KRI ½u©ÊÀNº¸Â÷¤l·½ eH Linear
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ÀNº¸Â÷¤l·½ eH 400 ¤Ø¤o
¤Ø¤o: ª½®|= 3.7¡§ °ª= 3¡¨
©ñ¹q¹qÀ£ / ¹q¬y: 50-300eV / 5A
¾Þ§@®ðÅé: Ar, Xe, Kr, O2, N2, ¦³¾÷«eÅé
KRI ÀNº¸Â÷¤l·½ eH Linear §Þ³N°Ñ¼Æ
«¬¸¹ | eHL400-2/ eHL400-3/ eHL400-4/ eHL400-5 |
¨Ñ¹q | DC magnetic confinement |
- ¹qÀ£ | 40-200V VDC |
- ¶§·¥µ²ºc | ¼Ò¶ô¤Æ |
¹q·½±±¨î | eHL-30010A |
°t¸m | - |
- ³±·¥¤¤©M¾¹ | Filamentless |
- Â÷¤l§ôµo´²¨¤«× | > 45¢X (hwhm) |
- ¶§·¥ | ¼Ð·Ç©Î Grooved |
- ©³®y | ²¾°Ê©Î§Ö±µªkÄõ |
- °ª«× | 10 cm |
¼e«× | 10 cm |
- ªø«× | ~ 100cm |
-¤uÃÀ®ðÅé | Ar, Xe, Kr, O2, N2, Others |
Model | eHL 200-3 | eHL 200-5 |
Height (nominal) | 2.9¡¨ (7.4cm) | 2.9¡¨ (7.4cm) |
Width (nominal) | 3.3¡¨ (8.4cm) | 3.3¡¨ (8.4cm) |
Length (nominal) | Determined by number of modules & application | Determined by number of modules & application |
Cathode/Neutralizer | Yes | Yes |
Anode module | Yes | Yes |
Filamentless | Yes | Yes |
Orientation | Vertical / Horizontal | Vertical / Horizontal |
Process gases | Inert, reactive, & organic | Inert, reactive, & organic |
Power controller | eH Plasma Power Pack | eH Plasma Power Pack |
1978 ¦~ Dr. Kaufman ³Õ¤h¦b¬ü°ê³Ð¥ß Kaufman & Robinson, Inc ¤½¥q, ¬ãµo¥Í²£¦Ò¤Ò°ÒÂ÷¤l·½, ÀNº¸Â÷¤l·½©M®gÀWÂ÷¤l·½. ¬ü°ê¦Ò¤Ò°ÒÂ÷¤l·½¾ú¸g 40 ¦~§ï¨}¤Îµo®i¤w¨ú±o¦h¶µ±M§Q. Â÷¤l·½¼sªx¥Î©óÂ÷¤l²M¬~ PC, Â÷¤l»k¨è IBE, »²§UÁὤ IBAD, Â÷¤lÂq®gÁὤ IBSD »â°ì, ¤W®ü§BªF¬O¬ü°ê¦Ò¤Ò°ÒÂ÷¤l·½¤¤°êÁ`¥N²z.
Y±z»Ýn¶i¤@¨Bªº¤F¸Ñ KRi ÀNº¸Â÷¤l·½, ½Ð°Ñ¦Ò¥H¤UÁpµ¸¤è¦¡
¤W®ü§BªF: ù¤p©j »OÆW§BªF: ¤ý¤p©j
T: +86-21-5046-3511 ext 108 T: +886-3-567-9508 ext 161
F: +86-21-5046-1322 F: +886-3-567-0049
M: +86 152-0195-1076( ·L«H¦P¸¹ ) M: +886-975-571-910
www.hakuto-china.cn www.hakuto-vacuum.com.tw
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