A16B-1210-0820
A16B-1210-0820
®Ú¾Ú¤§«e¦b STEP7 ³n¥ó¤¤ªº³]¸m¡A¦b¥»¨Ò¤¤ STW §Y¬° QW40¡A©Ò¥H¡G
¦pªGn ¥¿Âà ¡A«h¡G STF «H¸¹¡] b11¡^¬° ON¡ASTR «H¸¹¡] b12¡^¬° OFF¡APZD ±Ò¥Î¡]b10¡^¬° ON¡A±±¨î±Ò¥Î¡] b3¡^¬° ON¡C¥Ñ¦¹±o¥X STW ¬° 1000 1100 0111 1111¡A§Y 8C7F¡C
¦pªGn ¤ÏÂà ¡A«h¡G STF «H¸¹¡] b11¡^¬° OFF¡ASTR «H¸¹¡] b12¡^¬° ON¡APZD ±Ò¥Î¡]b10¡^¬° ON¡A±±¨î±Ò¥Î¡] b3¡^¬° ON¡C¥Ñ¦¹±o¥X STW ¬° 1001 0100 0111 1111¡A§Y 947F¡C
¦pªGn °±¤î ¡A«h¡G STF «H¸¹¡] b11¡^¬° OFF¡ASTR «H¸¹¡] b12¡^¬° OFF¡A PZD ±Ò¥Î¡]b10¡^¬° ON¡A±±¨î±Ò¥Î¡] b3¡^¬° ON¡C¥Ñ¦¹±o¥X STW ¬° 1000 0100 0111 1111¡A§Y 847F¡C
¦pªGn ´_¦ì ¡A«h¡G Fault ´_¦ì«H¸¹¡] b7¡^¬° ON¡APZD ±Ò¥Î¡] b10¡^¬° ON¡A±±¨î±Ò¥Î¡] b3¡^¬° ON¡C¥Ñ¦¹±o¥X STW ¬° 0000 0100 1111 1111¡A§Y 4FF¡C
©Ò¥H¥un¥Î MOV «ü¥O±N¥H¤W¹ïÀ³ªº 16 ¶i¨î¼ÆȽᵹ QW40¡]§Y STW ¡^¡A§Y¥i¹ê²{¥¿¡B¤ÏÂà¹B¦æ¡A°±¤î¤Î´_¦ìµ¥¶µ¾Þ§@¡C
2098-IPD-030-DN
2098-IPD-075-DN
2098-IPD-150-DN
2098-IPD-HV030-DN
2098-IPD-HV050-DN
2098-IPD-HV100-DN
2098-IPD-HV150-DN
2098-IPD-HV220-DN
2098-DSD-005-SE
2098-DSD-010-SE
2098-DSD-020-SE
2098-DSD-030-SE
2098-DSD-075-SE
2098-DSD-150-SE
2098-DSD-HV030-SE
2098-DSD-HV050-SE
2098-DSD-HV100-SE
2098-DSD-HV150-SE
2098-DSD-HV220-SE
0010-09935 MONOCHROMATOR MODULE ASSY, ENDPOINT
0010-09337 LAMP MODULE ASSY 200MM
0010-02902 GASLINE ISOLATOR, SUBZERO BESC
0020-24411 CATHODE INTLK COVER PRECLEAN 2
0010-00592 INTERCONNECT BOX, ASSY
0040-23218 BASE, TC ISOLATION AMP SUB-ZERO, LTBESC
0020-22838 LIFT HOOP, PRELEAN
0020-22242 LIFT HOOP 8"
0010-24625 INTERFACE BOX ASSY, 300MM EMAX CTS
0010-10957 ASSY DRIVE FC WXZ P5000 W/VITON
0020-23367 CHASSIS DC BIAS SHORT MONITOR
0010-70271 ASSY 101 WAFER LIFT
0050-80621 WELDMENT COOL WATER CHAMBER ANNEAL ECP S
0190-01168 T/C ASSY, PRODUCER, CONSOLIDATED HEATER
3400-01076 HOSE FLEX LINE W/ELBOW HE L30" DIA 1/2 "
0040-39557 GASLINE INSERT, LONG CHBR FEED THRU HT T
0040-39554 GIMBAL ASSY,ORIENTER LIFTER ASSY
3870-01335 VALVE PNEU-ACT RTANG 1"OD 2.75CF AIR-OPE
0040-22946 COIL, 300MM PRECLEAN STRAIGHT-3/4"
0021-36056 TUBE, PLUG, TXZ
¿Ý¤½ºô¦w³Æ41010502000017¸¹ 
