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TEL 1380-100550-11 C/S CONNECTOR BAS

TEL 1380-100551-11 NUT

TEL 1380-100622-11 DRIVER SERVO

TEL 1380-100694-11 MOTOR, C/S AXIS 30W

TEL 1380-100840-11 REGULATOR

TEL 1380-100944-12 HUMIDITY SENSOR..SCP

TEL 1380-101130-11 CONNECTOR ASSY VJ10-59-2

TEL 1380-101146-1 FLAT CABLEZ-X

TEL 1380-101173-11 FLAG FOR SENSOR (T170-01330-2)

TEL 1380-101264-11 MOTOR, PINCETTE X AXIA

TEL 1380-101265-11 X HOME SENSOR CS-E-2

TEL 1380-101266-11 X CHECK SENSOR CS-E-25-0

TEL 1380-101267-11 X OUT SENSOR

TEL 1380-101268-11 MAP OUT SENSOR CS-E-27-0

TEL 1380-101269-11 MAP IN SENSOR CE-E-28-0

TEL 1380-101772-11 POD SENSOR ASSY

TEL 1380-101773-11 HOME SENSOR ASSY

TEL 1380-101774-11 UP LIMIT SENSOR ASSY,1380-1017

TEL 1380-101777-11 WAF SENSOR (HORIZON) ASSY

TEL 1380-101784-11 POD LOCK2 SENSOR ASSY

TEL 1380-101788-11 POD UNLOCK2 SENSOR ASSY

TEL 1380-102244-11 DRIVE BELT..IF-Y(HS)-31

TEL 1380-102437-11 FLOAT SW ASSY..SCP-68-1

TEL 1380-102896-11 FAN UNIT

TEL 1380-103172-11 PCB, X, THETA-BASE

TEL 1380-103190-11 DRIVER SERVO

TEL 1380-103256-11 MOTOR, I/F Y AXIS

TEL 1381-644957-16 TVB3101-1 ISC BOARD ASSY

TEL 1381-645294-12 IMC CONN BOARD

TEL 1381-645459-11 3P M/A DRIVER I/F

TEL 1381-645460-12 OPS PANE CONNECTI

TEL 1381-645731-15 I/F CONN BOARD #2

TEL 1381-647411-11 IO DISPLAY BOARD

TEL 1381-647847-15 PCB ASSY

TEL 1381-647967-11 V7.C/S ARM X BOARD ASSY

TEL 1381-647980-12 TVB1202-1/ANET BOARD ASSY

TEL 1381-64968-12 BOARD ASSY

TEL 1381-649902-11 SENSOR BOARD

TEL 1381-650042-11 INDEXER MAPPING BOARD

TEL 1381-650055-11 IMC EXT BOARD

TEL 1381-659042-13 FIRE SIGNAL RELAY BOARD

TEL 1385-391191-13 PINCETTE, M/A

TEL 1385-444840-11 DC MOTOR ( PX243G01-01B )

TEL 1386-100356-11 SOLENOID ROTARY

TEL 1386-443496-12 CABLE, 3P MA8 THETA

TEL 1386-443498-12 M/A THETA MOTOR

TEL 1386-443499-14 MOTOR, M/A Z AXIS

TEL 1386-443501-13 3P MA8 Z MOTOR CABLE

TEL 1386-443503-12 3P MA8 Z BP SENSOR CABLE

TEL 1386-443504-13 X1 SENSOR HARNESS

TEL 1386-443505-13 X2 SENSOR HARNESS

TEL 1386-443507-14 WF SENSOR HARNESS

TEL 1386-443509-13 MOTOR, M/A X AXIS

TEL 1386-443514-11 3P MA8 Z DRIVER SIGNAL CABLE

TEL 1386-443772-11 PIN UP/DOWN SENSOR ASSY

TEL 1386-443921-12 SENSOR CAPACITANCE

TEL 1386-444163-14 W/F EDGE SEN.L SOURCE

TEL 1386-444165-13 WAFER EDGE SENSOR RECIVER

TEL 1386-444165-15 W/F EDGE SENSOR(R

TEL 1386-444208-12 WAFER STAGE SENSOR

TEL 1386-444227-11 CAPACITANCE SENSOR

TEL 1386-444576-12 FAN

TEL 1386-444581-11 RINSE U/D SENSOR

TEL 1386-444607-15 SHUTTER UP/DOWN SENSOR ASSY

TEL 1386-445099-13 CARRIER SENSOR BOARD

TEL 1386-445204-13 FLEX CABLE

TEL 1386-446459-12 SPIN MOTOR CONTROL CABLE (MATSUSHITA)

TEL 1386-447983-11 INDEXER MOTOR ASSY V7

TEL 1386-448371-11 M/A H.S FLEX CABLE

TEL 1386-448386-11 ASSY SPRING

TEL 1386-448392-12 M/A HSY MOTOR ASSY

TEL 1386-448912-11 CABLE, MOTOR, EXT

TEL 1386-450112-13 INDEXER MAPPING SENSOR ASSY

TEL 1386-450142-12 FLAT CABLE

TEL 1386-453040-12 MOTOR SHAFT (MSM021ABF)

TEL 1386-453098-11 POSITION SENSOR

TEL 1386-453643-11 TABOT ARM1 IN/OUT SENSOR HARNESS

TEL 1386-453644-13 TABOT ARM2 UP/DOWN SENSOR HARNESS

TEL 1386-453645-11 TABOT ARM2 IN/OUT SENSOR HARNESS

TEL 1386-458644-11 SMIF ARM X HOME SENSOR ASSY

TEL 1386-459764-11 FLAT 345 CABLE L1950

TEL 1386-459765-11 FLAT 645 CABLE L1950

TEL 1387-432587-11 VALVE SOLENOID

TEL 1393-739729-3 MANOMETER GAUGE

TEL 15030T-11111 PLATE,RF,PC1,REV4

TEL 152-004OK VALVE PNEU NW40

TEL 1520044 SCAN AMP CABLE

TEL 17B4495 FRONT SLIT (R510)

TEL 17B7652 GRAPHITE GROUND ELECTRODE

TEL 180004901 BEARING

TEL 1805-220008-11 WINDOW..VIEW PORT-B(SAME:S3T40

TEL 1805-220014-14 OUTER F/R (8 ORI-FLA)Y

TEL 1805-220135-13 RING, EXT OUTER

TEL 1805-220177-22 RING, SHIELD

TEL 1805-320002-11 HOLDER QUARTZ IEM

TEL 1805-320127-21 BASE RING, INTEGRATED

TEL 1805-320142-11 RING, BASE EXH F/R HOLD

TEL 1805-420008-11 WINDOW, EPD/IE-OX

TEL 181-000450-16 PCB, MC-31039B HSDL GAS VER. 1B

TEL 1810-120415-13 UPPER ELECTRODE BODY

TEL 1810-120531-13 ELECTRODE, UPPER

TEL 1810-120660-13 UPPER ELECTRODE BODY, UNITY 85PE, CP20

TEL 1810-120721-A TEL BOTTOM ELECTRODE

TEL 1810-120721-A4 BOTTOM ELECTRODE

TEL 1810-120900-A8 CHUCK

TEL 1810-120982-11 BOTTOM ELECTRODE

TEL 1810-121051-11 CLAMP RING (OUTER)

TEL 1810-121085-16 ALUMINIUM DEPO SHIELD P/C 1

TEL 1810-121113-13 UEL BODY (UPPER ELECTRODE BODY)

TEL 1810-121244-A1 REPAIR CHARGE

TEL 1810-121299-11 ELECT CHUCK IEM

TEL 1810-121366-11 SHIELD, DEPO

TEL 1810-121429-11 DEPO SHIELD S(C+SIC)TYPE2(SAME)

TEL 1810-121900-13 LINER A EXH-Y

TEL 1810-220725-2 EXHAUST RING

TEL 1810-220843-14 VACUUM MANIFOLD(51)

TEL 1810-220986-14 INS GUARD(8K-ESC)

TEL 1810-220998-12 UPPER ELECTRODE PLATE

TEL 1810-221018 RING, P C SHEALD THIN TYPE

TEL 1810-221024-14 UPPER CLEAN PLATE (8K-7A)

TEL 1810-221063-14 RING EXHAUST

TEL 1810-221106-14 CARBON 6"(ESC)

TEL 1810-221329-12 SHIELD RING T78K-160

TEL 1810-221439-25 CRYSTAL ELECTRODE TQM(BK-150)

TEL 1810-221466-12 PLATE COOLING UPPER

TEL 1810-221470-24 ELECTRODE CRYSTAL

TEL 1810-221471-13 ELECTRODE CRYSTAL

TEL 1810-221471-14 ELECTRODE CRYSTAL

TEL 1810-221584-12 PLATE, UPPER COOLING (8K-SI-200)

TEL 1810-221616-12 TRAP (200-S-16)

TEL 1810-221716-11 UPPER ELECTRODE PLATE (FT-3)

TEL 1810-221942-12 AMORPHOUS CARBON

TEL 1810-222433-11 RING, INNER  NW G UP 8

TEL 1810-222435-11 FOCUS RING, QUARTZ, 8K-ESC

TEL 1810-222435-118-220- (8K-ESC) FOCUS RING QUARTZ,1810-222435-118-220-30

TEL 1810-222487-11 SHIELD RING T7(8K-160)

TEL 1810-222662-11/22-EBW-506 SHIELD RING

TEL 1810-222727-11 BAFFLE B

TEL 1810-222728-11 BAFFLE C

TEL 1810-222897-12 NW 31-U (8K-ESC) FOCUS RING (AL)

TEL 1810-222917-11 PROTECT RING2(IEM POLY)

TEL 1810-222956-13 UPPER HOLDER

TEL 1810-222979-12 SHIELD RING

TEL 1810-223063-11 HOLDER UPPER E (TYPE2)

TEL 1810-223101-11 SHIELD BOTTOM A (IEM POLY)

TEL 1810-223147-12 OUTER QTZ WINDOW

TEL 1810-223288-13 MTG FLANGE EXT PLATE (GROUND)

TEL 1810-223497-13 SHIELD BOTTOM B2 (IEM POLY)

TEL 1810-224159-12 BASE A, WINDOW (EPD)(95DI)

TEL 1810-224222-12 UPPER COOLING PLATE

TEL 1810-224506-11 FOCUS RING 6"L AR(8K-ESC)

TEL 1810-224530-11 INNER RING 6J-G-UP-9K-ESC

TEL 1810-224953-12 LINER C GATE CHAM-Y

TEL 1810-224954-11 PLATE COOLING UPPER(T10-215)F

TEL 1810-225157-12 SHIELD RING T5 (8K-160)FP

TEL 1810-322023-11 BELLOWS GUARD RIN

TEL 1810-322044-1 CENTERING W/MESH

TEL 1810-322044-11 CENTERING

TEL 1810-322129-12 EXH RING A (8K-ESC)

TEL 1810-322488-11 GUARD RING (5K1)

TEL 1810-322531-12 RING,GUARD [8K-ESC]

TEL 1810-322767-11 FRANGE, PUSHER

TEL 1810-323129-11 PROTECT RING

TEL 1810-323129-11 PROTECT RING

TEL 1810-323168-11 SIDE WINDOW PLATE (U85P)

TEL 1810-323593-11 WINDOW (IPP)

TEL 1810-323880-13 FOCUS RING(SAME:S3T40396)

TEL 1810-323881-13 FOCUS INNER RING

TEL 1810-323881-14 RING FOCUS INNER 8" NOTCH C

TEL 1810-324461-11 GUARD RING (8K-397.5)

TEL 1810-324676-11 OUTER QUARTZ END WINDOW

TEL 1810-325487-13 F.R COVER (8N-26-C)

TEL 1810-325508-11 ORIFACE WINDOW (IPP)

TEL 1810-325509-13 COVER, SCREW,CELAZOLE

TEL 1810-325569-13 WALL ALUMINIUM CHAMBER (UPPER) (GROUND)

TEL 1810-325570-13 WALLALUMINIUM CHAMBER (LOWER) (GROUND)

TEL 1810-325571-14 CHAMBER ALUMINIUM WALL (R) (GROUND)

TEL 1810-325572-14 CHAMBER ALUMINUM WALL (GROUND)

TEL 1810-326904-12 FOCUS RING ATACHED (8N220 SI-AL (8K-ESC)

TEL 1810-328378-11 PIPE CONNECT, HE, SP (UP)

TEL 1810-329022-13 LONER ADAPTER(AL)TYPE2(SCCM-0X)

TEL 1810-329037-13 LINER B EXH-Y

TEL 1810-329064-12 WINDOW, AL-3-Y

TEL 1810-329078-11 COVER SCREW A-AL-Y

TEL 1810-329079-11 COVER SCREW B-AL-Y

TEL 1810-329229-11 INNER F/R8"NC216 (RS-T4.45)

TEL 1810-424668-11 UPPER ARM WIRE

TEL 1810-424709-11 WIRE 190

TEL 1810-424742-11 SPACER

TEL 1810-424751-11 ATC FLEX PIPINGN

TEL 1810-424884-14 RING,GUARD INSULATOR

TEL 1810-424884-14 RING,GUARD INSULATOR

TEL 1810-424952-13 LIFTER SPRING (8K-ESC)

TEL 1810-424955-11 ROD, RF 8K-ESC

TEL 1810-425088-11 LIFTER STOPPER A (8K)

TEL 1810-425099-12 WAFER LIFTER

TEL 1810-425153-11 MTG PIN (8K-ESC)

TEL 1810-425512-12 CENTERING PIN 2

TEL 1810-425600-11 STOPPER (DEPO SHIELD)

TEL 1810-425601-11 STOPPER SCREW (DEPOSHIELD)

TEL 1810-425704-12 CLOAK LAMP A

TEL 1810-425705-12 CLOAK LAMP B

TEL 1810-425994-11 TEMP SENSOR HOLDER(KI)

TEL 1810-426117-11 SHAFT, CLAMP SUPPORT D

TEL 1810-426423-11 ATC TRAP PLATE SCREW

TEL 1810-426760-11 WINDOW, SIDE

TEL 1810-427135-11 PIN (4X15)  IS AN ALTERNATIVE)

TEL 1810-427899-12 DEPO SHIELD H=70 ALUMINA

TEL 1810-428078-12 STOPPER LIFTER

TEL 1810-428129-11 WIND SHIELD

TEL 1810-428390-11 BAFFLE A

TEL 1810-428436-11 END POINT WINDOW TEFLON SCREW

TEL 1810-428520-12 BOTTOM EL PIN (0.5)

TEL 1810-428720-12 PIN POSITIONING (IEM POLY)

TEL 1810-429708-11 WIRE (260)K8

TEL 1810-429709-11 WIRE (276)K8

TEL 1810-429712-11  (PIN (4X17) IS AN ALTERNATIVE)

TEL 1810-429803-11 GATE RETURN SPRING P

TEL 1810-429841-11 BUSH RING SHIELD

TEL 1810-429842-11 SCREW SET SHIELD (OLD P/N 1810-428864-11)

TEL 1810-430545-12 HANDLE, EXH

TEL 1810-430589-11 PLATE WINDOW

TEL 1810-430590-11 MESH WINDOW(EPD)(95DI)

TEL 1810-430592-11 WINDOW, UV CUT FILM

TEL 1810-430766-11 CAP SCREW (M6-ESC) (TYPE2)

TEL 1810-430782-11 CLT GAS INLET JOINT TOP B(STD)

TEL 1810-430809-11 SPRING, LIFTER C

TEL 1810-431219-11 PIN LOCATE CENTERING(EPD)

TEL 1810322489-12 CERAMIC FOCUS RING

TEL 1820-00024R PCB SYS 386/33MHZ

TEL 1880-020094-16 MATCHER MFM-20SA2 (189502009413

TEL 1880-026696-12 AMORPHOUS CARBON

TEL 1880-026779-12 AMORPHOUS CARBON

TEL 1880-026855-11 MECHANICAL SEAL

TEL 1880-027021-12 BELLOWS SN4730000-3

TEL 1880-028435-12 RF MATCHING UNIT

TEL 1880-26785-21 AMORPHOUS CARBON

TEL 1881-022021-13 AGV5W I/F BOARD

TEL 1881-022036-32 PCB OPE-PANE SW BOARD (DTM)

TEL 1881-022117-26 PCB TSBC-V30B(MAIN)K8 (ATM/MAIN 08)

TEL 1881-022117-27 PCB TSBC-V30B(MAIN)K8 (ATM/MAIN 08)

TEL 1881-022139-12 PCB H/A INTCON BOARD 2 (ATM)

TEL 1881-022143-12 PCB P/A CONTROL BOARD 2(ATM)

TEL 1885-020003-12 B. E. (6") ASSY

TEL 1885-020964-14 RING, P C SHEALD THIN TYPE

TEL 1885-022352-14 BOTTOM ELECTRODE

TEL 1885-023137-17 ELECTRODE BOTTOM

TEL 1885-023937-11 ELECTRODE ASSY..BOTTOM (6"-5KB)

TEL 1885-024611-12 PLATE, INPUT RF

TEL 1885-024612-12 PLATE, GROUND

TEL 1885-024718-11 C P/C RING (85-T7-220-CZ)

TEL 1885-026690-11 HOLDER, WAFER

TEL 1886-455194-11 H/AX MOTOR ASSY

TEL 1886-455293-11 SENSOR MOTOR ASSY

TEL 1886-459396-12 SENSOR ASSY PTL/L1

TEL 1887-422021-11 P/C WINDOW HETERASS'Y

TEL 1902-411203-12 MOTOR PULLEY

TEL 1902-411263-11 MOTOR PULLEY(S3M20F)

TEL 1904-300052-13 SIDE PLATE (R)

TEL 1904-300053-13 SIDE PLATE (L)

TEL 1904-400031-11 SPACER GUIDE 7.8

TEL 1910-110960-11 BASE UNIT

TEL 1910-315920-12 DAMPER

TEL 1910-317263-12 GUIDE PIQ

TEL 1910-317659-17 NOZZLE BATH, 8 INCH

TEL 1910-318300-11 WAFER GUIDE (6")

TEL 1910-318771-13 GAP SPACER(8")

TEL 1910-319994-11 AL COVER U

TEL 1910-319995-11 AL COVER T

TEL 1910-321310-13 GUIDE (L)

TEL 1910-321311-13 GUIDE (R)

TEL 1910-418164-13 DAMPER SHUFT

TEL 1910-418203-12 NOZZLE BRACKET 2

TEL 1910-418217-12 PACHING

TEL 1910-422378-11 WAF GUIDE (6")

TEL 1910-424625-12 PULLEY SHAFT

TEL 1910-425777-1 PIN

TEL 1910-428916-11 CHIP GUIDE

TEL 1910-429087-12 NOZZLE HOLDER