ù§J­³º¸¥æ´«¾÷1783-US4T1H

1783-US4T1H

½Õ³t½d³ò¡A²LÅ㻡´N¬O«ü¯à½T«O¡§ÃB¥~¹BÂౡªp¡¨¤Uªº¤j¤¹³\ÀW²v½d³ò¡C

¤@¯ë¹q¾÷¹BÂà³t«×Á`¦³¤@­Ó¤W­­¡A©Ò¥H³o­Ó½Õ³t½d³ò§ó¦h¬OµÛ­«§CÀW¯S©Ê¡C

¤ñ¤è¤@»O¹q¾÷¨Ì·Ó50Hz³W¹º¡A¦pªG±±¨î¾¹¥i¥H½T«O0.05Hz³£º¡Âà¯x¡A¨º»ò¥i¥H»¡½Õ³t½d³ò¬O1:1000¤F¡C¦ý¤@¯ë¿ï¥ÎV/f±±¨îªºÅÜÀW¾¹¡AÁöµM¥i¥H¹BÂà¦b0.05Hz¡A¦ý¤O¯x«Ü®t¤F¡C©Ò¥H¤]´N¹F¤£¨ì1¡G1000³o»ò¼eªº½Õ³t½d³ò¡CÀW²v½d³ò¡G§YÅÜÀW¾¹¿é¥Xªº°ªÀW²v©M§CÀW²v¡C¦UºØÅÜÀW¾¹³W«hªº½d³ò¤£ºÉ¤@­P¡C¤@¯ë¡A§C§@·~ÀW²v¬ù¬°0.1¦Ü1Hz¡F°ª§@·~ÀW²v¬ù¬°200¦Ü500Hz¡C

¥H¤W¬O«üÅÜÀW¾¹ªºÃB¥~§@·~ÀW²v¡C¦ý¹ê½î§@·~¤¤ÅÜÀW¾¹¤jªº¿é¥XÀW²v¬O¤£¥i¯à¤j©ó¹q·½ªº¤uÀWÀW²vªº¡C¤]´N¬O»¡¡A¥i®Ú¾Ú¹q°Ê¾÷»ÊµP¤WªºÃB¥~ÀW²v¡A´N¥iª¾¹D¹q°Ê¾÷ªºÅÜÀW½d³òÀ³¬O0Hz¦Ü¡]¤uÀW¡^Hz¡CÅÜÀW¹q¾÷ªºÅÜÀW½d³ò¬O«D±`¤jªº¡A¦ý¹ê½î¹B¥Î¤¤ªº¤jÀW²v¤@¯ë¤£¤j©ó¤uÀW¡C

»Ý­nª`·Nªº¬O¡A¤£¦P«¬¸¹©M«~µPªºÅÜÀW¾¹©M¹q¾÷¨ã¦³¤£¦Pªº±±¨î¯à¤O©M¾A¥Î½d³ò¡A¿ï¾Ü¦X¾AªºÅÜÀW¹q¾÷»Ý­n®Ú¾Ú¨ãÅ骺­t¸ü­n¨D©M±±¨î»Ý¨D¨Ó½T©w¡C¦P®É¡A¦b¨Ï¥ÎÅÜÀW¹q¾÷®É¡AÁٻݭnª`·NÅÜÀW½d³òªº¿ï¾Ü©M¨Ï¥Î¤èªk¡A¥H½T«O¹q¾÷ªº¥¿±`¤u§@©M©Ê¡C

AMAT XR80 Implanter Vacuum Interface 9090-00102ITL

AMAT XR80 Implanter Magnet Controller 9090-00086ITL

KLA-Tencor CRS1010 Camera Lens Filter 002001

KLA-Tencor CRS1010 Lens Filter Assy. 000056 working

AMAT XR80 Implanter Vacuum Interface 0090-91621ITL

SVG 90S End Station CPU Interface Unit

AE MDX Delta DC Power Supply 3152194-013R not working

AE RFPP Advanced Energy LF-5 500W Generator 3150012-009

Tested working AMAT 0920-01014 

AE Apex 3000/13 RF Generator 3kW 13.56MHz not working

Edwards Heat Exchanger HTU-108 not working 0190-04379

Edwards HTU-108 Heat Exchanger not working

Olympus KLA-Tencor AIT Microscope Turret 0034223-000

CTI-Cryogenics On-Board Control Module

Edwards HTU-108D Heat Exchanger not working

Olympus KLA-Tencor AIT Microscope Turret 529737

Nikon 4K177-955-1 NSR S202 Transfer Robot Untested

Nikon NSR S202 Transfer Robot Untested

KLA-Tencor 710-663106-001 Dual Stepper Driver 2 

KLA-Tencor EDrawer Hardware RETR Kit 5.2 STD 2139

KLA-Tencor 2139 Flipper Autoloader Kit 780-689642-000

Matsusada HJPZ-1B-HS-V2 High Voltage Power Supply

Hitachi I900SRT BA-H500 H2 DC Power Supply Working

Hitachi I900SRT Wafer Transfer Robot Working

Hitachi I900SRT Lens Assembly Working

Hitachi I900SRT Lens Filter Assembly Working

Yaskawa TEL Unity 2 Servo Controller BC930310 working

KLA-Tencor AIT2 Power Assembly LPM 390500

Varian Turbo-V 250 TMP Controller 9699523S021 working

AMAT SBS Tech. FIC 3 Port Cont CP3308S000297 0010-07093

Fuji Electric 20kVA Transformer JEC-2200-1995 working

Varian Turbo-V 700HT Turbopump Controller 9699545

AMAT XR80 Beamline Vacuum Control 0090-91965 ITL

Yokogawa TEL ACT 12 DD Servo Actuator SR1200A02

TEL ACT 8 12 Chemical I/O Board CPC-T0001A-13

SVG 90S PacificScientific Servo Controller SC753A040-08

SVG 90S Pacific Scientific Controller 121-235 Rev C

KLA-Tencor CRS1010 Camera Filter Assy. 000056 working

Tokyo Electron ACT 8 12 Chemical I/O PCB CPC-T0001A-13

KLA-Tencor CRS1010 Lens Filter Assy. 002001 working

GaSonics Lamp Tray Assembly A95-053-02 lot of 3

Sytron DC Power Supply SYR 75-6.5 working 75V 6.5A

CTI-Cryogenics On-Board 8F Cryopump w/ACM 8116081G006

AE HFV 8000 RF Generator 3155083-000B not working

MOOG BX-300 8-Axis Controller 100-000-943-01 0090-00432

Nova NovaScan Controller 315-20000-00 untested

Daihen RF Match 3000W AMN-30H not working 0190-15323

Neslab Coolflow Chiller HX-150 not working 0010-00570

Thermo Neslab MX900 MX-900W Chiller 0190-06961

Nikon NSR S202 Light Source Module working

AMAT P5000 System Electronic Assy. 0010-09001 working

AMAT P5000 Liquid Source Heater Control Bd. 0100-09180

STIL High Res. AutoFocus Sensor CHRAF2-450-N6 working

CTI Cryogenics On-Board P300 Cryopump 8116250G001

KLA-Tencor Glentek Electronics Analyzer 0045454-000 

AE RFPP LF-5 RF Gen 3150012-009 working 500W 0190-01014

KLA-Tencor SLX RF Bench Assy. 740-336864-001 untested

KLA-Tencor Rotary Transfer Arm 720-07360-000

KLA-Tencor XP Objective Lens 0110155-000 Untested

AE Advanced Energy RFPP LF-5 Generator 7520572050 500W

VAT Control Valve 16540-PA41-ACA1/0009 gate pendulum

Berkeley Process 4-Axis Controller BAM-432T working

Brooks MTR-5 MultiTran 5 Robot Dual Arm Assy. working

port Kensington Robot 15-3702-1425-26 0190-22250

Kensington 25-4021-0015-05 Robot Controller 0190-23562

AMAT XR80 Vacuum Interface 9090-00102 ITL working

Synetics End Effector UK-9240-06310-D  9240-06310

Synetics End Effector UK-9240-06174-C  9240-06174

Yaskawa Synetics 300mm End Effector HU0480262 

Yaskawa Synetics 300mm End Effector BR943067 

Yaskawa Synetics 300mm End Effector HU0480679 

Hitachi 200mm Wafer Alignment Unit HT98311 working

Tec Izu 24V DC Power Supply 4S064-644 working Nikon NSR

JAE 6 Axis Vibration Measurement Unit JNP-003 Nikon NSR

KLA-Tencor port AIT3 Mask Changer 556190 

Hubbell Electric Booster Heater A613RXX Nikon NSR-S202A

KLA-Tencor Laser Mod 0124593-000 

KLA-Tencor AIT UV Laser Servo Detector 0099586-001 

Osaka Vacuum Turbopump Power Supply TD2001

Pfeiffer Vacuum Pump UniDry DBP 050

NOVAPURE S2000 HF Effluent Gas Scrubber

Edwards DryStar Dry Vacuum Pump QDP40 AS-IS