CI627A

CI627A

CI627A

CI627A

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6ES7193-6AR00-0AA0           2

6ES7193-6BP00-0BA0           2

6ES7193-6BP00-0DA0           2

6ES7390-1AE80-0AA0            1

6EP4437-7FB00-3CX0           1

6ES7522-1BF00-0AB0           1

6ES7924-0BD20-0BC0          1

231-5QF32-0XB0¼Æ¶q11

223-1PL32-0XB0¼Æ¶q28

231-5QD32-0XB0¼Æ¶q14

215-1HG40-0XB0¼Æ¶q14

140M-RC-AFA11       30       ­±»ù69

1606-XLS480E-3       3        ­±»ù4671

140UT-D7D2-B50      2        ­±»ù2187

140UT-D7D3-B30      2        ­±»ù3124

140UT-D7D3-C25      12       ­±»ù3124

140UT-D7D2-A50      2        ­±»ù2187

140U-D-WTE              7        ­±»ù110

140M-C-AFC              70       ­±»ù13.63

6GK5208-0BA10-2AA3 4--------------

6ES7517-3AP00-0AB0 2

6ES7954-8LL03-0AA0 2---------------

6SL3130-6AE21-0AB1 2

6SL3120-1TE13-0AD0 2

6SL3120-2TE13-0AD0 2

6SL3120-2TE21-0AD0 2

6SL3120-1TE21-0AD0 2

6SL3040-1MA01-0AA0 2

6SL3000-0HE21-0AA0 2

6SL3000-0CE21-0AA0 2

6AG4131-3GK22-1AA0 2

135-4GB01-0AB0  1

6GK5798-0SN00-0EA0  11---------------

6ES7531-7QF00-0AB0  46-------------

6ES7590-1BC00-0AA0 5--------------

6ES7516-3TN00-0AB0    1----------------

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2711P-T7C22D9P¼Æ¶q1­±»ù22283

3RW4055-6BB44          1--------------

RINT-5521C     6

2080-LC50-48QVB  ­±»ù5474

1783-ETAP      ­±»ù4041

IC695PSA040   

IC695ETM001   ¦U 1

ATV930D45N4       1

1756-IF16¼Æ¶q4­Ó¡A   19517

1756-OF8¼Æ¶q2­Ó¡A   25412

2711P-T15C22D9P¼Æ¶q1­Ó¡C  54032

ABBÅÜÀW¾¹/ACS550-01-045A-4-R3/°t­±ªOACS-CP-D    ¼Æ¶q1

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6FC5210-0DF21-2AA0 ¼Æ¶q1--------------

6SL3040-1NB00-0AA0   5---------------

6ES7531-7NF10-0AB0   2------------

6ES7513-1AL02-0AB0   1-----------

6ES7532-5HD00-0AB0   2------------

RDCU-02C/ACS 0320-3   2

RPBA-01   2

RDCO-03C   2

6FC5203-0AF22-0AA1   1--------------

6ES7137-6BD00-0BA0 2­Ó

PFXC141 (P/N:3BSE029997R1)/ABB   ¦U2­Ó

PFVO142¡]P/N:3BSE023732R1¡^/ABB   ¦U2­Ó

20-750-2262C-2R    1955      10­Ó

6GK5216-0BA00-2AB2     4-------------

TEL 1B05-200095-11 6" BAFFLE QZ

TEL 1B05-300046-12 SUB FLUME (8-A)

TEL 1B05-300047-12 SUB FLUME (8-B)

TEL 1B05-300048-12 SUB FLUME (8-C)

TEL 1B05-300049-12 SUB FLUME (8-D)

TEL 1B05-300071-11 PUNCHING PLATE(AP

TEL 1B05-400065-11 SENSOR GLASS

TEL 1B05-400078-11 QUARTZ PIPE(150)

TEL 1B81-001551-11 LS CN BOARD

TEL 1B81-010067-16 N2 SENSOR BOARD

TEL 1B81-010123-16 PCB BOARD

TEL 1B81-010267-13 P064 BOARD CIRCUIT

TEL 1B81-010273-14 C2H INTLK BOARD

TEL 1B86-030137-12 W/TRA DRV ZE CABLE 4

TEL 1B86-032474-13 INDEXER POSI SENS ASSY

TEL 1B86-032475-13 INDEXER SENS ASSY

TEL 1B86-032669-14 INDEXER CAR SENS(T) ASSY

TEL 1B86-032670-14 INDEXER CAR SENSASSY

TEL 1B86-032673-12 INDEXER POD LK SENS ASS

TEL 1B86-032674-12 INDEXER POD ULK SENS ASSY

TEL 1B86-032677-14 INDEXER CONN BRD CABLE

TEL 1B86-034056-17 INDEXER POD LK SENS ASSY-R

TEL 1B86-034057-17 INDEXER POD ULK SENS ASSY-R

TEL 1B86-035917-12 INDEXER POD CHECK RBT-CABLE

TEL 1B86-035918-12 INDEXER LATCH RBT-CABLE

TEL 1B87-512644-11 ASSY, SMIF TABLE

TEL 1D05-300040-13 RING,INSULATOR, C, (DRM2) QUARTZ

TEL 1D05-300052-11 RING INSULATOR A7

TEL 1D05-300053-14 RING.INSULATER B2(DRM2)

TEL 1D05-300185-13 RING INSULATER A7(HF1 0)(DRM2)

TEL 1D05-400022C14 WINDOW SHIELD DEPO (DRM2)

TEL 1D08-000321-11 BOARD TYB422-1

TEL 1D10-100075-14 BAFFLE PLATE LEVEL 5 (PC-3)

TEL 1D10-100327-13 PLATE

TEL 1D10-100582-14 ELECTRODE BOTTOM

TEL 1D10-100938-12 RF PLATE,PC1 (DRM2)

TEL 1D10-100938-12 RF PLATE,PC1 (DRM2)

TEL 1D10-101111-11 PLATE, RF, P2C, (DRM2)

TEL 1D10-101111-11 PLATE, RF, P2C, (DRM2)

TEL 1D10-101965-12 ELECTRODE BOTTOM, 8N-L2 (88DRM

TEL 1D10-102521-12 SHIELD DEPO UPPER-Y

TEL 1D10-200704-14 UPPER EL-BASE 1

TEL 1D10-200733-11 SHIELD RING (DRM2)

TEL 1D10-200734-14 COVER BELLOWS A

TEL 1D10-200921-12 DEPO, SEALD P1

TEL 1D10-200922-12 SHIELD, DEPO, P2

TEL 1D10-201429-15 UPPER,ELECTRODE R1

TEL 1D10-202177-12 UPPER ELECTRODE A-1 (DRM2)

TEL 1D10-301273-12 SHUTTER (LV-5)

TEL 1D10-302209-14 FOCUS RING

TEL 1D10-302791-12 RING, F-8J-SIC-260-3.4 (DRM2)

TEL 1D10-302869-11 PIN, BUSHER

TEL 1D10-303124-14 SHIELD DEPO 85-2(DRM2)

TEL 1D10-303124-16 SHIELD,DEPO 85-2

TEL 1D10-304010-11 RING,SHIELD B3

TEL 1D10-304010-12 RING..SHIELD,B3,(DRM2)

TEL 1D10-311758-11 RING, BELLOWS LOWER

TEL 1D10-312637-11 COVER BEL-L2 (C-ESC) (DRM2)

TEL 1D10-328005-11 COVER, PROTECT, ESC

TEL 1D10-401049-1 SCREW CAP PTFE (UNITY)

TEL 1D10-401722-11 COVER,BEL(DRM)

TEL 1D10-401952-11 PLATE STOPER PIN

TEL 1D10-403321-11 WINDOW SPACER M8

TEL 1D10-404153-11 EDGE PRESSURE CERAMIC SLEEVE

TEL 1D1O-312197-11 RING F-8SO-SIC (A+B)

TEL 1D80-000759-11 BURRERFLY VALVE

TEL 1D80-002363-12 GATE VALVE

TEL 1D80-002513-14 REMOTE CONTROL BOX

TEL 1D80-003507-21 AUTOMATIC MATCHING NETWORKMW2-30

TEL 1D80-003885-11 PCV..UPC-4JR-L124-C13S

TEL 1D80-004122-17 WMN-30F BOTTOM MATCHER OF  85 SCCM 2Mhz.

TEL 1D81-000120-1 PCB ASSY

TEL 1D81-000141-21 TYB41E-2 TMP BOARD

TEL 1D81-000303-18 PCB, TYP131-1/ILK

TEL 1D81-000304-31 BOARD  I/F PRESSURE SWITCH

TEL 1D86-000172-91 RF CABLE (P/C3)

TEL 1D86-003596-12 HEAT:PC:PC1 WALL RR ASSY

TEL 1D86-003620-13 TC

TEL 1D86-003781-13 ASSY, BTM

TEL 1D86-003946-14 CA: MAIN: PC1DCPWR (CABLE)

TEL 1D86-004229-13 CABLE,PC,PC2,BTM.PANEL

TEL 1D86-004358-13 TC, UNITY2

TEL 1D86-006871-41 CA:OUT:PC1:XINIX SCAN

TEL 1D86-006873-41 CA:OUT:PC1:XINIX DET1

TEL 1D87-000340-11 STD P/C2 CYLINDER

TEL 1IH0012710 MICRO PHOTO SENSOR

TEL 1JK0013000 OPTICAL FIBER CABLE

TEL 1M10-101054-12 6" ANODE

TEL 1M10-101054-12 6" ANODE

TEL 1M10-202045-13 ELECTRODE UPPER

TEL 1M10-303699-11 LIFTER PIN, TEFLON COATED

TEL 1M81-022067-11 CPU BORAD

TEL 1M87-000305-11 RECIPE MODULE VER.2

TEL 1N10-400438-1 SCREW CAP (M4)

TEL 1N10-401061-11 HOLDER CAP SCREW

TEL 1N10-401561-12 VACUUM SCREW M6X25(AL)

TEL 1N10-401834-11 GAS INLET

TEL 1N10-402078-11 VACUUM SCREW M6X16

TEL 1N10-402079-11 AL SCREW M4X8

TEL 1N10-402337-11 LOCATING PIN

TEL 1N10-402384-11 SCREW CAP M5 (2) (PTFE)

TEL 1N10-402385-11 SCREW CAP M6 (2) (PTFE)

TEL 1N10-402473-11 DEPO SHIELD (ES)

TEL 1N10-403168-12 PORT SLEEVE (2-7)

TEL 1N86-431263-11 MOTOR ASSY,SDR STG-X(SD14)

TEL 1PS0005000 POWER SUPPLY EPD-

TEL 1PS0016500 POWER SUPPLY (ET-5B)

TEL 1PS0019890 MFC POWER SUPPLY

TEL 1PS0031810 POWER SUPPLY(SD-21A),FOR(BE-727)

TEL 1SU0004000 LMT SWITCH

TEL 1V10-361804-11 CERAMIC BLOCK

TEL 1V10-361804-12 NTF FARADAY INSULATOR

TEL 1V10-463635-1 XP LINER CAP SCREW(M4*65.8)

TEL 1V86-346055-11 CA. ASSY WIDE BIAS F/THRU

TEL 2-140V747-75 O-RING,027-100165-1

TEL 2-AJ-80179-1 SPIN CUP (LOWERASSY,200mm)

TEL 2-FI-30946 SPIN CUP LOWER

TEL 20-000012 SCREW CAP M3X12 SUS304

TEL 20-0550 THERMOCOUPLE GAUGE TUBE

TEL 20-0550 ANE TC GAUGE TUBE 20-0550 ANE

TEL 20033101 UNITY LOADLOCK DOOR

TEL 200998 CHAIN DRIVE BELT

TEL 201HS-D2 HIGH PRESSURE LAMP

TEL 2024-003015-1 SPEED CONTROLLER, AS2201F-01-04

TEL 2040-000228-1 MOTOR DRIVER, AK-BK551C

TEL 204090 QUARTZ MOUNTING PLATE

TEL 2102-420430-11 BEARING

TEL 2105-120178-11 TUBE, PROCESS, A858

TEL 2105-120548-51 QUARTZ, FIN PEDESTAL

TEL 2105-220154-11 BASE,PEDESTAL GATE

TEL 2105-220155-11 COVER,PEDESTAL GATE

TEL 2105-220834-11 QUARTZ RING

TEL 2105-320040-13 COVER,PEDESTAL GATE

TEL 2105-320185-11 QUARTZ, BASE 12

TEL 2105-420062-11 GATE,QUARTZ,POSITIONING

TEL 2105-420384-31 QUARTZ INJECTOR

TEL 2105-420416-51 QUARTZ INJECTOR

TEL 211-462431-11 CABLE CLAMP

TEL 2110-223783-11 HEAT INSULATOR (1)

TEL 2110-223784-11 HEAT INSULATOR (2)

TEL 2110-324792-12 FLEX, TUBE (N2)

TEL 2110-325280-12 ASSY, TUBE, FLEX. 1/4"

TEL 2110-330148-11 SPACER,TEFLON

TEL 2110-332335-11 FLANGE, WATER COOLING (UNDER)

TEL 2110-338369-11 STRAIGHT PIPE FROM ELBOW TEL FURN

TEL 2110-339633-11 PANEL HEATER

TEL 2110-339634-11 PANEL HEATER

TEL 2110-348521-12 PANEL HEATER.FZ-41 1/4"V WITH FUSE

TEL 2110-348937-12 PANEL HEATER.FZ-41 1/4"V WITH FUSE

TEL 2110-421831-12 LABYRINTH SEAL,INNER

TEL 2110-430534-11 COLOR (1)..PTFE

TEL 2110-430535-11 COLOR (2)..PTFE

TEL 2110-430536-11 COLOR (3)..PTFE

TEL 2110-462324-11 TAPE¡@HEATER

TEL 2181-020009-13 PCB ASSY STC-C

TEL 2181-020010-13 PCB ASSY STC-P

TEL 2181-020014-13 PCB ASSY F/C-DSP

TEL 2181-020016-11 PCB ASSY SNS B

TEL 2181-020017-11 PCB ASSY

TEL 2181-020023-13 PCB ASSY ALM-ST1

TEL 2181-020025-11 PCB ASSY SNS I/L

TEL 2181-020026-13 PCB ASSY MT-I/L

TEL 2181-020033-11 PCB ASSY MECH-I/L

TEL 2181-020036-11 PCB ASSY OPDD;IW

TEL 2181-020039-11 PCB ASSY SNS B-2

TEL 2181-020041-1B PCB ASSY, MC-31050P-I

TEL 2181-020056-1C PCB, GAS, FIRMWARE, I/L

TEL 2181-020057-13 PCB, PWR SUPPL CONT GAS DETECTOR

TEL 2185-024028-15 ASSY,FLEX,1/4 MARKING S (PACK OF 2)

TEL 2185-027393-11 ASSY,MANIFOLD UNIT,R

TEL 2185-027981-11 MANIFOLD UNIT SIN

TEL 2185-033510-16 ASSY, INNER TUBE TRAP

TEL 2185-033652-11 COLD TRAP BODY RWK

TEL 2187-108750-11 MANIFOLD, 8S-R-AO-W-I-1

TEL 2187-108751-11 MANIFOLD, 8SN-R-A6-W-I-1

TEL 2187-108961-11 MANIFOLD

TEL 2187-150087-11 CERAMIC CLAMP

TEL 22110-324790-12 ASSY, TUBE, FLEX. 1/4"