LD5-LB130

LD5-LB130

LD5-LB130

LD5-LB130

¸Ó³n¥ó¨ã¦³¦p¤U¤@¨Ç¯SÂI¡G

(1)¦hºØ³q«H¥\¯à¡Cµµª÷¾ô²ÕºA³n¥ó[3]¤ä«ù¦p¤U³q«H¥\¯à¡G

1)¤ä«ùRS232¡BRS422¡BRS485µ¥¦ê¤f³q«H¤è¦¡¡A¨Ã¤ä«ùµL½u¹q»O¡B¹q¸Ü¼·¸¹¡B¹q¸Ü½ü¸ß¼·¸¹µ¥¤è¦¡¡C

2)¥H¤Óºô³q«H¦P®É¤ä«ù¦³½u¥H¤Óºô©MµL½u¥H¤Óºô¡C

3)©Ò¦³³]³ÆªºÅX°Êµ{§Ç§¡¤ä«ùGPRS¡BCDMA¡BGSMµ¥²¾°Êºôµ¸¼Ð·Ç¡C

(2)¤è«Kªº¶}µo«Y²Î¡CÂ×´Iªº²Õ¥ó©M±±¥óºc¦¨±j¤jªºHMI¶}µo«Y²Î;¼W±jªº¹L´ç¦â»Pº¥¶i¦â¥\¯à¡A±q®Ú¥»¤W¸Ñ¨M¤F«Ü¦h¦PÃþ³n¥ó¦b¹L¦h¨Ï¥Î¹L´ç¦â¡Bº¥¶i¦â®ÉÄY­«¼vÅTµe­±¨ê·s³t«×©M«Y²Î¹B¦æ®Ä²vªº°ÝÃD;§ó¥[ÆF¬¡¦h¼Ëªº¥Ú¶q¤l¹Ï¡A¨Ï±o¨î§@¤uµ{µe­±§ó§Ö±¶;´£¨Ñ­±¦V¹ï¶H½sµ{¤è¦¡¡A¤º¸m¶¡±µÅܶq¡B¤¤¶¡Åܶq¡B¼Æ¾Ú®wÅܶq¡A¤ä«ù¦Û©w¸q¨ç¼Æ©M¦Û©w¸qµæ³æ¡C

(3)¶}©ñ©Ê¡Cµµª÷¾ô²ÕºA³n¥óªº¶}©ñ©Êªí²{¦b¦p¤U´X­Ó¤è­±¡G

1)¤ä«ùExcel¥HVBAªº¤è¦¡³X°Ý¼Æ¾Ú®w¡C

2)³n¥ó¬°¶}©ñ¦¡Åé«Yµ²ºc¡A¤ä«ùDDE¡AOPC¡AODBC/SQL¡AAcTIveX¡ADNA¼Ð·Ç¡C¥HOLE¡ACOM/DCOM¡B°ÊºAÃì±µ®wµ¥¦hºØ§Î¦¡´£¨Ñ¥~³¡³X°Ý±µ¤f¡A«K©ó¥Î¤á§Q¥Î±`¥Î¶}µo¤u¨ã(¦p¡GVC++¡BVBµ¥)¶i¦æ²`¼hªº¤G¦¸¶}µo¡C

3)µµª÷¾ô²ÕºA³n¥óI/OÅX°Êµ{§ÇªºÅé«Yµ²ºc¬°¶}©ñ¦¡µ²ºc¡A¨ä±µ¤f³¡¤À·½¥N½X¤½¶}¡A¥Î¤á¥i¥H¦Û¦æ¶}µo·sªºÅX°Êµ{§Ç¡C

(4)¼Æ¾Ú®w¥\¯à.µµª÷¾ô²ÕºA³n¥ó¤º¸m¤F¹ê®É¼Æ¾Ú®w¡A¦Ó¥B¹ê®É¼Æ¾Ú®w¤S¤º¸m¦hºØ¥\¯à¶ô¡A¨Ó§¹¦¨¼Æ¾Ú³B²z»P¦sÀx¡A¥i¹ê²{²Ö­p¡B²Î­p¡B±±¨î¡B½u§Î¤Æµ¥¦hºØ¥\¯à¡C

LBR3040   3

LBR3080   2

6ES7792-0AA00-0XA0   1­Ó

6SL3210-5BE31-8UV0    1»O

6ES7954-8LT03-0AA0      1­Ó------------

6ES7516-3AN01-0AB0       1­Ó-----------

6SL3055-0AA00-6AA0    4­Ó 

6ES7517-3TP00-0AB0    1­Ó-----------

6GK5204-2BC10-2AA3    1  

6EP3322-6SB10-0AY0    1

6EP1333-1LD00     370­Ó

6SL3244-0BB12-1FA0      30

IC200ALG260 ¼Æ¶q1

1747-L553¼Æ¶q1  91352----------

64703714B¼Æ¶q9

68602203¼Æ¶q3

64691929¼Æ¶q3

DSMB-01C---------------

64630199¼Æ¶q3

DSAB-01C---------

64637029¼Æ¶q3

DSCB-01C----------

64666606¼Æ¶q3

DSMB-02C---------------

64697811¼Æ¶q6

58926451¼Æ¶q3

NRED-16E

64522787¼Æ¶q9

VHP-6 3X8K

6EP1935-6ME21    1

6EP1437-3BA10     1

1769-IQ32T     4835   2

215-1AF40-0XB0     2

CSNK500M-600  1

3BSC630149R0001   1

PXUB201

090-0XX85-1DA0    2-----------

223-1PM22-0XA0   1----------

223-1PL22-0XA0   1---------

221-1BH22-0XA0   1---------

231-0HF22-0XA0   4----------

231-0HC22-0XA0   2-----------

214-1AD23-0XB8   2---------

216-2AD23-0XB8   2----------

216-2BD23-0XB0   2----------

6EP1961-2BA21   5

6EP1234-1AA00  1

XPS-AF    2­Ó

6SL3040-1NB00-0AA0  1

A5E02822120¼Æ¶q1

TEL ES027-101004-1 O-RING

TEL ES027-101005-1 O-RING

TEL ES027-101034-1 O-RING

TEL ES027-101039-1 O-RING

TEL ES027-101123-1 O-RING

TEL ES027-101147-1 TIMING BELT

TEL ES027-101301-1 O-RING VITON AS568A-220 BLK (P/C BOT.)

TEL ES027-101363-1 ES027-101363-1 X-RING VITON R-45 BLACK

TEL ES027-102114-1 O-RING FLUOROSILICAN 1255-70

TEL ES027-102178-1 O-RING FROLO SILICON E0470 AS568-220 BLUE

TEL ES027-102247-1 O-RING VITON AS568-388

TEL ES028-001986-1 FITTING TUBE PL4-01M

TEL ES028-002147-1 FITTING TUBE F900-F-12.7

TEL ES028-002228-1 FITTING TUBE F900-HP-12.7D

TEL ES028-002242-1 FITTING, TUBE, F900-JP-19.05

TEL ES028-002246-1 FITTING TUBE F900-L-12.7

TEL ES028-002414-1 FITTING PART UJR-6.35G-NI GAS

TEL ES028-002415-1 FITTING PART UJR-6.35G-NI-O GAS

TEL ES028-002495-1 FITTING FLANGE 170-316 NW10/16

TEL ES028-002542-1 FITTING VACUUM NI-8-VCR-2

TEL ES028-006925-1 FLANGE

TEL ES028-008737-1 ASSY SEAL NW160

TEL ES028-009116-1 FITTING FLANGED 100760520 NW25

TEL ES028-010050-1 GASKET (SS-12-VCR-2) (PACK OF 10)

TEL ES028-010314-1 FITTING PART UJR-9.52RE-RG-O GASKET

TEL ES030-022073-1 CONNECTOR COAX BNC-BA-JJ-HV

TEL ES030-999083-1 CONNECTOR COAX BNC-P-HV

TEL ES031-002469-1 SWITCH MAGNETIC, BMKT107102

TEL ES036-002147-1 SENSOR,PRESS,CE10-SO2-VCR

TEL ES036-003298-1 SENSOR PRESSURE CMLH-11-100SO

TEL ES036-003364-1 SENSOR, PRESSURE, 627A-13615 (BARATRON)

TEL ES036-003516-1 PRESSURE SENSOR PT PSB 10-1-4M CABLE

TEL ES036-003570-1 FLOW SWITCH

TEL ES036-100476-1 WATER LEAK DETECTOR S-1F (1M)

TEL ES039-000018-1 PCB DC: RAX12-8RS (ATM PS BOX)

TEL ES039-126638-1 PCB DC:RM12-6R3GB(ATM PS BOX)

TEL ES042-000229-1 LENS, EPD

TEL ES043-000721 HEATER

TEL ES043-000723-1 HEATER JACKET SILICON RBR 20 *  670/580HM

TEL ES043-000724-1 HEATER JACKET SILICIN RBR 20 * 900/60.1 OHM

TEL ES043-000726-1 HEATER JACKET SILICON RBR

TEL ES043-000727-1 HEATER SILICONE RUBBER

TEL ES043-000728-1 BELLOWS HEATER

TEL ES043-000730-1 HEATER JACKET SILICON RBR

TEL ES043-000731-1 HEATER JACKET SILICON RBR

TEL ES046-000226-1 LAMP SLP129 E12

TEL ES046-000316-1 LAMP LMH-7FJ AC220V WHITE

TEL ES046-162396-1 LAMP LMH-162K W AC220V

TEL ES046-700394-1 LAMP LMH-7FJ AC110V GREEN

TEL ES046-700395-1 ALMP LMH-7FJ AC220V GREEN

TEL ES047-001162-1 TUBE SPIRAL NI-06 SHIELD

TEL ES050-001798-1 HARD DISK DRIVE

TEL ES070-000047-1 TOOL 6LTDK SCREW DRIVER TORQUE

TEL ES071-000319-1 SILICON HEATER JACKET GLUE (8401 PUMP STACKS)

TEL ES071-001250-1 SHEET,CONDUCTIVE..10-04-17 1500MM

TEL ES1805-220098-11 SHIELD RING, POLISHED. T7L5

TEL ES1805-320125-21 COVER RING INNER

TEL ES1805-320126-21 COVER RING OUTER

TEL ES1805-320127-21 BASE RING INTEGRATED(SCCM-OX)

TEL ES1805-420055-11 PLATE WINDOW EPD(LLD-SE)

TEL ES1810-120660-13 UEL BODY (UNITY85PE)

TEL ES1810-121002-15 SPACER CERAMIC

TEL ES1810-121085-17 DEPO SHIELD

TEL ES1810-121190-12 ESC LOWER ELECTRODE 8N (PB-UP)

TEL ES1810-121898-13 SHIELD DEPO LOWER-Y

TEL ES1810-121899-12 PLATE EXHAUST T6 EXH-Y

TEL ES1810-220986-14 INSULATING PIPE (8K-ESC)

TEL ES1810-221024-14 UPPER COOLING PLATE

TEL ES1810-221063-14 EXHAUST RING B(8K-ESC)

TEL ES1810-221470-24 UPPER ELECTRODE (8K-180)

TEL ES1810-222811-11 INSULATOR UPPER

TEL ES1810-223289-13 SLIT EXT PLATE W1. 6P3.1 (GROUND)

TEL ES1810-223352-11 COVER WALL CHAMBER BOTTOM (GND)

TEL ES1810-223352-11 COVER WALL CHAMBER BOTTOM (GND)

TEL ES1810-224511C11 FOCUS RING 8-NW-2(8K-ESC)

TEL ES1810-225123-11 FOCUS RING

TEL ES1810-322044-11 CENTERING W/MESH (4")

TEL ES1810-322129-12 EXN RING A (8K-ESC)

TEL ES1810-323416-11 RING LABYRINTH(IPB)

TEL ES1810-323442-11 O-RING SHIELD A (IPB)(P/CGAP)

TEL ES1810-323444-11 O-RING SHIELD B (IPB) (P/C GAP)

TEL ES1810-323445-11 O-RING SHIELD B (IPB) (P/C GAP)

TEL ES1810-323465-11 HOLDER CERAMIC IEM B

TEL ES1810-323466 -11 HOLDER CERAMIC IEM C

TEL ES1810-323467-13 RF ROD(IPB)

TEL ES1810-323759-13 LIFTER X (8KI-ESC)

TEL ES1810-323760-12 LIFTER GUIDE (8KI-ESC)

TEL ES1810-323783-11 RF CONNECTOR A2 (IPB)

TEL ES1810-323897-11 RING PROTECT

TEL ES1810-324233-12 HOLDER ISOLATION GND ROD

TEL ES1810-324276-12 PIN LIFTER

TEL ES1810-324964-1 BELLOWS COVER

TEL ES1810-325059-11 PIN LIFTER ALUMINIUM

TEL ES1810-326611-11 WINDOW PLATE

TEL ES1810-327364-11 PTFE HOLDER

TEL ES1810-328005-11 COVER,PROTECT,ESC

TEL ES1810-328123-11 BELLOWS LIFTER

TEL ES1810-329064-12 WINDOW, AL-3-Y -

TEL ES1810-329078-11 COVER, SCREW A-AL-Y

TEL ES1810-329079-11 COVER, SCREW B - AL

TEL ES1810-424823-12 FEED TERMINAL

TEL ES1810-424835-12 SPRING B(ESC-3)

TEL ES1810-424945-16 SUPPORT GUIDE (8K-ESC)

TEL ES1810-424947-12 LIFTER SUPPORT (8K-ESC)

TEL ES1810-424955-11 RF ROD

TEL ES1810-425089-11 LIFTER STOPPER A (8K-ESC)

TEL ES1810-426215-11 TEFLON CAP B

TEL ES1810-426886-11 SCREW LIFTER (8KI-ESC)

TEL ES1810-426982-12 TEFLON RING

TEL ES1810-427260-11 CAP

TEL ES1810-427469-11 SCREW BLANK

TEL ES1810-427566-12 RF CONNECTOR B2 (IPB)

TEL ES1810-427841-12 LEVER

TEL ES1810-427842-12 STOPPER

TEL ES1810-427859-12 RF BLOCK TYPE B

TEL ES1810-427905-11 BLIND RF BLOCK(INSULATOR)

TEL ES1810-428050-11 FITTING INLET GAS B

TEL ES1810-428121-11 CREW BLANK

TEL ES1810-428129-11 SHIELD WINDOW

TEL ES1810-428233-12 BAFFLE MTG SCREW M3 X 12 AH-V50

TEL ES1810-428245-12 BAFFLE MTG SCREW M3X5 AH-V50

TEL ES1810-428336-11 TERMINAL, HIGH VOLTAGE

TEL ES1810-428520-12 PIN BOTTOM ELECTRODE SIDE WALL (0.5DIA)

TEL ES1810-428715-12 CAP ALUMINIUM 2

TEL ES1810-428806-11 UV CUT FILM (VIEW PORT)

TEL ES1810-428943-11 SUPPORT LIFTER 4 (IPB)

TEL ES1810-429126-11 GAS LINE P/C-2-UP (IPU)

TEL ES1810-429138-11 H CONNECTION TUNE (UP)(IPB)

TEL ES1810-429291-11 PIPE GAS HE

TEL ES1810-429649-11 PUSHER LIFTER (PTFE) 3

TEL ES1810-429707-12 UPPER ARM WIRE 180316 NYLON

TEL ES1810-429708-11 WIRE FOR ROBOT ARM

TEL ES1810-429709-11 WIRE FOR ROBOT ARM

TEL ES1810-430038-11 PLATE HOT BUSSBAR(RF)

TEL ES1810-430333-12 PIN FOR NEW UPPER COOLING BODY

TEL ES1810-431227-11 CAP C/P(MNT) For 85 SCCM UEL.

TEL ES1810-431239-11 PIN,LOCATING F/R TYPE C..S85DI.

TEL ES1880-020093-16 POWER SPLITTER

TEL ES1880-020094-15 MATCHER, MFM-20SA2

TEL ES1880-020100-12 BALL SCREW GZ1504ES-ZAPR-0211*0166

TEL ES1880-020101-12 BALL SCREW GZ1504ES-ZAPR-0191*0116

TEL ES1880-027197-11 AIR CYLINDER CDJ2B16DA-E5161

TEL ES1880-027247-12 BALL SCREW W1502-215X-C5T6

TEL ES1880-027248-12 BALL SCREW W1502-216X-C5T6

TEL ES1880-027504-11 AIR CLYINDER UC2-40-40-B2

TEL ES1881-022002-19 PCB SYSTEM I/O 2 (ATM/MAIN SUB 06&07)

TEL ES1881-022004-1C PCB EPD MONITOR BOARD (MAINTE CTLER)

TEL ES1881-022005-52 PCB EXT UNIT INTCON BOARD (DTM)

TEL ES1881-022006-13 PCB VAC INTCON BOARD

TEL ES1881-022018-17 PCB U/C IF BOARD(MAINTE CTLER)

TEL ES1881-022019-14 PCB REPEATER BOARD

TEL ES1881-022047-56 PCB VAC CONTROL BOARD 2 IEM I/L (L/L1)

TEL ES1881-022047-57 PCB VAC CONTROL BOARD 2 IEM I/L (L/L1)

TEL ES1881-022047-72 PCB VACUUM CONTROL BOARD 2

TEL ES1881-022048-11 PCB CHAM INTCON BOARD 2 (E/S)

TEL ES1881-022060-26 PCB EPD MONITOR BOARD 2(ESC)

TEL ES1881-022071-21 PCB AC DIST BOARD (HAS)

TEL ES1881-022075-11 PCB AGV MODE SW INTCON BOARD(ATM)

TEL ES1881-022118-28 PCB TSBC-V30B(SUB1)K8 (ATM/MAIN SUB 01)

TEL ES1881-022126-12 PCB CHAM INTCON BOARD 3 (P/C)

TEL ES1881-022132-21 PCB ANALOG MONITOR BOARD UTN(TMP)

TEL ES1881-022135-41 PCB OPERATOR IF BOARD 2 IEM (ATM/OPER IF)

TEL ES1881-022136-11 PCB OPE-PANE RELAY BOARD 3(MAINTE CTLER)

TEL ES1881-022137-11 PCB OPE-PANE RELAY BOARD 3(I/L)

TEL ES1881-022141-12 PCB RF CONTROL BOARD 4 (RF RACK)

TEL ES1881-022142-11 PCB GAS IF BOARD(HE2)

TEL ES1885-021882-12 P/C SHIELD RING

TEL ES1886-455163-13 INDEXER ENCODER

TEL ES1886-455164-12 INDEXER WATER SENSOR(LASER)

TEL ES1886-455164-13 INDEXER WATER SENSOR (LASER)

TEL ES1886-455165-12 INDEXER WATER SENSOR(PHOTO DIODE)

TEL ES1886-455165-13 INDEXER WATER SENSOR (PHOTO DIODE)

TEL ES1886-455221-12 P/C WALL PT SENSOR

TEL ES1886-455291-11 CHUCK MOTOR ASSEMBLY

TEL ES1886-455292-11 MOTER (P/A TWEEZERS)

TEL ES1886-455294-1 MOTOR (P/A)

TEL ES1886-455441-11 RF CABLE

TEL ES1886-456363-12 ROTARY MOTOR AND ENCODER

TEL ES1886-456364-12 EXTENDER MOTOR AND ENCODER

TEL ES1886-457617-17 RF CABLE 10M (ES1D86-008352-12)

TEL ES1886-458247-11 HAM LIFTER CYLINDER (ESC) ASSY

TEL ES1886-461134-13 RF GENERATOR-MFG-20A1

TEL ES1887-421988-11 GATE VALVE ASSEMBLY (IEM POLY)

TEL ES1A80-1016700-11 SERVICE BOX, Z-610PC-BNNN

TEL ES1D0-311007-12 TENSIONER GAP A1

TEL ES1D02-400026-11 SPROCKET DRIVE

TEL ES1D02-400026-11 SPROCKET DRIVE

TEL ES1D02-400215-11 SHIELD SPIRAL U-CHAM (S-DT)

TEL ES1D02-400262-11 SCREW BEARING

TEL ES1D05-200020-11 SHIELD DEPO

TEL ES1D05-200020C11 SHIELD, DEPO QU-A-3 (DRM2)

TEL ES1D05-200031-11 COVER..BAFFLE Q-L3(DRM2)

TEL ES1D05-300038-14 SHIELD DEPO DRM2

TEL ES1D05-300053-14 RING INSULATER B2 (DRM2)

TEL ES1D05-300083C13 PLATE UPPER QB FLAT

TEL ES1D05-300152-11 COVER..BAFFLE,Q-L,(DRM2)

TEL ES1D05-300152C11 COVER,BAFFLE,CESC

TEL ES1D05-300161-11 SHIELD, SUPPORT DEPO Q-S1

TEL ES1D05-300161C11 SHIELD,SUPPORT,DEPO,CESC