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«¬¸¹ | ASM 390 | ASM 392 | ASM 380 ¤w°±²£ |
ÀË´ú®ðÅé | 4He, 3He, H2 | ||
¤pÀË´úº|²v | ¯uªÅ¼Ò¦¡: 1X10-12 mbar l/s | ||
¹ï®ó®ðªº©â³t | 10 l/s | 25 l/s, ¤º¸m2»O¤À¤l¬¦ | 7 l/s |
«e¯Å¬¦©â³t | 35 m3/h | ||
¶i®ð¤f¤jÀ£¤O | 20 mbar | 20 mbar | 15 mbar |
µL®Õ·Çªº±Ò°Ê®É¶¡(20¢XC) | 2 min | 2 min | < 4.5 min |
¶i®ð¤f | DN 40 ISO-KF | ||
ÅTÀ³®É¶¡ | < 1 s | ||
Interface, ¿ï°t | RS-232, I/O, Ethernet | ||
¾¸µ | 55 dB (A) | 55 dB (A) | 53 dB (A) |
Ǧq | 125 kg | 130 kg | 110 kg |
¤Ø¤o(LxWxH) | 1072 x 455 x 1025 mm | 1072 x 455 x 1025 mm | 1065 X 455 X 1025 mm |
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