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ULVAC DA-121DE vacuum pump diaphragm related information

1. Basic performance parameters

Ultimate pressure: 3.3¡Ñ10?Pa. This parameter indicates the lowest pressure value that the vacuum pump can reach under ideal conditions, reflecting its ability to obtain high vacuum.

Pumping rate: 120 liters/minute at 50 Hz, 145 liters/minute at 60 Hz. The pumping rate reflects the volume of gas extracted by the vacuum pump per unit time. Different frequencies have different pumping efficiencies.

Power supply: 1£p100V (50/60Hz), which clarifies the power supply specification applicable to the vacuum pump, which is the basic electrical condition requirement for the normal operation of the equipment.

Mass: 26 kg. The mass will affect the handling and installation of the equipment as well as the stability considerations in the overall equipment layout.

Air inlet pipe diameter: OD£p¡ÑID£p16.0¡Ñ12.0. The appropriate air inlet pipe diameter is an important parameter to ensure that gas can smoothly enter the vacuum pump for extraction operation, and is related to the overall pumping efficiency and performance.

2. Structural characteristics

Diaphragm design: A diaphragm vacuum pump is a vacuum pump that utilizes the reciprocating motion of a thin rubber membrane (diaphragm) for vacuum exhaust. This design gives the pump unique advantages during operation. For example, it can reduce the contact between gas and other components inside the pump (such as lubricating oil, etc.), thereby achieving oil-free operation, which is suitable for applications with high cleanliness requirements. (such as electronic device manufacturing, laboratory analysis, etc.) are very critical.

Dry pump type: It is a diaphragm dry pump, a dry vacuum pump that does not use oil in the gas contact area. Dry vacuum pumps are of great significance in many processes, such as vacuum exhaust systems related to semiconductor and electronic device manufacturing equipment (etching equipment, degumming equipment, ion cleaning equipment, etc.), vacuum heat treatment furnace vacuum exhaust systems (sintering Furnace, carburizing furnace, etc.), lithium battery manufacturing equipment vacuum exhaust system (electrode drying equipment, degassing equipment, liquid injection equipment, etc.) is widely used because it can avoid oil contamination of the process or product.

3. Application fields

Electronics industry: It is widely used in vacuum exhaust systems related to semiconductor and electronic device manufacturing equipment, such as etching equipment, glue removal equipment, ion cleaning equipment, etc. This is because its oil-free operating environment and good vacuum performance can meet the requirements for high cleanliness and precise process control in the electronics manufacturing process.

Heat treatment field: used in vacuum exhaust systems of vacuum heat treatment furnaces, such as sintering furnaces, carburizing furnaces, etc. Among these equipment, ULVAC DA-121DE vacuum pump can effectively extract the gas in the furnace, maintain the vacuum environment in the furnace, and ensure the smooth progress of the heat treatment process and the stability of product quality.

Lithium battery manufacturing: plays a role in the vacuum exhaust system of lithium battery manufacturing equipment, such as electrode drying equipment, degassing equipment, liquid injection equipment, etc. Since the lithium battery manufacturing process has strict requirements on environmental cleanliness, dryness and vacuum, the characteristics of this vacuum pump can meet these requirements.

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