SUS)
ANELVA A12-50021 FORK SEP, 8"
ANELVA A12-50284 ANELVA ETCH COUNTER ELECTRODE
ANELVA A12-50284-04 SHIELD RING
ANELVA A12-54511 CHAMBER SHIELD (PARTS ASSY A12-02500)
ANELVA A12-54512 CHAMBER SHIELD No.2 (PART ASSY A12-02500)
ANELVA A12-54513 CHAMBER SHIELD No. 3 (PART ASSY A12-02500)
ANELVA A12-56647-3 ETCH SHIELD GATE VALVE
ANELVA A12-58065 PY281 TEFLON RING
ANELVA A12-58466-4 UPPER SHIELD
ANELVA A12-58467 UPPER SHIELD (SS)
ANELVA A12-58467-03 UPPER SHIELD (SS)
ANELVA A12-58592 RING HOLDER PY221
ANELVA A12-58599 PY 8" WAFER HOLDER COMPLETE SP
ANELVA A12-62133 PY 232 RING HOLDER COMPLATE SP
ANELVA A12-62134 PY254 RING HOLDER
ANELVA A12-66274 SHIELD RING
ANELVA A12-66777 LOWER SHIELD
ANELVA A12-66778 SHIELD LOWER (2) AL
ANELVA A12-67384 SENSOR SHIELD PLATE
ANELVA A12-68479 228 SHIELD RING FOR 5" ETCH
ANELVA A12-72127 BATCH SENSOR
ANELVA A12-72506 FULL FACE SP HOLDER PEDESTAL COVER
ANELVA A12-72507 ANELVA 6-HOLE DEPO RING FOR LONG THROW TIN/TIN
ANELVA A12-74514 ONE PIECE ELECTRODE COVER (CATHODE)
ANELVA A12-75163 INTERMEDIATE RING (CATHODE)
ANELVA A12-77089 ANELVA 12 HOLE DEPO RING FOR AL-CU KITS
ANELVA A12-79742 COUNTER ELECTRODE (DIA.306) COVER (ANODE)
ANELVA A12-81093 LONG THROW TI & LONG THROW TIN 4 PIECE TARGET FIXTURE
ANELVA A13-00349 PLATE FIXTURE
ANELVA A13-02288-03A CYLINDER, BELLOWS
ANELVA A13-02349 CONTROLLER DISPLAY MASTER
ANELVA A13-06256 FLANGE, LOWER, WELDED
ANELVA A13-07103 FLOW METER, PCB
ANELVA A13-10256 QUARTZ ARM POINT FIND JIG (6")
ANELVA A13-10292 PIN, PNT, JS, ARM, QUARTZ
ANELVA A13-26379 POWER CONTROLLER 2.5KW
ANELVA A13-30252 FULL SIZE EXTENDER
ANELVA A13-30291 PC BOARD ASSY HALF SIZE EXTENDER
ANELVA A13-32336 CONVERTER A/D 8 CHANNEL
ANELVA A13-32338 CONVERTER D/A 8 CHANNEL
ANELVA A13-34807 CA AMP PCB
ANELVA A13-40566 SHIELD, TARGET FIXTURE (2 PIECES)
ANELVA A13-41615 SHIELD 6" QUARTZ HOLDER
ANELVA A13-41847 VENT REGULATOR
ANELVA A13-52956 SHIELD, COVER S-PMC
ANELVA A13-56218 ETCH CHAMBER SHIELD PLATE (FRONT)
ANELVA A13-56219 ETCH CHAMBER SHIELD PLATE (BACK)
ANELVA A13-59873 HEATER CIRCULAR PY190
ANELVA A13-59874 CIRCULAR HEATER PY 134
ANELVA A13-62899 SHIELD, CHAMBER, RT
ANELVA A13-62900 SHIELD, CHAMBER, LEFT (SEND OU)
ANELVA A13-62901 SHIELD, CC CHAMBER (A)
ANELVA A13-62902 SHIELD, CC CHAMBER (B)
ANELVA A13-62904 SHIELD, CC CHAMBER (D)
ANELVA A13-62910 SHIELD, CC COVER (2)
ANELVA A13-65121 VACUUM GUAGE QIG-066
ANELVA A13-67554 SHIELD PLATE GT
ANELVA A13-68630 WAFER HOLDER 6" S/S
ANELVA A13-73362 FPC FIITING PCB ASSY
ANELVA A13-77606 12" PMC HIGH MELTING POINT 292 TARGET SHIELD (AL)
ANELVA A13-78712 SOLID SHIELD FOR CATHODE FLANGE (UP) (SUS)
ANELVA A13-80409-4 TARGET (292" AL)
ANELVA A13-81258 292 RING
ANELVA A13-98082 110 RING
ANELVA A13-98088-UK GLASS 184X64 ANE
ANELVA A14-02156 BELT ASSY A CL
ANELVA A14-02157 BELT ASSY
ANELVA A14-02832 CATHODE HOUSING ROTARY ASSEMBLY
ANELVA A14-03586 LAMP HEATER 500W
ANELVA A14-05151-UK GAS SPRING FOR SP
ANELVA A14-12740 VACUUM WANDPLATE PY8" ASSEMBLY
ANELVA A14-14262 BOTTOM PLATE COVER (1)
ANELVA A14-17384 COUNTER ELECTRODE COVER (DIA.306) ANODE
ANELVA A14-17430-UK BEVEL GEAR (DYFLON)
ANELVA A14-20021 ANELVA 4 PIECE TARGET COVER FOR TIN KIT ONLY
ANELVA A14-21939 FLANGE
ANELVA A14-22957 296 SHUTTER PLATE
ANELVA A14-23175 95 CIRCLE HEATER
ANELVA A14-23499 BOTTOM PLATE COVER (2)
ANELVA A14-23500 BOTTOM PLATE COVER (6)
ANELVA A14-23501 BOTTOM PLATE COVER (3)
ANELVA A14-23502 BOTTOM PLATE COVER (5)
ANELVA A14-25253 CERAMIC HEATER COMPLETE SP
ANELVA A14-32312 THERMOCOUPLE WITH PY32 VG FLANGE
ANELVA A14-32329-UK GAS SPRING
ANELVA A14-36684-02 ANELVA OUTER RING FRO LI-TU/LT-TIN/TIN/ALCU KITS
ANELVA A14-36685 OUTER RING PY340
ANELVA A14-37593 HEATER CIRCULAR PY170
ANELVA A14-37594 QUARTZ INFRARED CIRCLE LAMP 124*24
ANELVA A14-40845 BOTTOM PLATE COVER S3
ANELVA A14-40846 BOTTOM PLATE COVER S4
ANELVA A14-40847 BOTTOM PLATE COVER S5
ANELVA A14-40848 BOTTOM PLATE COVER S6
ANELVA A14-43875 GUIDE ROD ASSY FOR GV 8 (OCTAGON FOR SEP)
ANELVA A14-43945 T4 SEAT SHIELD (SUS) FOR (AL)SEP
ANELVA A14-43946-01 (AL) GATE VALVE FOR LT-TI/LT-TIN/TIN & ETCH KITS
ANELVA A14-52190 LOCK WASHER AAN
ANELVA A14-54608 FLEXI-TUBE WELDING DROV/DRKV
ANELVA A14-62233 PY401 SHIELD RING
ANELVA A14-62234 PY374 SHIELD RING
ANELVA A14-62235 ANELVA LONG THROW TI TARGET SHIELD ALSO B11-02993
ANELVA A14-65926-01 QUARTZ RING 5"
ANELVA A14-70498 PY403 SHIELD RING
ANELVA A16-00402D STOPPER AT SE CHAMBER (6")
ANELVA A16-00425 O-RING, FOR PY3 BELT
ANELVA A16-00501 BUSHING, METAL (3)
ANELVA A16-00502 BUSHING, METAL (4)
ANELVA A16-00505 BUSING, METAL (5)
ANELVA A16-00518 BELLOWS WELDED PY14-28
ANELVA A16-030388 STOPPER, TEFLON A (6")
ANELVA A16-03039 STOPPER, TEFLON (13) (6")
ANELVA A16-03054 PLATE, QUARTZ (BAKE HEATER)
ANELVA A16-03088 SEAL DOOR SC O-RING SE CHAMBER
ANELVA A16-04184 SHIELD, METAL FITTING
ANELVA A16-04185 SHIELD, METAL FITTING
ANELVA A16-04187 SHIELD, METAL FITTING
ANELVA A16-04226 SHIELD, (AL) CTR. AT STOPPER
ANELVA A16-04227 SHIELD, BOTTOM
ANELVA A16-04229 SHIELD, (AL) B AT STOPPER
ANELVA A16-07425 SHAFT, SHORT
ANELVA A16-07553 BUSHING, PY3, GUIDE
ANELVA A16-07681 STOPPER, TEFLON (6")
ANELVA A16-07682 STOPPER, TEFLON (3) (6")
ANELVA A16-07689 STOPPER, TEFLON (D) (6")
ANELVA A16-26568 SHIELD 300"
ANELVA A16-27157 HOOK
ANELVA A16-32968 SOLENOID VALVE LLV-161
ANELVA A16-33094-01 O-RING VITON
ANELVA A16-36708 BELT, PY3 SKIN "PACK SE-CH"
ANELVA A16-39388 SHIELD, TUBE
ANELVA A16-43567 O RING PY4XPY302 VITON
ANELVA A16-49137 CABLE
ANELVA A16-49466 BEARING, PY6-PY-19-6T TEFTON C
ANELVA A16-53915 PLATE, QUARTZ ELECT 1 (6")
ANELVA A16-56959 THERMOCOUPLE # E35730
ANELVA A16-56987 GLASS PLATE
ANELVA A16-61654 CHUCK
ANELVA A16-61716 QUATTZ GLASS PY160X15T
ANELVA A16-61723 RUBBER PLATE 3T E34467
ANELVA A16-67631 TUBE, FLEX
ANELVA A16-70062 WAFER GRIPPER(L) L/L
ANELVA A16-71845 SHIELD TUBE 295.5X73L
ANELVA A16-82591 SUS SINGLE PIECE TARGET COVER FOR AL-CU KIT
ANELVA A16-83415 GLASS DISK PY49
ANELVA A16-86189 LC LOWER GUIDE(MIDDLE)
ANELVA A16-91942 WOND RUBBER
ANELVA A16-96959 THERMOCOUPLE PY34 FLANGE TYPE
ANELVA A17-00483 SHIELD, QUARTZ PLATE
ANELVA A17-03824 GAS INLET
ANELVA A17-15643 THERMOCOUPLE HOLDER MSP
ANELVA A17-33142 WAFER, STOPPER, TEFLON
ANELVA A17-39893 M72 BOSS
ANELVA A17-44960 PY8" WAFER GUIDE (1)
ANELVA A17-44961 PY8" WAFER GUIDE (2)
ANELVA A17-47207 O RING PY5.7XPY470 VITON
ANELVA A17-48948 GLASS 105X45
ANELVA A17-49188 L/L WAFER CHUCK COIL (R)
ANELVA A17-50019 THERMOCOUPLE L=255
ANELVA A17-50045-UK FEED THROUGH 1 P
ANELVA A17-50904 O RING PY485 VITON
ANELVA A17-51917 GLASS 125X51
ANELVA A17-53968 PY25 GUIDE
ANELVA A17-54262 POLYIMIDE GUIDE 2
ANELVA A17-54337 PHOTOELECTRIC SWITCH FIBER UNIT(X1)E32-T24
ANELVA A17-57033 ACRYLIC PLATE
ANELVA A17-57062 GLASS DISK PYREX PY37
ANELVA A17-59169 BELLOWS WELDING PY8XPY18
ANELVA A17-62117-UK GLASS 125X115
ANELVA A17-63048 HELIUM SHAFT
ANELVA A17-64474 T12 SEAT SHIELD (AL)
ANELVA A17-64765 QUARTZ DISK PY37
ANELVA A17-65332 BOLT M6
ANELVA A17-65354 THERMOCOUPLE WITH PY31.5 VG FLANGE
ANELVA A17-65364-UK FEEDTHROUGH 4 P
ANELVA A17-67354-UK GLAS 81X37
ANELVA A17-67383 GLASS PY28X12T
ANELVA A17-67992 WRENCH 1060SP T-TYPE
ANELVA A17-69060 CONNECTING BLOCK
ANELVA A17-70370 P725 GUIDE PHOSPOR BRONZE AAN
ANELVA A17-71201-3-UK FINGER WAFER LIFT FOR 8"
ANELVA A17-76370-2 SUPPORT FLANGE FOR SP
ANELVA A17-76371 GAS DISTRIBUTION PLATE FOR REF SP
ANELVA A17-76374-2 GAS DIFFUSE PLATE FOR AL SP
ANELVA A17-76456 GLASS PLATE 50 X 30 X 1.5
ANELVA A17-76457 GLASS GUIDE (1)
ANELVA A17-76458 GLASS GUIDE (2)
ANELVA A17-7658201 GLASS PLATE FOR HEAT CHAMBER
ANELVA A17-76603-UK FINGER WAFER LIFT FOR 8"
ANELVA A17-76665 SCREW M3 SPECIAL L;9 (AG-PLATE)
ANELVA A17-81254 SCREW FOR UPPER SHIELD RING
ANELVA A17-82091 TARGET EYE BOLT (2)
ANELVA A17-87827 ONE PIECE ELECTRODE COVER(CATHODE)
ANELVA A17-89501 SPACER RING PY54
ANELVA A17-89560-UK CU SPACER(BOTTOM)
ANELVA A17-89561-UK CU SPACER(TOP)
ANELVA A17-89833 PY20 BA F2
ANELVA A17-90930 THERMOCOUPLE HOLDER
ANELVA A17-93602 PY3-SHAFT
ANELVA A17-93683 SPRING RECEIVER
ANELVA A17-93684 SPRING RECEIVER
ANELVA A17-93687 HELIUM SHAFT COVER
ANELVA A17-96372 COVER PY291
ANELVA A17-98387 CERAMIC SCREW (M20X1)
ANELVA A17-99388 INTERMEDIATE GEAR (MC)
ANELVA A17-99578-1 RING PY34.
ANELVA A18-01398-UK ADJUSTMENT CU SPACER (TOP)
ANELVA A18-01399 ADJUSTMENT CUSPACER (BOTTOM)
ANELVA A18-04312 O-RING PY970VITON
ANELVA A18-07348 GAS SPRING FORSEP-CH
ANELVA A18-08442 TI SPACER
ANELVA A18-15431 TEFRON RING GPY284
ANELVA A18-24267 GROUND STRAP
ANELVA A18-27805 SHAFT PY3 ALUMITE(IN-SITU)
ANELVA A18-31739 PROXIMITY SWITCH TERMINAL(GLS-S1)
ANELVA A18-31945 PY6250MM LONG SHAFT CHAMBER SHIELD
ANELVA A18-39649 PY6 110MM LONG SHAFT
ANELVA A22-013-01 VALVE
ANELVA A22-03117-AUK TOP SHIELD
ANELVA A26-20299 CENTERRING NW40(954-7844)
ANELVA AD11-15A-03AA SOLENOID VALVE -DC24V
ANELVA AD6T MODULE,INPUT ANALOG ISOLAT
ANELVA AS568-128 O-RING
ANELVA AS568-229 O-RING AS568-229
ANELVA AS568-260 O-RING
ANELVA AS568-363 O-RING VITON
ANELVA AS568-365 O-RING
ANELVA AS568-366 O-RING VITON
ANELVA AS568-392 O-RING NISSIN CHAMBER DOOR
ANELVA ASAHIHRN FUSE, 500V, 1A
ANELVA B-38352 HOLDER SHIELD (SUS)
ANELVA B-38374 ETCHING CHAMBER PCB PRESSURE
ANELVA B11-01060-7 CHAMBER SHIELD
ANELVA B11-01449 ENDURA LT/TI CLAMP RING
ANELVA B12-02631 RING T6 QUARTZ
ANELVA B12-12229 TEFLON SHIELD (7-5)
ANELVA B12-15325 CATHODE ONE BODY COVER (R