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2. ¨Ï¥Î Quadera? ³n¥ó, ¾Þ§@²³æ
3. ªº´ú¶q³t«×, °ª¹F 125£gs/ amu
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½èÃФÀªR»ö HiQuad? §Þ³N³W®æ
½è¶q¼Æ amu | 1-128 | 1-300 | 1-512 *3) |
§CÀË´ú mbar | 5X10-16 | 2X10-15 | 1X10-15 |
Ar ÆF±Ó«×,§C *1) A/mbar | 1X10-3 | 2X10-4 | 5X10-4 |
¤j¾Þ§@À£¤O mbar | |||
ªk©Ô²Ä | 1X10-4 | 1X10-4 | 1X10-4 |
SEM | 1X10-5 | 1X10-5 | 1X10-5 |
¤ÀÀ£¤ñ SEM ppb | < 0.3 | < 1 | < 0.5 |
¤ÀªR»ö | QMA 410 | QMA 430 | QMA 400 |
±ì«Y²Î, §÷®Æ / ª½®| mm | Mo / 16 | ¤£ù׿û / 8 | Mo / 8 |
®gÀWµo¥Í¾¹ (RF) | QMH 400-1 | QMH 400-5 | QMH 400-5 |
ÀR¹qp«e¸m©ñ¤j¾¹ | EP 422 | EP 422 | EP 422 |
¤u§@·Å«× / ¤ÀªR»ö¢XC | 150 | 150 | 150 |
¯M¯N·Å«× / ¤ÀªR»ö *2) ¢XC | 400 | 400 | 400 |
³s±µªkÄõ | DN 100 CF-F | DN 63 CF-F | DN 63 CF-F |
*1) °¾Âà³æ¤¸¤¤ªºªk©Ô²Ä,¼Ð·Ç¤À¿ë²v,±aºÏÅKªº¥æ¤e§ôÂ÷¤l·½,µo®g 1 mA
*2) ±aºÏÅK, °ª 300¢XC
*3) ¤K¤p®É¤ºÃ©w©Ê < 0.1¢H, ¦³§U©ó¹ï¬Û¾F½è¶q¼Æ 40Ar / 41
Pfeiffer ½èÃФÀªR»ö HiQuad?À³¥Î
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qq: 2821409400
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