Pfeiffer ´õ½ü¤À¤l¬¦ HiPace 80
¤W®ü§BªF¾P°âºû×¼w°ê´¶µo´õ½ü¤À¤l¬¦ Pfeiffer HiPace 80 ©â³t¥i¹F¨ì 71 l/s ´õ½ü¤À¤l¬¦. HiPace 80 ¹ï©Ò¦³®ðÅ骺°ª©â³t©M§ó°ªÀ£ÁY¤ñ¨Ï¨ä¼sªxÀ³¥Î©ó¯uªÅ¦æ·~. ¶°¦¨ÅX°Ê¹q¸ô, ¾A¥Î©ó¤u·~Àô¹Ò, ³q¹L«OÅ@µ¥¯Å IP54, ¥b¾ÉÅé S2, UL / CSA »{ÃÒ. ³q¹L±±¨î¾¹ºÊ±±¹Bºâ¼Æ¾ÚºÉ¥i¯à«OÃÒ¤À¤l¬¦ªº©Ê. ´õ½ü¤À¤l¬¦ HiPace 80 ¥i¥H¥ô·N¦ì¸m¦w¸Ë. ¦ÛµM·§N, ¦hºØ°t¥ó¥i¿ïº¡¨¬¼sªxÀ³¥Î.
´õ½ü¤À¤l¬¦ HiPace 80 ¯S©Ê
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´õ½ü¤À¤l¬¦ HiPace 80 §Þ³N°Ñ¼Æ
¶i®ð¤f | DN 63 ISO-K | DN 63 CF-F | DN 40 ISO-KF | DN 63 ISO-K | DN 63 CF-F | DN 40 ISO-KF | |
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¤À¤l¬¦±±¨î¾¹ | «¬¸¹ | ¼Ð°t | ¼Ð°t | ¼Ð°t | ¿ï°t | ¿ï°t | ¿ï°t |
©â³t | Ar L/S | 66 | 66 | 30 | 66 | 66 | 30 |
H2 L/S | 48 | 48 | 38 | 48 | 48 | 38 | |
He L/S | 58 | 58 | 41 | 58 | 58 | 41 | |
N2 L/S | 67 | 67 | 35 | 67 | 67 | 35 | |
À£ÁY¤ñ | Ar | 1X1011 | 1X1011 | 1X1011 | 1X1011 | 1X1011 | 1X1011 |
H2 | 1.4X105 | 1.4X105 | 1.4X105 | 1.4X105 | 1.4X105 | 1.4X105 | |
He | 1.3X107 | 1.3X107 | 1.3X107 | 1.3X107 | 1.3X107 | 1.3X107 | |
N2 | 1X1011 | 1X1011 | 1X1011 | 1X1011 | 1X1011 | 1X1011 | |
¥þÂà³t®É®ðÅé¬y¶q | Ar hPa l/s | 0.54 | 0.54 | 0.54 | 0.54 | 0.54 | 0.54 |
H2 hPa l/s | 15.3 | 15.3 | 15.3 | 15.3 | 15.3 | 15.3 | |
He hPa l/s | 2.7 | 2.7 | 2.7 | 2.7 | 2.7 | 2.7 | |
N2 hPa l/s | 1.3 | 1.3 | 1.3 | 1.3 | 1.3 | 1.3 | |
·¥À£¤O | hPa | ¡Õ1X10-7 | ¡Õ5X10-10 | ¡Õ1X10-7 | ¡Õ1x10-7 | ¡Õ5x10-10 | ¡Õ1x10-7 |
¤j¹w©â¯uªÅ | N2 | 22 | 22 | 22 | 22 | 22 | 22 |
¹qÀ£ | VDC | 24 | 24 | 24 | 24 | 24 | 24 |
¤j¹q¬y | A | 4.6 | 4.6 | 4.6 | 5.5 | 4.6 | 4.6 |
Âà³t¡Ó 2 % | RPM | 90000 | 90000 | 90000 | 90000 | 90000 | 90000 |
Án¾¸ | dB(A) | 48 | 48 | 48 | 48 | 48 | 48 |
¤¹³\¤jºÏ³õ | mT | 3.3 | 3.3 | 3.3 | 3.3 | 3.3 | 3.3 |
±Ò°Ê®É¶¡ | min | 1.7 | 1.7 | 1.7 | 3 | 3 | 3 |
Ǧq | kg | 2.4 | 3.8 | 2.4 | 2.1 | 3.5 | 2.1 |
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Pfeiffer ´õ½ü¤À¤l¬¦ HiPace 80 ®M¸Ë:
¤W®ü§BªF´£¨Ñ§¹¾ãªº¤À¤l¬¦®M¸Ë¨Ñ±z¿ï¾Ü, ¥]§t¤@»O HiPace 80 ¤À¤l¬¦¥D¾÷©M±±¨î¹q·½µ¥, ¤À¤l¬¦®M¸Ëº¡¨¬°ò¥»ªºÀ³¥Î, ¥i¥H¦w¸Ë¦b©Ò¦³±¡ªp¤U¨Ã»´ªQ½Õ¸Õ´õ½ü¤À¤l¬¦. ®M¸Ë¤º°t¸m¦p¤U:
¤À¤l¬¦ | ¤À¤l¬¦¹q·½»P±±¨î¾¹³s±µ½u | ·®° | OmniControl 200 | ±µ¤f¹qÆl, M12 m ª½«¬/M12 m ª½«¬,3 m |
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¤À¤l¬¦À³¥Î HiPace 80
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¥b¾ÉÅé: PVD, inspection, bonding, MBE, load-locks
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¬ãµo: ®Ö¬ã¨s, µ¥Â÷¤l¬ã¨s, ²É¤l¥[³t¾¹, §Ná¬ã¨s, ¯Ç¦Ì§Þ³N, ¥Íª«§Þ³N
¤W®ü§BªF«È¤á¤À¤l¬¦À³¥Î¤@¡GHiPace 80, HiPace 400 ¥Î©ó¤À¤l§ô¥~©µ MBE, ¥Dn°w¹ïª÷ÄÝÁ¡½¤¤Î§÷®Æ¾¹¥óªº®ñ¤Æª«¥~©µ¥Íªø.
¤W®ü§BªF«È¤á¤À¤l¬¦À³¥Î¤G¡GHiPace 80, HiPace 300 ¥Î©óSPECS ªñ±`À£¥ú¹q¤l¯àÃлö³]³Æ.JPG)
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´õ½ü¤À¤l¬¦ HiPace 80 ¥Ø«e¦b°â«¬¸¹¡G
¤À¤l¬¦ HiPace 80 TC 110 DN 63 ISO-K
¤À¤l¬¦ HiPace 80 TC 110 DN 63 CF-F
¤À¤l¬¦ HiPace 80 TC 110 DN 40 ISO-F
¤À¤l¬¦ HiPace 80 TCP 350 DN 63 ISO-K
¤À¤l¬¦ HiPace 80 TCP 350 DN 63 CF-F
¤À¤l¬¦ HiPace 80 TCP 350 DN 40 ISO-KF
¤À¤l¬¦ HiPace 80 TC 110 Profibus DN 63 ISO-K
¤À¤l¬¦ HiPace 80 TC 110 Profibus DN 63 CF-F
¤À¤l¬¦ HiPace 80 TC 110 Profibus DN 40 ISO-KF
¤À¤l¬¦ HiPace 80 TC 110 ¹q·½ OPS 70 DN 63 ISO-K
¤À¤l¬¦ HiPace 80 TC 110 ¹q·½ OPS 70 DN 63 CF-F
¤À¤l¬¦ HiPace 80 TC 110 ¹q·½ OPS 70 DN 40 ISO-KF
¤À¤l¬¦ HiPace 80 TC 110 ¹q·½ OPS 70 Profibus DN 63 ISO-K
¤À¤l¬¦ HiPace 80 TC 110 ¹q·½ OPS 70 Profibus DN 63 CF-F
¤À¤l¬¦ HiPace 80 TC 110 ¹q·½ OPS 70 Profibus DN 40 ISO-KF
¤À¤l¬¦ HiPace 80 TC 110 E74 DN 63 ISO-K
¤À¤l¬¦ HiPace 80 TC 110 E74 DN 63 CF-F
¤À¤l¬¦ HiPace 80 TC 110 E74 DN 40 ISO-KF
¤À¤l¬¦ HiPace 80 TC 110 E74 ¹q·½ OPS 70 DN 63 ISO-K
¤À¤l¬¦ HiPace 80 TC 110 E74 ¹q·½ OPS 70 DN 63 CF-F
¤À¤l¬¦ HiPace 80 TC 110 E74 ¹q·½ OPS 70 DN 40 ISO-KF
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¤À¤l¬¦²Õ Hicube 80 | ¤À¤l¬¦ HiPace 60 P | ¤À¤l¬¦ HiPace 80 Neo |
¤W®ü§BªF Pfeiffer ´õ½ü¤À¤l¬¦©â³t½d³ò 10 ¦Ü 2700 L/S, Âà³t°ª 90,000 rpm, ·¥¯uªÅ¤j 1E-11 mbar, ¹ï¤p¤À¤l®ðÅé¨ã¦³§ó°ªªºÀ£ÁY¤ñ, ¹ê½îÃÒ©ú Pfeiffer ´õ½ü¤À¤l¬¦¹B¦æ®É¶¡¥i¥H¹F¨ì 100,000 ¤p®É! ´¶µo¤À¤l¬¦´£¨Ñ´_¦X¶b©Ó¤À¤l¬¦©M¤¶b¥þºÏ¯B¤À¤l¬¦¤G¤j«Y¦Cº¡¨¬¤£¦PÀ³¥Î, ±ÀÂË·f°t Pfeiffer ±Û¤ù¬¦©M·F¬¦¦@¦P¨Ï¥Î. ±ÀÂˤÀ¤l¬¦¨å«¬À³¥Î >>
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