AI523

AI523

AI523

AI523

AI523

LAM 714-019956-001 BRKT,MANF,PLT.CLG MTG 2300 MWA

LAM 714-021304-001 COVER

LAM 714-021836-001 ENCLOSURE, FAN, OUTER

LAM 714-022007-001 COV,BTM.CIOM ENCL.2300 MWAVE

LAM 714-022009-001 COV,SIDE,ENCL.2300 MWAVE

LAM 714-022241-001 COV,DI VME,DC SPRT

LAM 714-024512-101 COVER SOLENOID TRAY

LAM 714-024512-101 COVER SOLENOID TRAY

LAM 714-024512-103 COVER, CA TRAY

LAM 714-024513-100 ENCL, SOLENOID TRAY

LAM 714-025051-002 CVR MTCHBOX EXT ESC

LAM 714-025958-001 SUPPORT PLATE

LAM 714-028527-001 TCP M/C MATCHER COI

LAM 714-031054-002 RETAINER UNVERSAL WDO

LAM 714-032003-004 COV,BOT,LWR MTCH ENCL,A6

LAM 714-032029-001 COV,ELEK CMPNT,FRONT

LAM 714-075327-001 MILAN FIBER TWIST MODEL MILI140 CONVERTOR

LAM 714-110249-002 PL, CLP, DBL, SLD

LAM 714-110863-001 STRAP,TWR CASE P.C B/H &WLMT

LAM 714-140242-001 STANDOFF GAS FEED 2 1/2LG

LAM 714-140259-001 STRP,GROUND

LAM 714-170128-001 BRACKET

LAM 714-190320-002 SUPPORT BRACKET

LAM 714-220204-001 RGA PORT SUPPORT

LAM 714-220204-001 RGA PORT SUPPORT

LAM 714-220748-003 VENT, 4" EXHAUST

LAM 714-222405-001 SCRN, EMI, SOL TRAY COV

LAM 714-222984-001 PL,MTG,MONOCHROMATOR

LAM 714-249190-001 HGR,LWR MATCH BOX

LAM 714-249342-001 STRAP CNTOR ESC 150MM

LAM 714-330356-001 SCREEN, RF SHIELD HEAED E.P.

LAM 714-347271-001 SHIELD

LAM 714-386008-001 COV,DIP BOX/TEMP CONT

LAM 714-443235-002 PL,MTG,BICEP PWR SPLY

LAM 714-460562-002 COVER, ELCTD HSG ESC

LAM 714-460564-002 COVER, VIA LOWER ELCTD HSG ESC

LAM 714-470572-001 VENT MOUNT

LAM 714-491416-002 BRKT,MTG,RF CONT ENCL,TALL

LAM 714-491925-001 BRKT,ENCL,XFMR,A/T

LAM 714-494492-002 COV,PCB,LWR MATCH RF INTLK

LAM 714-495015-001 COVER

LAM 714-800097-004 ENCL,AC CONT

LAM 714-802247-002 COV, RF GEN

LAM 714-810225-001 COV,PCB,NODE,DUAL V

LAM 715-000001-001 CHAMBER LOAD LOCK

LAM 715-000015-002 MOUNT BASE LOAD LOCK EXIT

LAM 715-000028-002 BOTTOM PLATE

LAM 715-000102-001 PIN DOOR GATE LINKAGE IN/OUT (PACK OF 10)

LAM 715-000185-001 COUPLING

LAM 715-000764-002 PL,LIFT,3-PIN

LAM 715-000764-002 PL,LIFT,3-PIN

LAM 715-000764-703 PL,LIFT,3PIN,2300

LAM 715-00131-001 HOUSING TEMPERATURE CONTROL

LAM 715-001388-001 ACTUATOR FOOT

LAM 715-001408-001 5"ANODIZED CATHODE

LAM 715-0015-001 BASE MOUNT OUT/DOOR

LAM 715-001626-001 SUPPORT, PCT DRIVE RF

LAM 715-002041-002 GEAR PHASE CAP

LAM 715-002054-001 SHAFT, EXIT LIFTER

LAM 715-002570-001 CHAMP,FLANGE,LONG

LAM 715-003573-003 PL,OPTICAL CONN

LAM 715-004042-001 ANODE

LAM 715-005865-001 PLATE TOP  490

LAM 715-006436-001 BARRIER ION ANODIZED

LAM 715-006584-001 GEAR SPUR MOIFIED

LAM 715-006590-001 SPINDLE, LL, FEEDTHRU

LAM 715-006590-001 SPINDLE, LL, FEEDTHRU

LAM 715-006602-001 HOUSING SEAL QUALRIM

LAM 715-007514-001 SPACER BRAKE

LAM 715-007528-001 FLANGE, MOUNT, GATE DRIVE CYLINDER

LAM 715-009128-005 ELECTRODE PLATE (715-9128-005)

LAM 715-009161-001 LIFTER, WAFER

LAM 715-009306-004 FOCUS RING

LAM 715-009306-005 FOCUS RING

LAM 715-009898-001 EDGE RING 5

LAM 715-0102-1 PIN,

LAM 715-010202-001 PLATE,JACKING SCREW

LAM 715-010213-002 TOOL CAL EDGE SNSR, 1.49

LAM 715-010237-006 DISC CALIBRATION APM

LAM 715-011005-001 HOUSING-GAP ADJUST

LAM 715-011016-001 HINGE,BOTTOM,CHAMBER

LAM 715-011035-001 PLATE, HEX, LOWER, RE

LAM 715-011039-001 RETAINER-WINDOW

LAM 715-011039-002 RETAINER UNIVERSAL WINDOW

LAM 715-011039-004 RETAINER, HEATED E.P. WINDOW

LAM 715-011051-001 FRAME, CHAMBER, WINDOW

LAM 715-011051-001 FRAME, CHAMBER, WINDOW

LAM 715-011059-001 RING ORIFICE ANNODIZED

LAM 715-0111173-001 CALIBRATION FLAG FOR GAP

LAM 715-011126-001 BRACKET ENCODER

LAM 715-011213-001 PLATE, VENT PORT 90DEG LOADLOCK

LAM 715-011214-001 PLATE VENT PORT 180DEG

LAM 715-011229-003 PLATE, SEAL, EXIT LOADLOCK

LAM 715-011420-001 PLATE

LAM 715-011492-005 HOLDER WAFER 5"

LAM 715-011502-001 COOLING RING

LAM 715-011504-001 BAFFLE, UPPER

LAM 715-011521-001 BRACKET POU GAS FILTER

LAM 715-011531-009 ELECTRODE, ANODIZED

LAM 715-011531-011 ELECTRODE, ALUMINUM, ANODIZED

LAM 715-011531-014 ELECTRODE, AL, UPPER

LAM 715-011531-014 ELECTRODE, AL, UPPER

LAM 715-011531-016 UPPER ELECTRODE

LAM 715-011531-102 ELECTRODE, UPPER, ANOD

LAM 715-011532-006 (R)PLATE UPPER SEAL

LAM 715-011559-262 WAFER CLAMP

LAM 715-011565-001 BOLT, CLAMP RETAINING

LAM 715-011565-003 BOLT

LAM 715-011570-001 SHIELD

LAM 715-011582-001 BAFFLE PLATE, LOWER AL

LAM 715-011590-001 PLATE,LOWER BAFFLE 6

LAM 715-011593-002 PLATE,SEAL,4420

LAM 715-011597-001 5MIL ELECTRODE AL AN

LAM 715-011613-002 BAR, STOP

LAM 715-011626-001 RING, COOLING LOWER ELECTRODE

LAM 715-011630-001 ELECTRODE , BOTTOM

LAM 715-011630-001 ELECTRODE , BOTTOM

LAM 715-011639-008 CAP, ELECTRODE, LOWER, 4400

LAM 715-011639-508 CAP, LWR, ROUGH, 858STR

LAM 715-011640-006 RING, AL-ANDZ LWR FOCUS ELCTD

LAM 715-011664-006 ELCTRD, LWR CAP, 6-IN NO ANDZ FLAT AL

LAM 715-011665-006 ANODE

LAM 715-011669-006 ELCTRD, LWR DOMED W/OUT PINS, AL

LAM 715-011746-142 PLATE, 4" .010 DOME REDUCED HGT

LAM 715-011823-001 ROD-MECHANICAL STOP 8.50

LAM 715-011825-001 LOWER CHAMBER PLATE

LAM 715-011858-001 PLATE WINDOW END POINT DET

LAM 715-011902-001 BAFFLE PLATE

LAM 715-011909-501 ELECTRODE, SI, CAPTIVE

LAM 715-011912-555 BAFFLE, UPPER, 4420, STR,858

LAM 715-011912-555 BAFFLE, UPPER, 4420, STR,858

LAM 715-011913-083 PLATE, BAFFLE LOWER

LAM 715-011913-083 PLATE, BAFFLE LOWER

LAM 715-011913-501 BAFFLE, LOWER

LAM 715-011913-555 BAFFLE, LOWER, 4420,STR,858

LAM 715-012025-001 SPACER 0-RING

LAM 715-012101-008 HOLDER,W/F 8",ARM EXIT

LAM 715-012111-002 COVER ARM HSG (CABLE DRIVE)

LAM 715-012126-001 TUBE ARM DRIVE

LAM 715-012165-005 5"HOLDER WAFER 5" TIGHT POC

LAM 715-012165-008 ARM, TIGHT POCKET ELL

LAM 715-012223-001 SHAFT GROVVED INNER PLATE

LAM 715-012233-002 GATE-HARD ANODIZE INNER

LAM 715-012243-001 BLOCK LATCH

LAM 715-012245-001 PIVOT, GATE, INNER

LAM 715-012251-001 BAR LATCH SOLENOID RELEASE

LAM 715-012254-001 BEARING, LATCH SOLENOID RELEASE

LAM 715-012322-001 OUTER DOOR FOR GATE DRIVE

LAM 715-013295-001 HSG,ADJ, WFR LIFT

LAM 715-013477-001 PLATE, MOUNTING

LAM 715-013718-006 CHUCK SPINNER 6"

LAM 715-013718-016 ASSY ELECTRODE

LAM 715-013772-001 COLLAR PINNED LIFTER 6"(462

LAM 715-014074-002 BLOCK MTG , GAS NOZZLE

LAM 715-014556-031 GASKET,ORIFICE

LAM 715-015092-001 BLOCK,THREADED,SEED

LAM 715-015216-001 TUBE ADAPTER

LAM 715-0166-001 CYLINDER, ARM-AIR

LAM 715-018611-117 CAP, LWR, ELECTRODE, 8"

LAM 715-018906-002 ELECTRODE, BOTTOM, BELLOW

LAM 715-018917-001 HOLDER,W/F CLAMP(462

LAM 715-018991-006 ELECTRODE, ALUMINUM, ANODIZED

LAM 715-019939-002 TUBE,MANF TO MCRWV SOURCE

LAM 715-019940-002 TUBE,MANF FROM MCRWV SOURCE

LAM 715-019942-002 TUBE,MANF TO MCRWV VLVE FROM G

LAM 715-019943-001 TUBE,MANF TO TEE FROM CHMBR

LAM 715-019944-004 TUBE,VLV TO TEE TO CHMBR

LAM 715-019945-002 TUBE,VLV TO  CHMBR

LAM 715-021092-001 SPACER

LAM 715-021274-008 CAP, LOWER ELECTRODE 8IN

LAM 715-021400-002 COVER, 180 DEG LOADLOCK, P.S. MOD

LAM 715-021507-1 CONNECTOR,MALE,VCR,MOD.

LAM 715-021719-001 COVER BELL JAR ISO ETCH

LAM 715-024347-100 PLATE,SPRT,V65,V65A,V75,V75A

LAM 715-025106-001 PLATE- LOWER BAFFLE, ESC

LAM 715-028087-005 SHROUD HARD ANODIZED

LAM 715-028420-001 CAP, L ELECTRODE FLAT PROCESS

LAM 715-028486-001 PLATE UPPER SEAL 6' ELECTRODE

LAM 715-028559-001 SHOWER HEAD 6" 4620

LAM 715-028616-001 PLATE LOWER BAFFLE 8" BOLTED

LAM 715-028620-001 PROBE, THERMAL WELL

LAM 715-028735-001 TRIPPLE BAFFLE, UPPER 852

LAM 715-028852-001 RING,CLAMP UPPER

LAM 715-030079-001 DISC. CLAMP

LAM 715-030106-006 EDGE RING

LAM 715-030106-008 RING, EDGE. 8"

LAM 715-030136-003 RING, EDGE ESC

LAM 715-031023-001 SPATULA EXIT SIDE 9600 SMIF

LAM 715-031055-001 BLK, HTD ENDPOINT

LAM 715-031513-002 RING, 1/4 TURN

LAM 715-031705-006 SPACER, SHIELD, RF

LAM 715-031753-001 ELECTRODE

LAM 715-031753-001 ELECTRODE

LAM 715-031777-002 SCREW 6-32 CPV ANODIZED

LAM 715-031960-007 PLUNGER,1/4 TURN (ANODIZED)

LAM 715-031984-003 ENDPLATE, SMALL WINDOW CHAMBER

LAM 715-031988-001 PLATE,FOR TURBO,MANOMETER SIDE

LAM 715-032012-003 PLATE, WINDOW, CHAMBER LGR

LAM 715-032012-004 END POINT WINDOW ASSY

LAM 715-032758-002 EXT ARM,PADDLE SPHERE BR G PLTD

LAM 715-032789-001 COV, TK, WTR VAPOR DLVY SY

LAM 715-038611-002 DC, BIAS PIN HOLDER

LAM 715-06213-001 SHOWER HEAD

LAM 715-062533-002 CH, CLP, COMPL, CLOS

LAM 715-072302-001 PUMP, COMPOND MOLECULAR

LAM 715-0725-001 CATHODE ANODIZED

LAM 715-07898-001 FOOT

LAM 715-080387-001 ARM, WAFER, XPORT, UNIV, 6IN, 384T

LAM 715-080554-001 PL,MT,U,ESC,ASIQ/384T

LAM 715-090184-001 SCREW, SOCKET HEAD ARM (PACK OF 10)

LAM 715-110336-002 PLATE, OUTER, GATE, SEAL

LAM 715-11059-001 RING, ORFICE

LAM 715-110709-001 PLATE, ADAPTER

LAM 715-110765-001 MTG R,AUTOTUNE 4520,L BRKT

LAM 715-11504-001 PLATE PERF ALUMINUM

LAM 715-11531-002 SHOWER HEAD

LAM 715-11629-006 LOWER CAP ELECTRODE 6"

LAM 715-11649-002 BOLT, ORIFICE RING

LAM 715-11901-005 PLATE

LAM 715-12254-001 BEARING, LATCH SOLENOID RELEASE

LAM 715-140079-001 PLATE, SEAL, UPPER ELECTRODE, 4600

LAM 715-140099-001 ESC WATER JACKET

LAM 715-140124-001 BAFFLE, UPPERTPL SET

LAM 715-140125-001 BAFFLE, LOWER OF THREE

LAM 715-140126-001 BAFFLE, TPL SET

LAM 715-140144-002 RING, CPLG, LVLG, EXP, 6, JDA

LAM 715-140153-008 RING, COUPLING, ESC 8", JDA

LAM 715-140287-001 RING,CLMP,UPR,ELECTRODE

LAM 715-140350-010 LOWER ELECTRODE CAP

LAM 715-14042028 ELECTD,AL,ANDZ,8 INCH

LAM 715-140421-026 ELECTRODE ALUMINUM 6"

LAM 715-140485-006 ELCTD (SPCL), AL, ANDZ, 6

LAM 715-160153-002 PLT MTG AUTOTUNE MATCH

LAM 715-2007-001 PIN, HINGE

LAM 715-220249-001 BRACKET, COOLING LINE, HOLD DOWN

LAM 715-220438-002 SLEEVE,FILTER,GAS FEED

LAM 715-220438-002 SLEEVE,FILTER,GAS FEED

LAM 715-222451-003 SHUTTER ARM

LAM 715-24349-100 PLATE SUPPORT

LAM 715-249241-001 SCR,GDE,LWR ELCTD,ESC

LAM 715-250544-001 GRID GROUND W/15MM HOLES FOR 9500

LAM 715-28681-001 SEAL PLATE

LAM 715-28686-001 SEAL PLATE

LAM 715-28686-002 SEAL PLATE

LAM 715-30079-001-1 TOOL, DISK CLAMP

LAM 715-300825-006 LINER, CHAMBER

LAM 715-330000-070 RING GAS INJECTION

LAM 715-330000-090 RING, GAS DISTRIBUTION

LAM 715-330000-090 RING, GAS DISTRIBUTION

LAM 715-330087-001 GAS INJECTION RING

LAM 715-330092-002 COV, NUT, BOT GAS FD W/O SLOT

LAM 715-330133-001 RING UPPER CHAMBER FIXED GAP

LAM 715-330135-001 R, BOT GAS INJ, ESC

LAM 715-330151-004 RING,ACTR

LAM 715-330152-003 SPRING ADJUSTABLE HOUSING

LAM 715-330161-002 SHLD RING

LAM 715-330161-002 SHLD RING

LAM 715-330164-006 ADJUSTMENT PLATE

LAM 715-330166-003 COV, ROD, CLPG, AL, B.A.C. (PACK OF 3)

LAM 715-330302-001 SEAL GAS FEED REAR

LAM 715-330312-001 RING, RETAINING CLIP

LAM 715-330354-002 BLK,HTD ENDPOINT

LAM 715-330394-002 BRACKET CHAMBER LINER 9400 W/PLENUM

LAM 715-330394-002 BRACKET CHAMBER LINER 9400 W/PLENUM

LAM 715-330773-001 LID ASSEMBLY

LAM 715-330825-006 LNR,CHANDER AL EXTEND ALL I

LAM 715-330825-006 LNR,CHANDER AL EXTEND ALL I

LAM 715-360197-001 GASKET, 1/2VCR DRILLED .013 CENTER HOLE

LAM 715-360268-001 PL,CHMBER TO VLV

LAM 715-4042-001 ANODE, 8"

LAM 715-412298-001 STUD, HOLD DOWN, 1/2-13X10.0, STL

LAM 715-412472-001 SPCR,MON,ALLI 6

LAM 715-42859-001 FIXTURE CENTERING RETICLE

LAM 715-442006-001 RING, RETAINER, O-RING

LAM 715-443098-001 RING, CLP, UPPER ELECRTRODE

LAM 715-443130-001 RING FOCUS OUTER AL EXELAN

LAM 715-443130-001 RING FOCUS OUTER AL EXELAN

LAM 715-443131-001 RING, GROUNDING ALUM

LAM 715-443178-202 R,EDGE,HOT,8FLAT

LAM 715-443202-001 RING, COUPLING, ESC, JEIDA, 8

LAM 715-460552-002 LINER, CHAMBER LOWER 9100/A6

LAM 715-460553-002 LINER, CHAMBER UPPER 9100/A6

LAM 715-460559-004 PIN, SUPPORT HTD LNR HASTELLOY

LAM 715-460578-001 LIFTER, WAFER 4-PIN

LAM 715-461022-001 R, CLG, ESC, UNIV

LAM 715-470821-001 PL,MTG,V,AIR OPR,GAS PALLET

LAM 715-495014-001 LINER,CHAMDER,TRNSN MANF,ADPTR

LAM 715-540057-001 TEE

LAM 715-626-1 LIFTER PISTON

LAM 715-654-1 LIFTER PISTON END

LAM 715-6602-1 HOUSING ARM SHAFT

LAM 715-666-1 LIFTER LOWER PISTON

LAM 715-802530-001 PL,ADAPT,DN200,VLV TO CHMBR

LAM 715-803220-001 SHLD,GND,DFC,300MM

LAM 715-803220-003 SHLD,GND,DFC,300MM

LAM 715-9034-1 LIFTER TOP PLATE

LAM 715-L011123-001 PLATE, CLAMP BOWL NUT

LAM 715-L011125-001 SPROCKET

LAM 715-L011628-001-00 DIVDER, FLOW