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6SL3055-0AA00-6AA0    4­Ó 

6ES7517-3TP00-0AB0    1­Ó-----------

6GK5204-2BC10-2AA3    1  

6EP3322-6SB10-0AY0    1

6EP1333-1LD00     370­Ó

6SL3244-0BB12-1FA0      30

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6EP1437-3BA10     1

1769-IQ32T     4835   2

215-1AF40-0XB0     2

CSNK500M-600  1

3BSC630149R0001   1

PXUB201

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223-1PM22-0XA0   1----------

223-1PL22-0XA0   1---------

221-1BH22-0XA0   1---------

231-0HF22-0XA0   4----------

231-0HC22-0XA0   2-----------

214-1AD23-0XB8   2---------

216-2AD23-0XB8   2----------

216-2BD23-0XB0   2----------

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A5E02822120¼Æ¶q1

LAM 853-017152-003 PANEL

LAM 853-017163-001 BOX, RF, SWITCH

LAM 853-017163-001 BOX, RF, SWITCH

LAM 853-017163-101 ASSY, RF,SWITCHBOX,TWO,PLUG

LAM 853-017163-101 ASSY, RF,SWITCHBOX,TWO,PLUG

LAM 853-017163R001 RFRB ASSY RF SWITCH BOX

LAM 853-017340-001 ASM RESISTOR PACK

LAM 853-017340-202 ASSY RESISTOR HEAT SINK

LAM 853-017366-001 GAP IF CABLE

LAM 853-017370-001 ASSY GAP DRIVE P.S.

LAM 853-017370-007 ASSY, PWR, SPLY, GAP, DR

LAM 853-017400-001 ASSY, LOW FREQ. MATCH-TRANS.

LAM 853-017410-001 CABLE LOWER RF MATCH N/C

LAM 853-017411-002 HARN,ASSY,RF,GAP,CONTROL

LAM 853-017411-002 HARN,ASSY,RF,GAP,CONTROL

LAM 853-017415-001 CABLE;UPPER RF MATCH D-S

LAM 853-017415-001 CABLE;UPPER RF MATCH D-S

LAM 853-017417-001 CABLE, HARNESS

LAM 853-017423-005 CABLE ASSY COAX RFMATCH UPR 8FT

LAM 853-017435-001 PCB 4-PIN LIFTER FILTER

LAM 853-017435-001 PCB 4-PIN LIFTER FILTER

LAM 853-017478-001 ASSY, PRESSURE,SW10,PSIG

LAM 853-017478-001 ASSY, PRESSURE,SW10,PSIG

LAM 853-017480-002 ASSY,VACUUM SWITCH 100 TORR

LAM 853-017480-002 ASSY,VACUUM SWITCH 100 TORR

LAM 853-017505-001 POWERSUPPLY,ASSY,CRT

LAM 853-017515-001 ASSY  CBL  FLOPPY DC PWR INTFC

LAM 853-017620-001 TRI-CONVECTRON INTERFACE

LAM 853-017631-001 ASSY VAC. SWITCH 724

LAM 853-017631-002 SWITCH, 724 TORR, CHAMBER

LAM 853-017631-002 SWITCH, 724 TORR, CHAMBER

LAM 853-017633-003 ASSY, OPT.SENSOR

LAM 853-017633-005 ASSY,OPT,SENSOR

LAM 853-017633-009 ASSY SENSOR OPTICAL,HOME,GAP

LAM 853-017634-101 ASSY SOLENOID RELEASE

LAM 853-017636-002 SWITCH VACUUM W/ASSY

LAM 853-017637-001 ASSEMBLY MOTOR STEPPER

LAM 853-017643-001 MANOMETER, 0-10 TORR

LAM 853-017643-001 MANOMETER, 0-10 TORR

LAM 853-017643-011 ASSY,MANOMETER,OXE

LAM 853-017643R-001 MANOMETER 10TORR

LAM 853-017645-001 ELEVATOR

LAM 853-017649-001 LIFT ASSY

LAM 853-017653-001 MANOMETER, 4520 ASSEMBLY

LAM 853-017655-001 ASSY SOL. INNER DOOR RELEASE

LAM 853-017805-025 CABLE ASSY

LAM 853-017805-055 CABLE, RF,GEN,55FT.

LAM 853-017805-085 CABLE, WEB 627 RF95

LAM 853-017807-001 ASSY, CA, INTRCONN, COAX, LWR

LAM 853-017816-020 ASSY POWER CORD GENERATOR CA

LAM 853-017817-040 ASSY, CA, EMO AC CONT BOX 40 FT

LAM 853-017817-060 CABLE ASSY

LAM 853-017818-020 ASSY,CABLE

LAM 853-017818-020 ASSY,CABLE

LAM 853-017818-040 CABLE ASSY PUMP CART EMO

LAM 853-017824-060 CABLE,TCU EMO

LAM 853-017932-001 STEPPER MOTOR CABLE

LAM 853-017933-002 CABLE-ARM DRIVE STEPPER MOTOR

LAM 853-017936-002 ASSY CABLE RF MATCH

LAM 853-017936-003 CABLE-RIBBON

LAM 853-017941-001 ASSY CABLE ENT LL #1 SIGNAL

LAM 853-017941-001 ASSY CABLE ENT LL #1 SIGNAL

LAM 853-017946-004 INTERCONNECT CABLE

LAM 853-017947-001 CABLE ASSY

LAM 853-017953-050 ASSY, CBL PUMP IFACE

LAM 853-017955-001 CABLE CONNECTOR

LAM 853-017961-060 CABLE DET OPER INTF.

LAM 853-017962-050 CABLE TCU CHANNEL INTC 50 FT

LAM 853-01983-005 DUAL ENDPOINT DETECTOR

LAM 853-021039-001 ASSY HARN HTR CRTG 75W 4620

LAM 853-021256-001 LIFTER, 4", OXE

LAM 853-021260-001 WIRE ASSY W/ TUBE

LAM 853-021614-001 ASSY, CABLE, HEATER AC PWR

LAM 853-021628-001 ASSY, THERMOCOUPLE, J-TYPE

LAM 853-021648-001 ASSY VALVE THROTTLE HEATED VAC MANIFOLD ISO-E

LAM 853-021664-001 ASSY HEATER BELLOWS

LAM 853-022272-001 CA,AC,HEATER

LAM 853-023163-700 CA,SIG,GEN,FLOW,SW,EXTENTION

LAM 853-023537-001 CABLE,ASSY

LAM 853-023631-035 CABLE ASSY

LAM 853-025054-004 ASSY, HSG, ESC PWR SPLY

LAM 853-025944-001 RF, SENSE BOX, AUTOTUNE

LAM 853-025952-002 RF SENSE BOX

LAM 853-027429-001 ASSY LIMIT SWITCH LIFTER DOWN

LAM 853-028525-001 ASSY,TEMP,SENSOR,BOT,OXE

LAM 853-028695-002 HARNESS ASSY DSQ VALVE OPEN J6

LAM 853-029462-001 EXITLOAD, LOCK WAFER SEN

LAM 853-029462-002 WAFER SENSOR EXIT/LOADLOCK

LAM 853-029481-001 ASSY CABLE BAR CODE SCANNER

LAM 853-031498-001 HEATER-CARTRIDGE ASSY 100W

LAM 853-031499-001 CARTRIDGE-HEATER ASSY 150W

LAM 853-031685-001 MATCH ASSY , MAIN TCP

LAM 853-032018-005 UPR MATCH BOX ASSY

LAM 853-032040-028 CABLE ASSY

LAM 853-0322903-001 HEATED ELBOW

LAM 853-0324296-001 ASSY, CA, COAX, RF

LAM 853-034109-002 ASSY HARNESSS APADTER UPPER CHAMBER

LAM 853-034112-002 ASSY,CABLE,TC,JTYPE,THERMOCOUPLE,ANAFAZE

LAM 853-034112-003 TC, GAP HEATER,THERMOCOUPLE,ANAFAZE

LAM 853-034120-001 CABLE ASSY

LAM 853-034120-002 CABLE ASSY DSUB FLTRD F/G

LAM 853-034120-002 CABLE ASSY DSUB FLTRD F/G

LAM 853-034126-001 ASSY,CA,37 PIN,ADIO,TCP AUTOTN

LAM 853-034126-103 ASSY, CA, 37 PIN, ADIO, TCP AUTOTN

LAM 853-034160-001 CONTROLLER, VDS

LAM 853-034175-080 ASSY, CA, TCU EMO/RMT ENBL, 80FT

LAM 853-034175-080 ASSY, CA, TCU EMO/RMT ENBL, 80FT

LAM 853-034254-050 ASSY,CA,TCU INTFC

LAM 853-034254-060 ASSY,CA,TCU INTFC,60FT

LAM 853-034356-001 HARNESS ASSY AC GAP BARREL HTR

LAM 853-034428-001 ASSY,HARNESS,PRI HTD WDO

LAM 853-034431-001 ASSY,HARN,SEC HTD WDO,9600

LAM 853-034442-001 ASSY,CA,ADIO

LAM 853-034455-001 ASSY,CA,RS232 INTFC,VDS

LAM 853-034469-001 ASSY,CA,RBN,MFC EXT,WVDS

LAM 853-034471-002 ASSY, HARN, ADPTR, LFTR SNSR SIG

LAM 853-034472-001 ASSY HARNESS ADAPTOR LIFTER

LAM 853-034475-001 ASSY,HARN,PT VLV,WDS

LAM 853-034479-001 ASSY CABLE STPR MOT ARM DR ENTRLL

LAM 853-034542-080 ASSY CA PMP EMO 80FT

LAM 853-034702-001 ASSY, CABLE, TC PROBE J-TYPE

LAM 853-06908-004 ASSY,GND STRAP,BRD,4.38 (PACK OF 10)

LAM 853-072129-200 WAFER, AL-PLO SAPPHIRE 200MM

LAM 853-072156-001 ASSY, ESC, HIGH TEMP,200MM

LAM 853-080254-001 ASSY, WFR ARM, 200MM, ASIQ, 384T

LAM 853-090301-001 CABLE, AIRLOCK HARNESS ENTRANCE

LAM 853-090301-002 CABLE, AIRLOCK HARNESS EXIT

LAM 853-090532-001 SWITCH ROLLER WIRE HARNESS 490 N/C

LAM 853-092148-001 ASSY, MOTOR STEPPER

LAM 853-092664-001 ASSY, SENSOR WAFER A/EX1

LAM 853-110112-020 TCU POWER CABLE 3 PHASE ALR

LAM 853-110629-001 CABLE ASSY

LAM 853-11076-001 ASSY, GROUND, STRAP

LAM 853-140051-001 LIFTER ASSY

LAM 853-140051-002 LIFTER ASSY

LAM 853-140218-001 RF MATCH

LAM 853-140218-003 UPPER,MATCH

LAM 853-15183-001 RF MATCH ADAPTOR ASSEMBLY FOR LOWER

LAM 853-15982-1 AUTOTUNE BOX

LAM 853-160195-002 ASSY, WFR SNSR, MICROWAVE

LAM 853-170245-001 ASSY PLASMA ARSR HE BCKSDE

LAM 853-17480-001 SWITCH ,75TORR

LAM 853-17480-002 SWITCH, 75 TORR

LAM 853-17480-002 SWITCH, 75 TORR

LAM 853-17625-001 REPUBLIC CABLE

LAM 853-17643-001-C MANOMETER 10 TORR MODEL #CMLA-11S02

LAM 853-17649-1 REPUBLIC CABLE

LAM 853-180033-003 MANIFOLD CHAMBER ROUGHING WELDMENT HEATED

LAM 853-190074-001 HARNESS ASSY HE BKSIDE VALVE CONTROL

LAM 853-190140-001 CABLE ASSY STEPPER MOTOR ARM DRIVE

LAM 853-190203-010 ASSY,CA,PWR,WMNT,ENV

LAM 853-190260-002 CABLE ASSY, STPR MTR EXIT LL

LAM 853-190313-002 ASSY, HARN, HI-VOLT, ESC, OXD

LAM 853-190466-001 ASSY CAVMEBUSRPTR

LAM 853-190468-001 VIDEO EXTENSION CABLE

LAM 853-190478-001 SENSOR;WAFER SLIDE OUT

LAM 853-190478-002 SENSOR;WAFER SLIDE OUT

LAM 853-210414-002 ASSY,TOP PLATE FAN HSG 960

LAM 853-210414-002 ASSY,TOP PLATE FAN HSG 960

LAM 853-210621-306 COUPLING RING

LAM 853-220116-001 ASS'Y AUTO LOADER LI

LAM 853-220145-001 ARM END EFFECTOR AUTOLOAD ER

LAM 853-222317-001 INTERFACE RIBBON CABLE

LAM 853-250445-001 ASSEMBLY, PLASMA STARTER

LAM 853-250982-001 ASSEMBLY RELAY UPPER ELECTRODE GROUNDING

LAM 853-27429-001 LIFTER SENSOR

LAM 853-320014-002 ASSY,RAIL WFR XPRTSHTL

LAM 853-320030-002 ASSY OPT SNSR DARL W/LEADS

LAM 853-320030-003 ASSY OPT SNSR DARL W/LEADS

LAM 853-320030-007 ASSY, OPT SNSR, DARL W/LEADS

LAM 853-330315-001 ASSY HARNESS 24V B/O UPR MTCH

LAM 853-330316-032 HTR CRTG ASSY 100W

LAM 853-330358-001 CABLE ASSY EXTN 2POS WIRE

LAM 853-330360-001 CABLE ASSY EXTENTION 2 POS WIRE

LAM 853-330401-001 HEATER HARNESS BRANCH ASSY

LAM 853-330416-004 CABLE ASSY #8 RING LUG FXDGP

LAM 853-330422-001 HARNESS ASSY ADAPTER 24V

LAM 853-330540-081 ASSY ELECTRODE LWR ESC, 8", MJR FL

LAM 853-330689-001 LOWER MATCH ASSY

LAM 853-350012-001 ASSY,CHAMBER BLST,HTD

LAM 853-350023-001 HARNESS ASSY MANF DAISY-CH 4-1

LAM 853-360242-001 CABLE,ASSY

LAM 853-360242-002 CABLE,ASSY

LAM 853-370028-001 ASSY,CABLE HARNESS

LAM 853-370412-001 ASSY, SENSOR, LEAK

LAM 853-370431-001 ASSY DI FLOW SWITCH

LAM 853-370670-001 ASSY,CA,ADIO,INTFC,9600

LAM 853-370670-002 ASSY,CA,ADIO,INTFC,9600

LAM 853-370670-003 ASSY,CA,ADIO INTFC 9600

LAM 853-370681-001 ASSY,CABLE FAN ISOLATION,DSQ

LAM 853-370701-001 CABLE, HEATER ESC

LAM 853-370775-002 CONTROLLER AND CABLE

LAM 853-385893-001 KIT ASSY VALVE HTR WVDS 6W

LAM 853-385894-001 POWER CABLE

LAM 853-412484-001 ASSY, LID LIFT, ALLI 6

LAM 853-4197-001 ASSY VALVE DELAY

LAM 853-441672-004 ASSY,HARN,INTLK,GAS BOX

LAM 853-442037-001 ASSY,CA,INTLK,MDLR,GASBOX

LAM 853-443014-112 ASSY, FR/CA, PM, 4520XL A6, CE

LAM 853-470345-101 ASSY,MNL V,1/4 TURN HDL,10RA

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