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SDCS-PIN-46

SDCS-PIN-46

SDCS-PIN-46

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TEL ES039-126638-1 PCB DC:RM12-6R3GB(ATM PS BOX)

TEL ES042-000229-1 LENS, EPD

TEL ES043-000721 HEATER

TEL ES043-000723-1 HEATER JACKET SILICON RBR 20 *  670/580HM

TEL ES043-000724-1 HEATER JACKET SILICIN RBR 20 * 900/60.1 OHM

TEL ES043-000726-1 HEATER JACKET SILICON RBR

TEL ES043-000727-1 HEATER SILICONE RUBBER

TEL ES043-000728-1 BELLOWS HEATER

TEL ES043-000730-1 HEATER JACKET SILICON RBR

TEL ES043-000731-1 HEATER JACKET SILICON RBR

TEL ES046-000226-1 LAMP SLP129 E12

TEL ES046-000316-1 LAMP LMH-7FJ AC220V WHITE

TEL ES046-162396-1 LAMP LMH-162K W AC220V

TEL ES046-700394-1 LAMP LMH-7FJ AC110V GREEN

TEL ES046-700395-1 ALMP LMH-7FJ AC220V GREEN

TEL ES047-001162-1 TUBE SPIRAL NI-06 SHIELD

TEL ES050-001798-1 HARD DISK DRIVE

TEL ES070-000047-1 TOOL 6LTDK SCREW DRIVER TORQUE

TEL ES071-000319-1 SILICON HEATER JACKET GLUE (8401 PUMP STACKS)

TEL ES071-001250-1 SHEET,CONDUCTIVE..10-04-17 1500MM

TEL ES1805-220098-11 SHIELD RING, POLISHED. T7L5

TEL ES1805-320125-21 COVER RING INNER

TEL ES1805-320126-21 COVER RING OUTER

TEL ES1805-320127-21 BASE RING INTEGRATED(SCCM-OX)

TEL ES1805-420055-11 PLATE WINDOW EPD(LLD-SE)

TEL ES1810-120660-13 UEL BODY (UNITY85PE)

TEL ES1810-121002-15 SPACER CERAMIC

TEL ES1810-121085-17 DEPO SHIELD

TEL ES1810-121190-12 ESC LOWER ELECTRODE 8N (PB-UP)

TEL ES1810-121898-13 SHIELD DEPO LOWER-Y

TEL ES1810-121899-12 PLATE EXHAUST T6 EXH-Y

TEL ES1810-220986-14 INSULATING PIPE (8K-ESC)

TEL ES1810-221024-14 UPPER COOLING PLATE

TEL ES1810-221063-14 EXHAUST RING B(8K-ESC)

TEL ES1810-221470-24 UPPER ELECTRODE (8K-180)

TEL ES1810-222811-11 INSULATOR UPPER

TEL ES1810-223289-13 SLIT EXT PLATE W1. 6P3.1 (GROUND)

TEL ES1810-223352-11 COVER WALL CHAMBER BOTTOM (GND)

TEL ES1810-223352-11 COVER WALL CHAMBER BOTTOM (GND)

TEL ES1810-224511C11 FOCUS RING 8-NW-2(8K-ESC)

TEL ES1810-225123-11 FOCUS RING

TEL ES1810-322044-11 CENTERING W/MESH (4")

TEL ES1810-322129-12 EXN RING A (8K-ESC)

TEL ES1810-323416-11 RING LABYRINTH(IPB)

TEL ES1810-323442-11 O-RING SHIELD A (IPB)(P/CGAP)

TEL ES1810-323444-11 O-RING SHIELD B (IPB) (P/C GAP)

TEL ES1810-323445-11 O-RING SHIELD B (IPB) (P/C GAP)

TEL ES1810-323465-11 HOLDER CERAMIC IEM B

TEL ES1810-323466 -11 HOLDER CERAMIC IEM C

TEL ES1810-323467-13 RF ROD(IPB)

TEL ES1810-323759-13 LIFTER X (8KI-ESC)

TEL ES1810-323760-12 LIFTER GUIDE (8KI-ESC)

TEL ES1810-323783-11 RF CONNECTOR A2 (IPB)

TEL ES1810-323897-11 RING PROTECT

TEL ES1810-324233-12 HOLDER ISOLATION GND ROD

TEL ES1810-324276-12 PIN LIFTER

TEL ES1810-324964-1 BELLOWS COVER

TEL ES1810-325059-11 PIN LIFTER ALUMINIUM

TEL ES1810-326611-11 WINDOW PLATE

TEL ES1810-327364-11 PTFE HOLDER

TEL ES1810-328005-11 COVER,PROTECT,ESC

TEL ES1810-328123-11 BELLOWS LIFTER

TEL ES1810-329064-12 WINDOW, AL-3-Y -

TEL ES1810-329078-11 COVER, SCREW A-AL-Y

TEL ES1810-329079-11 COVER, SCREW B - AL

TEL ES1810-424823-12 FEED TERMINAL

TEL ES1810-424835-12 SPRING B(ESC-3)

TEL ES1810-424945-16 SUPPORT GUIDE (8K-ESC)

TEL ES1810-424947-12 LIFTER SUPPORT (8K-ESC)

TEL ES1810-424955-11 RF ROD

TEL ES1810-425089-11 LIFTER STOPPER A (8K-ESC)

TEL ES1810-426215-11 TEFLON CAP B

TEL ES1810-426886-11 SCREW LIFTER (8KI-ESC)

TEL ES1810-426982-12 TEFLON RING

TEL ES1810-427260-11 CAP

TEL ES1810-427469-11 SCREW BLANK

TEL ES1810-427566-12 RF CONNECTOR B2 (IPB)

TEL ES1810-427841-12 LEVER

TEL ES1810-427842-12 STOPPER

TEL ES1810-427859-12 RF BLOCK TYPE B

TEL ES1810-427905-11 BLIND RF BLOCK(INSULATOR)

TEL ES1810-428050-11 FITTING INLET GAS B

TEL ES1810-428121-11 CREW BLANK

TEL ES1810-428129-11 SHIELD WINDOW

TEL ES1810-428233-12 BAFFLE MTG SCREW M3 X 12 AH-V50

TEL ES1810-428245-12 BAFFLE MTG SCREW M3X5 AH-V50

TEL ES1810-428336-11 TERMINAL, HIGH VOLTAGE

TEL ES1810-428520-12 PIN BOTTOM ELECTRODE SIDE WALL (0.5DIA)

TEL ES1810-428715-12 CAP ALUMINIUM 2

TEL ES1810-428806-11 UV CUT FILM (VIEW PORT)

TEL ES1810-428943-11 SUPPORT LIFTER 4 (IPB)

TEL ES1810-429126-11 GAS LINE P/C-2-UP (IPU)

TEL ES1810-429138-11 H CONNECTION TUNE (UP)(IPB)

TEL ES1810-429291-11 PIPE GAS HE

TEL ES1810-429649-11 PUSHER LIFTER (PTFE) 3

TEL ES1810-429707-12 UPPER ARM WIRE 180316 NYLON

TEL ES1810-429708-11 WIRE FOR ROBOT ARM

TEL ES1810-429709-11 WIRE FOR ROBOT ARM

TEL ES1810-430038-11 PLATE HOT BUSSBAR(RF)

TEL ES1810-430333-12 PIN FOR NEW UPPER COOLING BODY

TEL ES1810-431227-11 CAP C/P(MNT) For 85 SCCM UEL.

TEL ES1810-431239-11 PIN,LOCATING F/R TYPE C..S85DI.

TEL ES1880-020093-16 POWER SPLITTER

TEL ES1880-020094-15 MATCHER, MFM-20SA2

TEL ES1880-020100-12 BALL SCREW GZ1504ES-ZAPR-0211*0166

TEL ES1880-020101-12 BALL SCREW GZ1504ES-ZAPR-0191*0116

TEL ES1880-027197-11 AIR CYLINDER CDJ2B16DA-E5161

TEL ES1880-027247-12 BALL SCREW W1502-215X-C5T6

TEL ES1880-027248-12 BALL SCREW W1502-216X-C5T6

TEL ES1880-027504-11 AIR CLYINDER UC2-40-40-B2

TEL ES1881-022002-19 PCB SYSTEM I/O 2 (ATM/MAIN SUB 06&07)

TEL ES1881-022004-1C PCB EPD MONITOR BOARD (MAINTE CTLER)

TEL ES1881-022005-52 PCB EXT UNIT INTCON BOARD (DTM)

TEL ES1881-022006-13 PCB VAC INTCON BOARD

TEL ES1881-022018-17 PCB U/C IF BOARD(MAINTE CTLER)

TEL ES1881-022019-14 PCB REPEATER BOARD

TEL ES1881-022047-56 PCB VAC CONTROL BOARD 2 IEM I/L (L/L1)

TEL ES1881-022047-57 PCB VAC CONTROL BOARD 2 IEM I/L (L/L1)

TEL ES1881-022047-72 PCB VACUUM CONTROL BOARD 2

TEL ES1881-022048-11 PCB CHAM INTCON BOARD 2 (E/S)

TEL ES1881-022060-26 PCB EPD MONITOR BOARD 2(ESC)

TEL ES1881-022071-21 PCB AC DIST BOARD (HAS)

TEL ES1881-022075-11 PCB AGV MODE SW INTCON BOARD(ATM)

TEL ES1881-022118-28 PCB TSBC-V30B(SUB1)K8 (ATM/MAIN SUB 01)

TEL ES1881-022126-12 PCB CHAM INTCON BOARD 3 (P/C)

TEL ES1881-022132-21 PCB ANALOG MONITOR BOARD UTN(TMP)

TEL ES1881-022135-41 PCB OPERATOR IF BOARD 2 IEM (ATM/OPER IF)

TEL ES1881-022136-11 PCB OPE-PANE RELAY BOARD 3(MAINTE CTLER)

TEL ES1881-022137-11 PCB OPE-PANE RELAY BOARD 3(I/L)

TEL ES1881-022141-12 PCB RF CONTROL BOARD 4 (RF RACK)

TEL ES1881-022142-11 PCB GAS IF BOARD(HE2)

TEL ES1885-021882-12 P/C SHIELD RING

TEL ES1886-455163-13 INDEXER ENCODER

TEL ES1886-455164-12 INDEXER WATER SENSOR(LASER)

TEL ES1886-455164-13 INDEXER WATER SENSOR (LASER)

TEL ES1886-455165-12 INDEXER WATER SENSOR(PHOTO DIODE)

TEL ES1886-455165-13 INDEXER WATER SENSOR (PHOTO DIODE)

TEL ES1886-455221-12 P/C WALL PT SENSOR

TEL ES1886-455291-11 CHUCK MOTOR ASSEMBLY

TEL ES1886-455292-11 MOTER (P/A TWEEZERS)

TEL ES1886-455294-1 MOTOR (P/A)

TEL ES1886-455441-11 RF CABLE

TEL ES1886-456363-12 ROTARY MOTOR AND ENCODER

TEL ES1886-456364-12 EXTENDER MOTOR AND ENCODER

TEL ES1886-457617-17 RF CABLE 10M (ES1D86-008352-12)

TEL ES1886-458247-11 HAM LIFTER CYLINDER (ESC) ASSY

TEL ES1886-461134-13 RF GENERATOR-MFG-20A1

TEL ES1887-421988-11 GATE VALVE ASSEMBLY (IEM POLY)

TEL ES1A80-1016700-11 SERVICE BOX, Z-610PC-BNNN

TEL ES1D0-311007-12 TENSIONER GAP A1

TEL ES1D02-400026-11 SPROCKET DRIVE

TEL ES1D02-400026-11 SPROCKET DRIVE

TEL ES1D02-400215-11 SHIELD SPIRAL U-CHAM (S-DT)

TEL ES1D02-400262-11 SCREW BEARING

TEL ES1D05-200020-11 SHIELD DEPO

TEL ES1D05-200020C11 SHIELD, DEPO QU-A-3 (DRM2)

TEL ES1D05-200031-11 COVER..BAFFLE Q-L3(DRM2)

TEL ES1D05-300038-14 SHIELD DEPO DRM2

TEL ES1D05-300053-14 RING INSULATER B2 (DRM2)

TEL ES1D05-300083C13 PLATE UPPER QB FLAT

TEL ES1D05-300152-11 COVER..BAFFLE,Q-L,(DRM2)

TEL ES1D05-300152C11 COVER,BAFFLE,CESC

TEL ES1D05-300161-11 SHIELD, SUPPORT DEPO Q-S1

TEL ES1D05-300161C11 SHIELD,SUPPORT,DEPO,CESC

TEL ES1D05-300162C11 RING, FOCUS

TEL ES1D05-400022-14 WINDOW SHIELD DEPO DRM2

TEL ES1D05-400022C14 WINDOW SHIELD DEPO(DRM2)

TEL ES1D05-400028-11 WINDOW, UP A-2 (DRM)

TEL ES1D10-090515-TM COVER BELLOW A CE-Y FOR CE RAMIC

TEL ES1D10-100386-11 INSULATOR, BOTTOM P

TEL ES1D10-100670-13 ELECTRODE UPPER QB FLAT

TEL ES1D10-100907-12 BAFFLE PLATE

TEL ES1D10-100915-11 ELECTRODE UPPER QB. FLAT

TEL ES1D10-100938-12 RF PLATE,PC1 (DRM2)

TEL ES1D10-101111-11 RF PLATE,PC2 (DRM2)

TEL ES1D10-101446-22 PLATE,BAFFLE 0-12(DRM2)

TEL ES1D10-1014746-22 PLATE BAFFLE 0-12 (D RM2 )

TEL ES1D10-190272-TM COOLANT PIPE

TEL ES1D10-190477-TM BASE,DEPO SHIELD SUPPORT, E

TEL ES1D10-200705-14 UPPER, ELECTRODE, 1, (DRM2)

TEL ES1D10-200733-11 RING, SHIELD (DRM2)

TEL ES1D10-200921-12 DEPO SHIELD

TEL ES1D10-201429-15 UPPER,ELECTRODE R-1

TEL ES1D10-201588-12 UPPER ELECTRODE P (DRM2)

TEL ES1D10-201595-15 SHIELD, DEPOT 85L DRM2

TEL ES1D10-202177-12 UPPER ELECTRODE

TEL ES1D10-203753-12 RING, CENTERING-Y

TEL ES1D10-204310C11 200MM UPPER ELECTRODE MODIFIED

TEL ES1D10-301452-12 HOLDER,BEARING,(DRM2)

TEL ES1D10-302057-11 JIG, GAP (DRM2)

TEL ES1D10-302569-13 BRACKET..SLIDE,R,(DRM2)

TEL ES1D10-302586-12 COVER BELLOWS B

TEL ES1D10-302600-11 SUPPORT S-PIPE

TEL ES1D10-302869-11 PUSHER PIN

TEL ES1D10-302936-11 SHAFT RF INLET

TEL ES1D10-303014-12 SUPPORT SHIELD DEPO DRM2

TEL ES1D10-303124-16 DEPO SHIELD

TEL ES1D10-303124-M1 SHIELD, DEP

TEL ES1D10-303356-11 CASSETTE CHAMBER VACUUM PIPE

TEL ES1D10-303367-14 PIPE, TEE

TEL ES1D10-304039-11 FLEXLINE, HE/VAC

TEL ES1D10-305152-11 COVER , SCREW  TEFLON

TEL ES1D10-305523-12 PIPE HE-IEM-UP

TEL ES1D10-305996-11 IPE..HE1-8