XYCOM FAIN-XVME-566

XYCOM FAIN-XVME-566

XYCOM FAIN-XVME-566

XYCOM FAIN-XVME-566

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AW601110  1-------------

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AX09-30-10   10­Ó

6ES7322-5HF00-0AB0  1

6GK1503-2CB00  2

6ES7195-7HB10-0XA0  2

6ES7195-7HC00-0XA0  1

6DL9901-8AA  1

6GK5106-1BB00-2AA3  2

6GK5101-1BB00-2AA3  1

6GK6015-0AM2  1

6ES7231-0HC22-0XA0  1

6SL3358-3AG41-3BA0     1¶ô

6SL3350-6TK00-0BA0     1¶ô

ZCU-14 PACKED SP   1 ABB

THYRIST0R     1ABB

1200V1400A FUJIIGBT   1ABB

LF1005-S   1ABB

POWER SUPPLY BOAPD  1ABB

BGDR-01C    1ABB

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6EP1961-2BA41    5

6ES7 318-3EL01-0AB0    1----------

7KM9300-0AE01-0AA0    1

6GK5216-0BA00-2AC2    1------------

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1­Ó 6ES7 414-2XL07-0AB0 V7.0.2-----------

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1»O G120XA (1P)6SL3220-1YD32-0UB0 (S)ZVL4392000615 FS:01

1»O 6SL3220-1YD30-0UB0

1»O 6SL3210-1PE24-5UL0

1­Ó 6SL3210-1PE22-7UL0

2®M EM223 CN DC/DC 223-1BH22-0XA8

1®M S7-200 CN CPU 226 CN DC/DC/DC 216-2AD23-0XB8

1®M S7-300 CPU 314 314-1AG13-0AB0

1®Ú S7-300 PLC 6GK1 571-0BA00-0AA0--------

TEL 1910-319994-11 AL COVER U

TEL 1910-319995-11 AL COVER T

TEL 1910-321310-13 GUIDE (L)

TEL 1910-321311-13 GUIDE (R)

TEL 1910-418164-13 DAMPER SHUFT

TEL 1910-418203-12 NOZZLE BRACKET 2

TEL 1910-418217-12 PACHING

TEL 1910-422378-11 WAF GUIDE (6")

TEL 1910-424625-12 PULLEY SHAFT

TEL 1910-425777-1 PIN

TEL 1910-428916-11 CHIP GUIDE

TEL 1910-429087-12 NOZZLE HOLDER

TEL 1910-429745-12 NOZZLE, HOLDER

TEL 1910-430884-12 TUBE CONNECTER

TEL 1910-433828-11 PIN

TEL 1910-435937-11 BLOCK IDLE

TEL 1910-442219-11 VAC SEAL TOOL

TEL 1910-449604-11 BLIND

TEL 1910-457427-11 BUFFER

TEL 1910-457558-11 WAFER GUIDE

TEL 1920-411191-11 PULLY

TEL 1981-603313-11 LED DISPLAY BOARD

TEL 1981-607041-13 STEP5 MOTOR DRIVE BOARD

TEL 1981-607569-11 PCB, USER BOARD ASSY

TEL 1985-41190-13 8" COATER CATCH CUP ASSY

TEL 1985-414025-11 I/F GAP PIN ASSY

TEL 1985-416828-11 CENTERING JIG 6 INCH

TEL 1985-425503-12 PIN (AD) 7" (PACK OF 6)

TEL 1985-425512-13 8" PIN SET ASSY

TEL 1986-401324-11 8 COL PIN UP SENSOR ASSY L200

TEL 1986-401325-11 8 COL PIN DOWN SENSOR ASSY L200

TEL 1986-416108-11 AC CABLE OLF 2.5SQ:3C SS

TEL 1986-421055-1 M/A WAFER SENSOR ASS

TEL 1987-410294-11 M/A S.S Z COIL SPRING

TEL 1987-411444-11 ASSY, 3P M/A S.S Z

TEL 1987-411593-12 SERVO DRIVER

TEL 1987-423370-1 SWITCH EMO BOX

TEL 1B05-100148-14 COOLING HOSE(8)

TEL 1B05-100149-13 HOT DIW TANK

TEL 1B05-100214-12 GUIDE,WAF200Z MS 8 CHUCK

TEL 1B05-100260-11 8BOAT (QZ)

TEL 1B05-100271-11 6" CHUCK(QZ)-52

TEL 1B05-100288-11 6" BOAT(QZ)-52-H.

TEL 1B05-100327-11 8BATH QDR TYPE-E(NS)

TEL 1B05-100354-12 8 BATH FR TYPE-E (MG)

TEL 1B05-200040-13 FLUME(8 INCH-N)

TEL 1B05-200045-14 DRAIN RECEIVING TRAY(GS)

TEL 1B05-200052-12 8 BAFFLE QZ(TYPE-C)

TEL 1B05-200084-11 8BAFFLE QZ(TYPE-B-S)-2

TEL 1B05-200090-11 6" BAFFLE SPM

TEL 1B05-200095-11 6" BAFFLE QZ

TEL 1B05-300046-12 SUB FLUME (8-A)

TEL 1B05-300047-12 SUB FLUME (8-B)

TEL 1B05-300048-12 SUB FLUME (8-C)

TEL 1B05-300049-12 SUB FLUME (8-D)

TEL 1B05-300071-11 PUNCHING PLATE(AP

TEL 1B05-400065-11 SENSOR GLASS

TEL 1B05-400078-11 QUARTZ PIPE(150)

TEL 1B81-001551-11 LS CN BOARD

TEL 1B81-010067-16 N2 SENSOR BOARD

TEL 1B81-010123-16 PCB BOARD

TEL 1B81-010267-13 P064 BOARD CIRCUIT

TEL 1B81-010273-14 C2H INTLK BOARD

TEL 1B86-030137-12 W/TRA DRV ZE CABLE 4

TEL 1B86-032474-13 INDEXER POSI SENS ASSY

TEL 1B86-032475-13 INDEXER SENS ASSY

TEL 1B86-032669-14 INDEXER CAR SENS(T) ASSY

TEL 1B86-032670-14 INDEXER CAR SENSASSY

TEL 1B86-032673-12 INDEXER POD LK SENS ASS

TEL 1B86-032674-12 INDEXER POD ULK SENS ASSY

TEL 1B86-032677-14 INDEXER CONN BRD CABLE

TEL 1B86-034056-17 INDEXER POD LK SENS ASSY-R

TEL 1B86-034057-17 INDEXER POD ULK SENS ASSY-R

TEL 1B86-035917-12 INDEXER POD CHECK RBT-CABLE

TEL 1B86-035918-12 INDEXER LATCH RBT-CABLE

TEL 1B87-512644-11 ASSY, SMIF TABLE

TEL 1D05-300040-13 RING,INSULATOR, C, (DRM2) QUARTZ

TEL 1D05-300052-11 RING INSULATOR A7

TEL 1D05-300053-14 RING.INSULATER B2(DRM2)

TEL 1D05-300185-13 RING INSULATER A7(HF1 0)(DRM2)

TEL 1D05-400022C14 WINDOW SHIELD DEPO (DRM2)

TEL 1D08-000321-11 BOARD TYB422-1

TEL 1D10-100075-14 BAFFLE PLATE LEVEL 5 (PC-3)

TEL 1D10-100327-13 PLATE

TEL 1D10-100582-14 ELECTRODE BOTTOM

TEL 1D10-100938-12 RF PLATE,PC1 (DRM2)

TEL 1D10-100938-12 RF PLATE,PC1 (DRM2)

TEL 1D10-101111-11 PLATE, RF, P2C, (DRM2)

TEL 1D10-101111-11 PLATE, RF, P2C, (DRM2)

TEL 1D10-101965-12 ELECTRODE BOTTOM, 8N-L2 (88DRM

TEL 1D10-102521-12 SHIELD DEPO UPPER-Y

TEL 1D10-200704-14 UPPER EL-BASE 1

TEL 1D10-200733-11 SHIELD RING (DRM2)

TEL 1D10-200734-14 COVER BELLOWS A

TEL 1D10-200921-12 DEPO, SEALD P1

TEL 1D10-200922-12 SHIELD, DEPO, P2

TEL 1D10-201429-15 UPPER,ELECTRODE R1

TEL 1D10-202177-12 UPPER ELECTRODE A-1 (DRM2)

TEL 1D10-301273-12 SHUTTER (LV-5)

TEL 1D10-302209-14 FOCUS RING

TEL 1D10-302791-12 RING, F-8J-SIC-260-3.4 (DRM2)

TEL 1D10-302869-11 PIN, BUSHER

TEL 1D10-303124-14 SHIELD DEPO 85-2(DRM2)

TEL 1D10-303124-16 SHIELD,DEPO 85-2

TEL 1D10-304010-11 RING,SHIELD B3

TEL 1D10-304010-12 RING..SHIELD,B3,(DRM2)

TEL 1D10-311758-11 RING, BELLOWS LOWER

TEL 1D10-312637-11 COVER BEL-L2 (C-ESC) (DRM2)

TEL 1D10-328005-11 COVER, PROTECT, ESC

TEL 1D10-401049-1 SCREW CAP PTFE (UNITY)

TEL 1D10-401722-11 COVER,BEL(DRM)

TEL 1D10-401952-11 PLATE STOPER PIN

TEL 1D10-403321-11 WINDOW SPACER M8

TEL 1D10-404153-11 EDGE PRESSURE CERAMIC SLEEVE

TEL 1D1O-312197-11 RING F-8SO-SIC (A+B)

TEL 1D80-000759-11 BURRERFLY VALVE

TEL 1D80-002363-12 GATE VALVE

TEL 1D80-002513-14 REMOTE CONTROL BOX

TEL 1D80-003507-21 AUTOMATIC MATCHING NETWORKMW2-30

TEL 1D80-003885-11 PCV..UPC-4JR-L124-C13S

TEL 1D80-004122-17 WMN-30F BOTTOM MATCHER OF  85 SCCM 2Mhz.

TEL 1D81-000120-1 PCB ASSY

TEL 1D81-000141-21 TYB41E-2 TMP BOARD

TEL 1D81-000303-18 PCB, TYP131-1/ILK

TEL 1D81-000304-31 BOARD  I/F PRESSURE SWITCH

TEL 1D86-000172-91 RF CABLE (P/C3)

TEL 1D86-003596-12 HEAT:PC:PC1 WALL RR ASSY

TEL 1D86-003620-13 TC

TEL 1D86-003781-13 ASSY, BTM

TEL 1D86-003946-14 CA: MAIN: PC1DCPWR (CABLE)

TEL 1D86-004229-13 CABLE,PC,PC2,BTM.PANEL

TEL 1D86-004358-13 TC, UNITY2

TEL 1D86-006871-41 CA:OUT:PC1:XINIX SCAN

TEL 1D86-006873-41 CA:OUT:PC1:XINIX DET1

TEL 1D87-000340-11 STD P/C2 CYLINDER

TEL 1IH0012710 MICRO PHOTO SENSOR

TEL 1JK0013000 OPTICAL FIBER CABLE

TEL 1M10-101054-12 6" ANODE

TEL 1M10-101054-12 6" ANODE

TEL 1M10-202045-13 ELECTRODE UPPER

TEL 1M10-303699-11 LIFTER PIN, TEFLON COATED

TEL 1M81-022067-11 CPU BORAD

TEL 1M87-000305-11 RECIPE MODULE VER.2

TEL 1N10-400438-1 SCREW CAP (M4)

TEL 1N10-401061-11 HOLDER CAP SCREW

TEL 1N10-401561-12 VACUUM SCREW M6X25(AL)

TEL 1N10-401834-11 GAS INLET

TEL 1N10-402078-11 VACUUM SCREW M6X16

TEL 1N10-402079-11 AL SCREW M4X8

TEL 1N10-402337-11 LOCATING PIN

TEL 1N10-402384-11 SCREW CAP M5 (2) (PTFE)

TEL 1N10-402385-11 SCREW CAP M6 (2) (PTFE)

TEL 1N10-402473-11 DEPO SHIELD (ES)

TEL 1N10-403168-12 PORT SLEEVE (2-7)

TEL 1N86-431263-11 MOTOR ASSY,SDR STG-X(SD14)