REXROTH VT-HACD-1-16/V0/1-0-0

REXROTH VT-HACD-1-16/V0/1-0-0

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REXROTH VT-HACD-1-16/V0/1-0-0 

ENI Spectrum RF Generator B-5002  0190-15320

Osaka Vacuum Turbopump Set TH532ASAW 

TEL ACT 12 DC Power Supply TDK MSE181E

AE E'Wave Bipolar DC Power Supply 3152603-014D

ENI OEM-2000 

MKS ENI SPECTRUM 5kW RF Generator B-5002-01

AE Pinnacle 20KW DC Power Supply 3152412-129B

AE E'Wave DC Power Supply 3152603-014D 0190-23269

AE Pinnacle 20kW DC Supply 3152412-149A 0190-08124

AE Pinnacle 10kW 6kW DC Supply 3152412-214 0190-14126

Yaskawa Dual Arm Trnsfr Robot XU-RCM7220  0190-25393

ENI OEM-2000 Rev.B RF Generator 2000W 

KLA-Tencor AIT 2 Optics Module 0099610-000

TDK TEL ACT 12 DC Backup Module MSE181D

ENI Spectrum RF Generator B-5002  0190-15320

AE RFPP RF25M RF Generator 3150048-000 

AE RF25M 2500W RF Generator 3150048-004B 

ENI Spectrum B-5002 RF Generator 0190-15320

ENI OEM-12B3 3 Phase RF Generator  0190-76006

Hitachi DC Power Generator 3-821755-2

TEL ACT 8 Adhesion Process Station 811

Advanced Energy Ovation 2760 RF Generator 3150292-007

AE Apex 5513 

AE Apex 5513  0190-11209

Edwards iQDP80  QMB250 

Asyst SMIF-300FL 

Edwards iQDP40 Dry Vacuum Pump QMB250

AE RF Match Network 3155031-021A 

MECS Wafer Handling Robot UTM-3500 

Seiko Seiki Turbomolecular STP SCU-H1000C

AE PDX 900-2V RF Generator 3156024-110A

AE PDX 900-2V 3156024-110C 

Despatch Tool Conditioning Oven SNB2-24-S

AE VHF 2060 RF Generator 3150852-005A

Asyst Transfer Robot UTX-F5500-16

AE Apex 3513 0920-00005

AE HFV 8000 5kW RF Generator 3155083-109B

Ebara A10S 

AE HFV 8000 RF Generator 3155083-111A

TEL P-8 Wafer Prober 200mm Dual Arm Robot & Controller

Kawasaki Robot Slave Controller 30C61C-B002 0190-12377

Kawasaki Master Robot Controller 30C61D-B001 0190-12378

Yaskawa Robot Controller XU-CN1112A working 0190-10288

Yaskawa Prealigner 300 mm XU-ACP4801 0190-05652

ENI DCG-200 DCG-200E 

Brooks PRI Wafer Robot WTM-511-2-FWS02-V1