51405043-175

51405043-175

51405043-175

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7UT6131-2EB92-1AA0   1

Rexroth R480148067£p125         2

ATV61FHU15N4Z    5

ACS880-01-07A2-3       2  

ACS880-01-025A-3     1

1734-OB8¼Æ¶q10   1347

6GK5907-4PA00   1­Ó

6ES7231-4HE32-0XB0

6EP1334-1LB00   ¦U¤G

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ÅÜÀW¾¹³»³¡­·¾÷HC6/F1/03     2

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C98043-A7014-L2-4     1

6SE6400-0BP00-0AA1        5

STBNIC2212

STBXBE1100

STBPDT3100K

STBEHC3020KC

STBDDI3725

STBDDO3705

STBDDI3725KS

STBDDO3705KS

6ES7522-1BF00-0AB0 39­Ó

6ES7155-5AA00-0AA0 12­Ó

6ES7550-1AA00-0AB0 6­Ó

6ES7532-5NB00-0AB0 2­Ó

6ES7513-1AL02-0AB0 2­Ó

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1756-A17          4         ­±»ù11079

1756-PA72        4         ­±»ù11588

1756-L81E         4         ­±»ù58772------------

396657-01-0-----------------

SK700e-152-340-a-----------------

6SN1145-1BA01-0BA2--------------

1756-EN2T        4         ­±»ù33310

1756-EN2TR      4         ­±»ù36035

1756-IB32         12        ­±»ù6017

1756-OB16E      12        ­±»ù7024

1756-IF8H          4         ­±»ù17280

1756-IRT8I         8          ­±»ù30698

1492-CABLE010TBCH       4        ­±»ù1758

1492-CABLE025TBNH      20       ­±»ù1015

1756-TBS6H      12      ­±»ù1087

1756-N2      4      ­±»ù360

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1766-L32BXB       1     ­±»ù6358

2711R-T4T        1        ­±»ù4033

1769-OB32     9       ­±»ù6058

1769-PA4       4        ­±»ù5262

1769-OF8v      6       ­±»ù17185

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¥d¥ó HONEYWELL  51307190-150  1¥ó-----------------

¥d¥óHONEYWELL  51403422-150    1¥ó------------

51403519-160 ----------------

LAM 796-092798-001 VLV,PNEU

LAM 796-093055-001 SEAL KIT BONNET

LAM 796-093088-004 CONTROLLER,ADAPT PRESSURE VLV

LAM 796-094065-250 RING, CENTERING CHEMRAZ VATHSG

LAM 796-095450-002 V,1/4 FACE SEAL,M-IN,M-OUT

LAM 796-095768-001 SHLD, SPLINTER, 1K TURBO PMP

LAM 796-097155-001 O-RING,TOP PLATE

LAM 796-098649-001 LKG BALL SET,VAT 64 200MM

LAM 796-099248-001 ELB,UN,45 DEG,11Ra,SST,1/4

LAM 796-220744-001 GASKET

LAM 796-360004-001 ACTR VALVE COMPACT VAC

LAM 796-441317-003 VLV,SER65,DN250,CHEMRAZ W/FSI

LAM 796-L000716-001-00 VALVE, CHECK

LAM 796-S002925-013-00 VALVE, SOLENOID GATE VALVE SW2000

LAM 796-S002925-014-00 VALVE, SOLENOID SW1000, 2000

LAM 799-110332-001 INDX,SMIF,150MM,SEND

LAM 799-130053-003 ASSY,INT CONT BOX SEND

LAM 799-550187-001 BELLOW,VCE

LAM 799-550235-001 FLANGE, PHOTOSENSOR

LAM 799-550644-001 DR,ASSY,BLWS,TPI,VCE 6

LAM 799-901177-001 LPM, SMIF, 200MM

LAM 799-901177-002 LPM, SMIF, 200MM

LAM 80-0002-042 CABLE,FIBER OPTIC,.04,THRE

LAM 80-0002-068 SENSOR,HALL EFFECT PN

LAM 800555 SHAFT,BRSH,XPRT

LAM 801018 TRANSFORMER P8662 24V/2A STANCOR TRANSFORMER384-T

LAM 810-000392-001 PCB,SERIAL I/O

LAM 810-000474-001 PCB, POWER DRIVER CARD

LAM 810-000474-001 PCB, POWER DRIVER CARD

LAM 810-000671-001 PCB KEYBOARD

LAM 810-001634-001 PEDESTAL, TI

LAM 810-001915-003 ASSY,PCB END POINT DETECTOR

LAM 810-00392-001 PCB, S10

LAM 810-004092-001 RF INTERFACE BOARD

LAM 810-004092-001 RF INTERFACE BOARD

LAM 810-008566-001 PCB MOTOR DRIVER

LAM 810-009435-001 PCB, MFC EXTENDER

LAM 810-012073-001 SHIELD, AL

LAM 810-017001-001 MOTHER BOARD

LAM 810-017003-001 PC BOARD DIP

LAM 810-017003-001 PC BOARD DIP

LAM 810-017003-002 ASSY, PCB

LAM 810-017004-001 SOLENOID INTERLOCK PCB

LAM 810-017007-001 PCB, CONVECTRON TUBE

LAM 810-017008-001 PCB, TEMP SENSOR AMP

LAM 810-017008-004 ASSY,PCB,TEMP SENSOR AMP

LAM 810-017010-001 PCB

LAM 810-017013-001 PCB, AMP INTERLOCK

LAM 810-017013-001 PCB, AMP INTERLOCK

LAM 810-017016-001 PCB, MOTOR DRIVE STEP

LAM 810-017016-001 PCB, MOTOR DRIVE STEP

LAM 810-017017-001 PCB EDGE SENSOR

LAM 810-017018-002 ASSY,PCB,GAP MOTOR CONTROLLER

LAM 810-017018-002 ASSY,PCB,GAP MOTOR CONTROLLER

LAM 810-017021-001 PCB, LIFTER FILTER

LAM 810-017023-001 EXTENSION CARD

LAM 810-017025-003 PCB, BREAKOUT, RF, GEN, CART

LAM 810-017026-001 PCB,TEMP,CONTROL

LAM 810-017027-003 PCB ASSY

LAM 810-017029-001 PCB, DC BIAS NEG. PEAK DETECT

LAM 810-017030-005 ASSY PCB, GAS PANEL

LAM 810-017030-005 ASSY PCB, GAS PANEL

LAM 810-017031-002 PCB,ASSY,ADIO-AO

LAM 810-017031-003 PCB,ADIO

LAM 810-017031-004 PCB,ASSY,ADIO-AO

LAM 810-017031R004 RFRB ASSY, PCB, ADIO-AO

LAM 810-017032-001 ASSY PCB RF SENSER

LAM 810-017033-003 PCB,SRAM,MOD,

LAM 810-017035-001 PCB, SASI ASSY

LAM 810-017035-001 PCB, SASI ASSY

LAM 810-017038-001 PCB,SERIAL,SI/O,EXTENDER

LAM 810-017038-002 PCB, SERIAL I/O-2

LAM 810-017038-002 PCB, SERIAL I/O-2

LAM 810-017041-001 PCB,ASSY,BRUSHLESS MOTOR DRIVER

LAM 810-017048-002 PCB HEATER CONTROLLER ASSY

LAM 810-017057-001 STRIPPER ASSY PCB

LAM 810-017058-002 PCB, GAS, PANEL, MOTHER, BRD

LAM 810-017059-001 PCB, GAS, PANEL, INTERLOCK

LAM 810-017082-001 ASSY PCB 16 CHAN HEATER/COOL

LAM 810-017082-001 ASSY PCB 16 CHAN HEATER/COOL

LAM 810-017086-106 ASSY, PCB, ESC PWR SPLY, DC BIAS

LAM 810-017093-001 PCB, ASSY GAP MOTOR CONTROLLER

LAM 810-017098-001 ASSY, PCB GAP DRIVE AMPL INTLK

LAM 810-018077-001 INSULATOR

LAM 810-025368-001 ASSY, PCB, RELAY

LAM 810-025368-001 ASSY, PCB, RELAY

LAM 810-025369-002 PCB-RESISTIVITY PCU

LAM 810-034802-001 TCP RF SENSOR BOARD

LAM 810-034808-002 PCB TURBO/RF INTERLOCK

LAM 810-034808-003 ASSY TURBO/RF INTERLOCK PCB

LAM 810-04761R SHIELD

LAM 810-04764 COVER BELLOWS

LAM 810-04764R COVER BELLOWS

LAM 810-0503-001 PCB, CONTROL RF MATCH

LAM 810-0530-001 PCB, DRIVER MOTOR

LAM 810-06306R SHIELD

LAM 810-077044-001 EMO/INTERLOCK DIST PCB

LAM 810-077121-001 PCB

LAM 810-077146-001 ADIO/PCB

LAM 810-077290-001 PRES XDCR I/F PCB

LAM 810-077365-001 PRPHL HARDWARE INTLK

LAM 810-077366-001 PERIPHERAL I/O MOTHERBOARD

LAM 810-077383-001 LED BOARD INTERLOCK/EMO

LAM 810-077388-001 HOST CONTROL BD

LAM 810-077391-001 GAS INTLK PCB

LAM 810-077393-002 CHAMBER INTERFACE PCB

LAM 810-077394-001 MAGNET P/S INTERFACE

LAM 810-077434-001 CHILLER INTERFACE PCB

LAM 810-077498-002 PCB ASSY,PCB,COOLING,STATTION

LAM 810-07930-001 PCB, COMBO

LAM 810-092388-001 COMMUNICATION ADAPTER

LAM 810-10236R CUP, UNDERCOATER, ACT8

LAM 810-1314-1 PCB, DIGITAL I/O

LAM 810-1316-002 PCB, CPU 7803

LAM 810-17002-003 PCB, I/O BRKOUT ASSY

LAM 810-17008-001 PCB TEMP SENSE AMP, REV.E

LAM 810-17012 HEARTBEAT PCB

LAM 810-17012-002 PCB,HEARTBEAT

LAM 810-17013-001 PCB, GAP DRIVE CONTROL

LAM 810-17016-001 PCB STEPPER MOTOR DRIVE

LAM 810-17025-003 PCB, RF GEN CART BREAKOUT

LAM 810-190460-002 PCB

LAM 810-1984-001 PCB, DRIVER MATRIX-CRT

LAM 810-370182-001 ASSY PCB DTRBD, PWR SUPP

LAM 810-370845-002 Board;Inter Lock Board

LAM 810-490009-001 PCB BOARD

LAM 810-490656-001 ASSY, PCB ALLI PM BREAKOUT

LAM 810-492524-001 PCB, AI MUX 9100

LAM 810-495659-006 ASSY PCB PWR SPLY ESC BI

LAM 810-50523R RING, UPPER SHIELD

LAM 810-50525R SHIELD

LAM 810-50526R TWAS, GROUND SHIELD

LAM 810-50527R TWAS, RING, UPPER SHIELD

LAM 810-50535R DUMMY WAFER

LAM 810-50536R TWAS, GROUND SHIELD

LAM 810-52060R RING, UPPER SHIELD

LAM 810-53224R SHUTTER PLATE COVER

LAM 810-55126R GUARD RING, INSULATING

LAM 810-56254R UPPER SHILED, (LTS-300A)

LAM 810-56256R LOWER SHIELD

LAM 810-56257R PLATTER RING

LAM 810-56259R DUMMY WAFER

LAM 810-56626R DESPO, SHIELD

LAM 810-56627R BAFFLE PLATE

LAM 810-56902R LINER LOWER THROTTLE

LAM 810-57045R PIPING 80A SUS316-519336

LAM 810-810193-001 ASSY,PCB,MTHBD,VTM

LAM 811-02362R CERAMIC PUMPING INSERT

LAM 811-050200-001 BELL JAR

LAM 811-051014-001 RING, GAS TRENCH COVER

LAM 811-05564R OUTER SHIELD

LAM 811-05726R INSULATOR, RING

LAM 811-50247R RING, UPPER SHIELD

LAM 811-50272R INNER SHIELD

LAM 811-51059R DEPO SHIELD, CHAMBER A

LAM 826-033174-001 S/W, SERIES II/SYNERGY, V

LAM 833-001899-002 CA,ASSY GEN/TCP MTCH

LAM 833-003542-018 CA,COAX,RG214,HN90-HN90

LAM 833-802187-029 ASSY,CA,COAX,RF GEN/TCP MTCH,2

LAM 833-810197-005 ASSY,CA,AC RACK,RPDB,100FT

LAM 838-024486-100 MANIFOLD GAS DELIVERY

LAM 839-000869-001-F CONNECTOR, FOR GAS LINE

LAM 839-002195-001-D GAS LINE

LAM 839-002426-001-D GAS VALVE

LAM 839-002445-100 FLOW ASSY

LAM 839-005538-001-B GAS LINE

LAM 839-005904-001-C GAS VALVE

LAM 839-007547-001 WELDMENT, MNFLD, REACTION CHMBR

LAM 839-007823-001 GAS LINE

LAM 839-011021-001 WELDMENT GAS FEED TUBE UPPER

LAM 839-011023-001 WELDMENT FLANGE

LAM 839-011025-001 WELDMENT, MANO, ISO

LAM 839-011237-001 WELDMENT,LL

LAM 839-011516-001 WELDMENT GAS FEED LINE

LAM 839-011520-001 WELDMENT,GAS,FEEDLINE,FLEX

LAM 839-013259-001 WELDMENT PLATE MANIFOLD CHMBR

LAM 839-013259-001 WELDMENT PLATE MANIFOLD CHMBR