¤j¤f®|®gÀWÂ÷¤l·½ RFICP 380
¤W®ü§BªF¬ü°ê KRi ¤j¤f®|®gÀWÂ÷¤l·½ RFICP 380, 3¼h¬]·¥³]p, ¬]·¥¤f®| 38cm, ´£¨ÑÂ÷¤l°Ê¯à 100-1200eV ¼e§ôÂ÷¤l§ô, ¤jÂ÷¤l§ô¬y > 1000mA, º¡¨¬ 300 mm (12^¤o)´¹¶êÀ³¥Î. ¼sªxÀ³¥Î©óÂ÷¤l§ô¨è»k¾÷.
KRi ®gÀWÂ÷¤l·½ RFICP 380 ¯S©Ê
1. ©ñ¹qµÄ Discharge Chamber, µL»Ý¹qÂ÷¿Oµ·, ³q¹L®gÀW§Þ³N´£¨Ñ°ª±K«×Â÷¤l, ¤uÃÀ®É¶¡§óªø. 2kW & 1.8 MHz, ®gÀW¦Û°Ê¤Ç°t
2. Â÷¤l·½µ²ºc¼Ò¶ô¤Æ³]p
3. Â÷¤l¥ú¾Ç, ¦Û¹ï·Ç§Þ³N, ·Çª½¥ú§ô³]p, ¦Û°Ê½Õ¸`§Þ³N«O»Ù¬]·¥ªº¨Ï¥Î¹Ø©R©M¥i«´_ªº¤uÃÀ¹B¦æ
4. ¥þ¦Û°Ê±±¨î¾¹
5. Â÷¤l§ô°Ê¯à 100-1200eV
6. ¬]·¥¤f®| 38cm, º¡¨¬ 300 mm (12^¤o)´¹¶êÀ³¥Î
®gÀWÂ÷¤l·½ RFICP 380 §Þ³N³W®æ:
¶§·¥ | ¹q·P½¢¦Xµ¥Â÷¤lÅé |
¤j¶§·¥¥\²v | >1kW |
¤jÂ÷¤l§ô¬y | > 1000mA |
¹qÀ£½d³ò | 100-1500V |
Â÷¤l§ô°Ê¯à | 100-1200eV |
®ðÅé | Ar, O2, N2,¨ä¥L |
¬y¶q | 5-50sccm |
À£¤O | < 0.5mTorr |
Â÷¤l¥ú¾Ç, ¦Û¹ï·Ç | OptiBeamTM |
Â÷¤l§ô¬]·¥ | 38cm £X |
¬]·¥§÷½è | à» |
Â÷¤l§ô¬y§Îª¬ | ¥¦æ,»EµJ,´²®g |
¤¤©M¾¹ | LFN 2000 |
°ª«× | 38.1 cm |
ª½®| | 58.2 cm |
Âêºò¦w¸ËªkÄõ | 12¡¨CF |
®gÀWÂ÷¤l·½ RFICP 380 °ò¥»¤Ø¤o:
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