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ALLEN BRADLEY 2711P-T10C22A9P

AE Pinnacle 6kW DC Power Supply 3152412-218E 

Brooks PRI Robot WTM-511-2-FWS02-V1-CU 

Brooks Fixload Load Port Fixload 25

ENI Genesis GMW-50 3kW RF Generator 0190-13202

ENI Genesis GHW-12Z RF Generator 0190-25527

TEL ACT 8 SOG Absolute Filter CT2980-090863-11 

TEL ACT 8 FFU Fan Filter Unit CT2980-091974-11

TEL ACT 8 FFU Fan Filter Unit CT2980-090796-11

AE Pinnacle 6kW DC Power Supply 3152412-218G 

SMC Heat Exchanger INR-498-P002 

AE Apex 5513 0190-11209

AE Apex 3013 RF Generator 3kW 0920-00049

TEL ACT 12 IRA Driver Assy CT2987-416031-W4

TEL ACT 8 IRA Driver Assy CT2987-406077-15 

AE Apex 3013 RF Generator 3kW 0190-11208

AE Apex 3013 RF Generator 3kW 0190-09837

AE Apex 3013 RF Generator 3kW 0190-11208

AE Apex 3513 3.5kW RF Generator 0920-00051

AE HFV 8000 8kW RF Generator 3155083-192 0190-15553

AE Pinnacle 6kW 10kW DC Supply 3152412-116 0190-13866

AE Ovation VHF 2760 RF Generator 3150292-005 0190-14887

AE Apex 3013 RF Generator 3kW working 0190-09837

SMC HE Control Unit Assy INR-498-P004 0190-18420

AE Pinnacle 6kW 10kW DC Supply 3152412-116 0190-07172

MRC Eclipse Star RF High Voltage Source A118144

OneAC SVG 90 Power Conditioner CLD31750SPL

Brooks PRI Wafer Robot WTM511-2-FWS02-V1

Brooks PRI Automation Robot WTM-511-2-FWS02

AE Pinnacle 6kW 3152412-219C

AE HFV 8000 8kW RF Generator 3155083-192 

Hitachi I900SRT Wafer Inspection Transfer Robot

AE Navigator RF Match 3155132-001D 

AE Apex 3000/13 RF Generator 3kW 

Brooks Genus Right Vacuum Load Lock 001-9300-54

TEL ACT 12 Temp Control REX-B870-CS1B CT2986-430279-W1

Nikon NSR S202 

Equipe PRI Robot Controller ABM-405-1-S-CE-S293

Newport Kensington Robot 15-3701-1425-25

AE HFV 8000 RF Generator 3155083-109B 

AE HFV 8000 RF Generator 3155083-109A 

AE HFV 8000 8kW RF Generator 3155083-180A 

PRI Automation Robot ABM-405-1-S-CE-S293 

AE RFPP RF25M 2500W RF Generator 3150048-000

LAM Research Electrical Control Panel 685-017705-027

Comdel CLX-2500  0190-02702

AE Remote Plasma Gen. 3151801-004A 

Comdel CLX-2500 350kHz-LF 

Comdel CLX-2500 LF RF Gen 2500W FP1335R4 0190-01370

Comdel CLX-2500 350KHz-LF FP1336R3

Shimadzu Turbo Molecular Pump TMP 3403LMC

Coherent IndyStar 193 Laser Discharge Unit 0190-B0160

Osaka Vacuum Turbopump TH542 untested 3620-01353

ENI OEM-12B3 RF Generator 1250W 0190-76028

ENI OEM-12B RF Generator 1250W 0190-76048