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TEL 386-439032-3 SENSOR

TEL 386-439073-3 MAIN ARM Y.B.P. SENSOR ASSY

TEL 386-439074-3 MAIN ARM Y ENCODER ASSY

TEL 386-439085-2 MOTOR

TEL 386-439097-2 AL STAGE WAF SENSOR

TEL 386-439152-2 MOTOR

TEL 386-439153-2 MOTOR

TEL 386-439154-2 SENSOR

TEL 386-439154-3 SPIN MTR SCAN ARM

TEL 386-439155-5 NOZZLE HEAD SENSO

TEL 386-439159-3 ROTARY ACTUATOR

TEL 386-439225-3 ARM, PAUSE, SW, ASSY

TEL 386-439377-4 M/A FLEX CABLE

TEL 386-439489-2 SIDE RINSE

TEL 386-439511-4 SVM DRIVE CABLE (7CM)

TEL 386-439606-1 SIPINNER SIGNAL 2FLAT CABLE

TEL 386-439612-3 SPINNER DC POWER CABLE

TEL 386-439680-5 SUM DRIVE CABLE (MATSUSHITA)

TEL 386-439956-3 M/A Y ENCODER ASSY (M4)

TEL 386-440044-1 MAP SENSOR (TR) ASSY

TEL 386-440472-2 SENSOR I/P BOARD

TEL 386-440786-2 CYLINDER SCAN I/O SENSOR

TEL 386-440791-2 SENSOR ASSY NOZZLE

TEL 386-441585-2 MOLEX 6P CABLE

TEL 386-442263-1 EE CCD LD ASSY

TEL 386-442566-2 SENSOR, 8 INCH WEE AXIS

TEL 386-442665-2 STEPPER I/F CABLE

TEL 386-442721-2 MOTOR, 8 INCH, WEE AXIS

TEL 386-442722-1 MOTOR, 8 INCH, WEE theta AXIS

TEL 386-443278-02 SPRING SUPPORT CABLE ASSY

TEL 386-443278-2 MA SPRING CABLE

TEL 386-4939426-3 M/A FLEX CABLE

TEL 387-400189-2 INDEXER SW HARNESS, 6 INCH

TEL 387-400319-1 LIQUID END DETECTOR

TEL 393-700670-4 ALARM ANALYZER BOX

TEL 3A-FN0104522 RORZE WAFER TRANSFER CERAMIC ARM

TEL 3AS0143010 AIR CYLINDER

TEL 3M10-101098-14 RING BASE

TEL 3M10-101101-12 PLATE,SUSCEPTER,3TAO

TEL 3M10-101182-11 CLAMP RING

TEL 3M10-101580-12 RING,ATTACHIMENT OP3

TEL 3M10-202183-12 TIN, 8IN NON CNT NO

TEL 3M10-307384-11 LIFTER PIN 300DSC WIDE

TEL 3M10-309663-11 QARTS PIN LIFTER 3TAO

TEL 3M10-405093-11 SPRING, FIT C-22

TEL 3M10-405839-11 C-RING BOTTOM COVER PIN 300

TEL 3M10-407411-11 STOPPER,COVER PIN

TEL 3M10-407431-11 HOLDER,SUSCEPTER,3TAO

TEL 3M10-407876-12 BOLT,SHOULDER SH

TEL 3M10-410242-11 PIN,SFR SUPPORT

TEL 3M10-410595-11 PIN,CB HOTLINER SUPP

TEL 3M10-451439-11 SHEET HEAT CONDUCTER-0.5

TEL 3M80-000727-13 TC

TEL 3M80-000728-13 TC

TEL 3M86-028633-11 CA,ASSY WTR LEAK,SHOWER

TEL 3M87-019502-12 ASSEMBLY, PV62 TRAP BACK VLV

TEL 3M87-029068-16 SHOWER ASSY,300TL

TEL 3M87-041475-11 PERTIER UNIVERSAL ASSY

TEL 3S10-401601-11 PIN,WAFER SUPPORT

TEL 3S80-000199-11 MANOMETER,1000 TORR

TEL 3S80-000200-11 MANOMETER,10 TORR

TEL 3S80-000307-11 ARC,300MM EDGE HEAT

TEL 3TB0006230 TIMING BELT 037-XL-0093A-J

TEL 3TB0038500 TIMING BELT FOR CDV GEN. USE 126X037

TEL 3TB0045110 TIMING BELT 150XL075

TEL 4-4-V1HBV1-SSR1.70-PE 1/4 VCR CLOSE COUPLING

TEL 410-217029-1 COMB, TRANSFERS

TEL 4103156213 COMB, PUSHER, 1

TEL 4103156213 COMB, PUSHER, 1

TEL 413182-002 RING

TEL 413182-006 RING

TEL 413182-008 RING

TEL 413182-009 RING

TEL 413182-010 RING

TEL 42755-0700 CU, KIT, SHIELD, SPUT

TEL 44B7767 EXTRACTION ELECTRODE INSULATOR

TEL 450001 VALVE MAKE UP WATER

TEL 47-442-VFS-P 1/4 VCR CLOSE COUPLING

TEL 481-501620-2 PCB, I/O COUNTER

TEL 481-501621-3 I/O DRIVER

TEL 481-501622-4 PCB, PCL8

TEL 481-600806-1 PCB, POWER CONNECT

TEL 481-600973-2 PCB, I/O ISOLATION

TEL 4815000915 PCB, TSBX, S10

TEL 4K2263 UPPER COOLING PLATE

TEL 5-39-02680 O-RING

TEL 5-4696-310A PCB

TEL 50-1762-001 PLATE, SHOWER QTZ SB

TEL 501-00-15 BOARD, SEMY GIF, SAFETY

TEL 501-00-78 PCB, FIRING BOARD

TEL 501-01-18 AMPLIFIER, TC TYPE R

TEL 501-01-30 PCB

TEL 501-01-34 PCB

TEL 501-01-35 PCB, EXTERNAL DIGITAL INPUT BOARD

TEL 501-01-47 PCB, BOAT LOADER INTERFACE

TEL 5010-202984-11 CHUCK(SS)

TEL 5010-210339-11 FORK(X1)

TEL 5010-210340-11 FORK(X2)

TEL 5010-210341-11 FORK(L)

TEL 5010-210342-11 FORK(R)

TEL 5010-316175-11 BAR(COT-D304)

TEL 5010-317625-11 BAR(TCT)

TEL 5010-410589-11 PACKING

TEL 5010-411333-11 PIN(COT-INNER)

TEL 5010-411843-11 PIN(COT-UPPER)

TEL 5010-412516-11 PIN, POSITION

TEL 5010-414421-11 PIN

TEL 5021350 CYL, HIVAC, LL, UHV

TEL 5022290 ACTUATOR,ROT,AIR,1"

TEL 505647 8 HOLE RING

TEL 5080-191952-11 LAMP

TEL 5085-401581-11 FORK ASSY.CRA

TEL 5085-427417-11 CHECK ASSY

TEL 518559 BELLOWS, BIG, UNITY II

TEL 54440-E039 PULSE MOTOR DRIVE UNIT( ROBOTARM)

TEL 550-061A QUARTZ RING A

TEL 564-307570 PCBOARD (MC31027&MC31026)

TEL 567-1138 ELECTROSTATIC LOADER ARM (CD-SEM)PHS

TEL 567-3619 CHUCK STAGE ASSEMBLY

TEL 600-1001-P30 CABLE

TEL 600-1002-P50 CABLE, RS485

TEL 600-1003-P1 CABLE

TEL 600-1008-P15 CABLE

TEL 600-1008-P15 CABLE

TEL 6000-8546 PCB SYSTEM CONTROLLER BOARD SYS286CONT

TEL 697ZZ YUASA ROBOT BEARING

TEL 701B8 SPEED CONTROLLER

TEL 715-330135-001 GAS RING

TEL 715-46053-001 GROUNDING BLOCK,ELECTRODE,STRIP CHAMBER

TEL 715-8010522-001 BASE PLATE

TEL 7205477-0001 ANA LOCK CONTROLLER TYPE A/B

TEL 7310-3516-01 LAMP ANNEALTC WAFER 1501TYPE

TEL 780-05155-200 KIT,GEM/SECS II,V2.0,81XX

TEL 780136764 FILTER ELEMENT FA-550911UKWS70820

TEL 80-2010 BOARD, CIRCUIT

TEL 80-2030 BOARD, CIRCUIT

TEL 80-2040 PCB, ASSY, VALVE DRIVER

TEL 80-2060A BOARD, CIRCUIT

TEL 800140036 APERTURE 6.0ST1.5PJS

TEL 800213033 APERTURE MB101199(01)-6*0.02T0.5U(PART

TEL 800400930 RING CENTR NW100

TEL 8008743 ILLUMINATIONLAMP12V100WHLX64625

TEL 802050A BOARD, CIRCUIT

TEL 802050C BOARD, CIRCUIT

TEL 8043069G002 FREQUENCY CONVERTER

TEL 810-08727 EXHAUST RING, QUARTZ, 8K-ESC

TEL 810-120008-6 UPPER ELECTRODE BODY

TEL 810-120087-1 TE400 LOWER

TEL 810-120375-4 BODY ELECTRODE, UPPER. (CP11)

TEL 810-220047-8 UPPER CLEANING PLATE (D)

TEL 810-220135-1 OUTER GATE

TEL 810-220223-6 EXHAUST RING

TEL 810-220223-6 EXHAUST RING

TEL 810-220296-1 5"EXHAUST RING 5" (5-BL)

TEL 810-220333-2 RING, CLAMP 6" (JEIDA) (AL203)

TEL 810-220486-5 DEPO SHIELD

TEL 810-220666-2 DEPO SHIELD(8K) (ALUMINA)

TEL 810-220666-4 SHIELD

TEL 810-220689-1 PLATE, BAFFLE

TEL 810-220690-2 PLATE, BAFFLE

TEL 810-220690-2 PLATE, BAFFLE

TEL 810-220725-2 EXHAUST RING (6-BL)

TEL 810-220734-1 COOLING PLATE (C-11)

TEL 810-220734-2 EXHAUST RING

TEL 810-320013-6 UPPER INSULATOR

TEL 810-320068-1 BAFFLE H

TEL 810-320069-1 BAFFLE

TEL 810-320252-2 SENSOR HOUSING

TEL 810-320259-1 GUARD RING

TEL 810-320310-3 VACUUM TWEEZERS

TEL 810-320648-2 CERAMIC RING

TEL 810-321095-1 A 1070 FOCUS RING

TEL 810-321139-1 GUARD RING

TEL 810-321230-1 BAFFLE (BX-1)

TEL 810-321231-1 BAFFLE

TEL 810-321311-2 YMS-9600

TEL 810-321311-4 WAFER LIFTER B

TEL 810-321369-3 WAFER HOLDER

TEL 810-321371-4 H/A PIN SET (8)

TEL 810-321640-1 GUARD RING(8K-ESC)

TEL 810-321640-1 GUARD RING(8K-ESC)

TEL 810-321649-4 VACUUM PIN SET 2

TEL 810-321735-5 ELECTRODE SHIELD RING

TEL 810-400034-1 ADJUST PIN

TEL 810-420062-1 SUPPORT

TEL 810-420063-4 WINDOW

TEL 810-420072-1 LANTERN RING

TEL 810-420074-1 WASHER (PACK OF 10)

TEL 810-420075-3 LIFTER SPRING

TEL 810-420129-1 BAFFLE

TEL 810-420139-1 CLAMP SHAFT DAMPER

TEL 810-420149-1 CERAMIC PIN

TEL 810-420158-4 WAFER LIFTER

TEL 810-420168-1 SUPPORT GUIDE

TEL 810-420174-2 LIFTER SUPPORT

TEL 810-420190-1 GATE ROLLER

TEL 810-420210-1 COLLAR 4- 5.6

TEL 810-420212-1 RING, LENTERN A

TEL 810-420321-1 CYLINDER END

TEL 810-420323-1 GUIDE SHAFT

TEL 810-420326-1 REAR WINDOW

TEL 810-420526-1 PLUG (S) (PACK OF 10)

TEL 810-420526-1* PLUG (S)

TEL 810-420595-1 RF CONNECTOR

TEL 810-420605-2 GAS INLET 92 S

TEL 810-420715-1 GATE CONNECT BLOCK

TEL 810-420776-1 INNER BLOCK SPACER

TEL 810-420812-1 TEMP SENSOR HOLDER (BN)

TEL 810-420967-2 CONNECTOR SUPPORT

TEL 810-420986-1 RF ADAPTER

TEL 810-420997-1 MPRING,SPRING SET SCREW

TEL 810-421013-1 PARALLEL PIN

TEL 810-421456-1 PIN GUIDE

TEL 810-421946-1 SHUTTER

TEL 810-421948-4 CHUCK

TEL 810-422615-3 TOP PLATE

TEL 810-423149-1 LIFTER SHAFT

TEL 810-423331-1 LIFTER SUPPORT

TEL 810-423391-2 RING MOUNTING SCREW

TEL 810-423392-2 SCREW, SET RING

TEL 810-423575-2 SCREW BUFFLE B L=12

TEL 810-423576-2 SCREW BUFFLE A L=5

TEL 810-423622-1 BAFFLE (AX-A)

TEL 810-423782-1 TWEEZERS(8)

TEL 810-423801-1 SEALED RING BUSH

TEL 810-423904-2 GAS INLET 92S

TEL 810-424067-2 WINDOW, QUARTZ

TEL 810-424109-2 SHAFT, CLAMP  8K

TEL 810-424110-2 BAFFLE, A (8K) 300mm

TEL 810-424118-1 SHAFT, GUIDE D10

TEL 810-424119-1 LANTERN RING

TEL 810-424120-1 CLAMP SHAFT DAMPER

TEL 810-424133-2 WINDOW

TEL 810-424135-2 CHECK WINDOW

TEL 810-424198-2 GAS PIPE A

TEL 810-424213-2 CHUCK

TEL 810-424214-1 PINCETT2

TEL 810-50024 KIT,  AUTO SHUTTER

TEL 810-50028 KIT,AS POLY TUBE CHANGE

TEL 810-50028 KIT,AS POLY TUBE CHANGE

TEL 810-50029 KIT,TEOS TUBE CHANGE

TEL 810-54274 CAP, SUS, COVER

TEL 810-54741 GAS LINE

TEL 810-56545 SHIELD RING, T7 (8K-220)

TEL 810284898 SCINTILLATER

TEL 810305305 APERTURE6 *002T03

TEL 810421454-2 CLAMP SHAFT PLUG

TEL 811-20522 FAN, 24V DC BRUSHLESS

TEL 8135 OPTICAL CABLE

TEL 815001-588 O-RING 1/16" CHEMRAZ .56IDX.060W ZCC

TEL 815001-589 O-RING 3/16" CHEMRAZ .176IDX.070W 9008-

TEL 82001-SL023 VAC SEAL ARM2

TEL 82001SL017 MACRO VAC EAL

TEL 8203-30162 RELAY UNIT

TEL 82037-0300 KIT, RMA-12@S1, 2.0, SS, W/DOOR

TEL 83027-101039-1 O-RING

TEL 850-9034 POWER,SUPPLY,24V,CTC

TEL 853-S034050-010-01 RF ATC POWER SUPPLY CABLE

TEL 853-S034051-010-01 RF ATC SIGNAL CABLE

TEL 853-S034052-001 RF ATC MOTOR CABLE

TEL 853-S034054-001 RF ATC LIMIT CABLE

TEL 853-S034055-010 RF MATCHING BOX FINE CABLE

TEL 85406-01 APC HEATER BLANKET  FOR 61140 (85406-01)

TEL 880-020115-3 EJECTOR ZX1052-J26LOZ-ECN-Z-X116

TEL 880-020192-2 LM GUIDE

TEL 880-020193-2 LM GUIDE

TEL 880-020194-2 LM GUIDE

TEL 880-020363-03 BALL SCREWS

TEL 880-100004-1 OZONE KILLER CONTROLLER

TEL 881-500140-2 TSBC-V30A

TEL 881-500170-1 TABC-ANALOG I/F-B

TEL 881-600030-2 IND CONTROLLER

TEL 881-600080-2 INTERCONNECTION BOARD (2)

TEL 881-600090-2 INTERCONNECTION BOARD (3)

TEL 881-600110-2 ENCODER

TEL 881-620640-4 E.P.D BRD

TEL 881-620990-8 INDEXER INT CONN 4

TEL 881-6211441-B PCB AC POWER FAIL DETECTOR BOARD 2 (DRV)

TEL 881-621180L RF-C ANAOLG BOARD

TEL 881-621182-H RF-C ANALOG BOARD

TEL 881-621390-4 MAIN ANALOG 1 BOARD

TEL 881-621400-6 MAIN ANALOG 2

TEL 881-621400-7 MAIN ANALOG PCB

TEL 881-621430-4 U/C BVF BOARD 1

TEL 884-13-000 PCB, INTERLOCK, WATER

TEL 884-54-000 PCB, PROCESS CNTRL INTERFACE

TEL 885-020002-11 BOTTOM ELECTRODE GROOVE 5"

TEL 885-425300-8 L/L ARM ASSY

TEL 885-429400-3 EXHAUST RING

TEL 885-430015-1 5"CLAMP RING 5"

TEL 885-430017-2 CLAMP RING

TEL 886-400240-2 STEPPING MOTOR DRIVE

TEL 886-400790-2 ENCODER SENSOR

TEL 886-422434-2 STEPPING MOTOR DRIVER

TEL 886-431960-1 P/A THETA MOTOR ASSY (V2)

TEL 886-436531-2 PHOTO DIODE ASSY(EPD) V2

TEL 886-445410-1 ACRTC-U/C BUF 1 CABLE

TEL 886-450240 AIR CYLINDER (F/S)

TEL 887-400160-2 STATUS UNIT

TEL 910-413388-2 UNDER SUPPORT (L)

TEL 910-413389-2 UNDER SUPPORT (R)

TEL 910-414188-1 STOPPER PRESSURE

TEL 910-416394-5 SET RING

TEL 910-417024-1 NOZZLE (B-26G)

TEL 911-039-G1 SUPPLY,POWER,24V,RGA

TEL 911-040-G30 CABLE

TEL 91361-00011 V24O-RING FOR EAGLE 1024.X04.00V7GM

TEL 953-5090 GASKET (10pcs)

TEL 953-9230 SEAL

TEL 987-310009-9 L E DETECTOR (300 cc

TEL 992-40270 CHUCK ETCHER

TEL 99356-01 THERMOSTAT

TEL 99357-01 TEMPERATURE LIMITER WITH RESET

TEL 99A0167 ELB, KF80, BEL 13 X 13.78

TEL A110682 ASSY LONG ACTUATOR

TEL A112837 CABLE ASSY WRIST LATCH SENSE

TEL A112837 CABLE ASSY WRIST LATCH SENSE

TEL A113259 DISK, FORMAT

TEL A113613 ASSY, BODY CHUCK

TEL A113816 ALIGNMENT BAR ASSY

TEL A113819 CENTERING DISK ASSY, 150MM

TEL A113850 FROG LEG LOCATOR

TEL A116051 RING, FILLER, AL, 200MM

TEL A116052 FILLER RING ASSY,200MM

TEL A117222 TEST FXTR, TAB STRENGTH

TEL A117772 TIMING PULLEY,62 GROOVE

TEL A118239 WELDMENT, CATHODE

TEL A119161 KIT, SPA-12@S2, 2.0, SS, W/DOOR (82037-0400)

TEL A119165 ASSY, DOOR, SPA 12A, S-3, 2.0, STAR (A126458)

TEL A119275 MAGNET, ASSY, PACK

TEL A120431 BACKPLANE HEATER ASSY 200MM

TEL A120487 CHUCK, LOAD ARM, 200MM

TEL A120590 CHUCK,ASSY,LOAD,ARM,200MM

TEL A120729 HEATER, ASSY, FRP, 150MM

TEL A120729 HEATER, ASSY, FRP, 150MM

TEL A121392 LATCH, ASSY, COMPLETE 200MM

TEL A122845 ASSY, W/H, CR-150

TEL A123041 MAGNET SUPPORT WELD

TEL A126809 ASSY, ADPTR, BELL JAR, ESSS, ECL

TEL A128788 KIT,SHIELD

TEL A128789 KIT,SHIELD,SPUT1,RM-12,TIW

TEL A129098 KIT,SHIELD

TEL A129211 COMPUTER, X-TERM BOX

TEL A2040-000579-1 MOTOR, STEPPING (A3725-9215GME)

TEL A2040-001612-1 STEPPING MOTOR (A5010-9115E)

TEL A2043-001617-1 HEATER, SILICON RBR, VEC-HS1

TEL A21105-300561-13 FORK

TEL A21110-206450-11 COVER, WATER COOLED, SUS304 2B, T2, B

TEL A21110-317604-12 HEAT INSULATING MATERIAL

TEL A21110-322848-11 E2 HEATER JACKET (LH)

TEL A21110-409762-11 GASKET

TEL A21181-000308-17 PCB ASSEMBLY WAFER COUNTER 826

TEL A21187-001397-13 CONTROLLER, HEC-PYRO-F

TEL A21187-021935-11 CARRIER TRANSFER ARM RIBBON CABLE

TEL A21187-027556-13 FURNACE MONITOR, M-120 TYPE

TEL A22187-158228-11 HEATER INSULATION TOP SOCK

TEL A2250 MODEL 382 CONTROLLER (INCLUDING KEYBOARD)

TEL A2C1181-000078-11 PCB ASSY,3648.86 CP-8340

TEL A2MJ4-085240-C DRIVEN PULLEY

TEL A2MX4-017880-A SPACER SUS316

TEL A3012-007407-1 VALVE, VAC., VEC-S8

TEL A32110-339454-21 PIPING,20A,SUS316

TEL A32110-339585 PIPING 20A

TEL A4-110-036 INSULATOR RING A4-110-036PSC

TEL AB41-03-5 VALVE SOLENOID

TEL AB41-04-8 220VAC WATER VALVE

TEL AHX-654H LAMP 110VAC

TEL AMD01-X0824 PNEUMATIC VALVE

TEL AME05-E1-11-PLS-10W CHUCK VACUUM SOLENOID VALVE

TEL Apr-11 PRESSURE GAUGE

TEL AS0000001 PCB ASSY, TIS1000

TEL AS1201F-M5-04 YUASA OVEN+PIN SPEED CONTROLLER

TEL AS568-377 O-RING, AS568-377  PURE RUBB

TEL AS568A-0394079 FILTER RESIST, O-RING

TEL AS568A-258 O-RING FOR EAGLE 10

TEL AS568A-360 O-RING FOR EAGLE 10

TEL AS568A-451 O-RING FOR EAGLE 10 BS451A

TEL AUM-1391A MONITOR, DIFFUSION FURNACE

TEL AZ-18944 PCB, CP8120BD